Pattern SiO₂ #53

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opened 2025-05-24 10:22:23 +00:00 by q3k · 1 comment

q3k commented

2025-05-24 10:22:23 +00:00

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Microfabrication process for getting features etched out of silicon oxide grown on silicon substrate, eg. to expose active areas.

There are three main steps to this:

Growing a layer of SiO₂ using #54
Adding a lithography mask using #62
Etching away the exposed areas of SiO₂ using #5

Microfabrication process for getting features etched out of silicon oxide grown on silicon substrate, eg. to expose active areas. There are three main steps to this: 1. Growing a layer of SiO₂ using #54 2. Adding a lithography mask using #62 3. Etching away the exposed areas of SiO₂ using #5

q3k added the

Type

Process

label 2025-05-24 10:22:23 +00:00

forgejo-actions commented

2025-05-24 10:22:29 +00:00

Partial Techtree

flowchart BT

    classDef eoi fill:#fff, stroke:#000, color:#000;
    classDef dependant fill:#fff, stroke:#888, color:#888;
    classDef dep_missing fill:#fcc, stroke:#800, color:#000;
    classDef dep_assigned fill:#ffa, stroke:#a50, color:#000;
    classDef dep_completed fill:#afa, stroke:#080, color:#000;
    0:::eoi
    0["#53 | MISSING\n<i>Process</i>\n<b>Pattern SiO₂</b>"]
    1:::dep_missing
    1["#62 | MISSING\n<i>Process</i>\n<b>Lithography</b>"]
    2:::dep_missing
    2["#70 | MISSING\n<i>Research</i>\n<b>STM Lithography</b>"]
    3:::dep_assigned
    3["#49 | ASSIGNED\n<i>Development</i>\n<b>Spin Coater</b>"]
    4:::dep_assigned
    4["#43 | ASSIGNED\n<i>Development</i>\n<b>Scanning Tunneling Microscope (STM)</b>"]
    5:::dep_missing
    5["#88 | MISSING\n<i>Development</i>\n<b>Piezo Slider Actuators</b>"]
    6:::dep_missing
    6["#81 | MISSING\n<i>Process</i>\n<b>Interferometry</b>"]
    7:::dep_assigned
    7["#86 | ASSIGNED\n<i>Development</i>\n<b>Optomechanical System</b>"]
    8:::dep_missing
    8["#82 | MISSING\n<i>Equipment</i>\n<b>Coherent Light Source</b>"]
    9:::dep_missing
    9["#87 | MISSING\n<i>Equipment</i>\n<b>Diode Laser</b>"]
    10:::dep_missing
    10["#85 | MISSING\n<i>Development</i>\n<b>Laser Diode Driver/Controller</b>"]
    11:::dep_missing
    11["#84 | MISSING\n<i>Equipment</i>\n<b>Stabilized Helium-Neon Laser</b>"]
    12:::dep_missing
    12["#83 | MISSING\n<i>Equipment</i>\n<b>External Cavity Diode Laser (ECDL)</b>"]
    13:::dep_completed
    13["#42 | COMPLETED\n<i>Development</i>\n<b>STM Vibration Isolation</b>"]
    14:::dep_missing
    14["#51 | MISSING\n<i>Process</i>\n<b>Maskless Photolithography</b>"]
    15:::dep_missing
    15["#52 | MISSING\n<i>Development</i>\n<b>Maskless photolithography stepper</b>"]
    16:::dep_missing
    16["#50 | MISSING\n<i>Process</i>\n<b>E-beam Lithography</b>"]
    17:::dep_missing
    17["#35 | MISSING\n<i>Equipment</i>\n<b>SEM Beam Blanker</b>"]
    18:::dep_completed
    18["#28 | COMPLETED\n<i>Equipment</i>\n<b>Scanning Electron Microscope (SEM)</b>"]
    19:::dep_completed
    19["#26 | COMPLETED\n<i>Equipment</i>\n<b>Water Cooling</b>"]
    20:::dep_missing
    20["#54 | MISSING\n<i>Process</i>\n<b>Si Thermal Oxidation</b>"]
    21:::dep_assigned
    21["#55 | ASSIGNED\n<i>Equipment</i>\n<b>Tube Furnace</b>"]
    22:::dep_missing
    22["#21 | MISSING\n<i>Process</i>\n<b>Reactive Ion Etching</b>"]
    23:::dep_missing
    23["#25 | MISSING\n<i>Equipment</i>\n<b>Plasma Etcher</b>"]
    24:::dep_assigned
    24["#27 | ASSIGNED\n<i>Equipment</i>\n<b>Technical Ventilation</b>"]
    25:::dep_assigned
    25["#24 | ASSIGNED\n<i>Equipment</i>\n<b>~3ph Power (below 10kW)</b>"]
    26:::dep_missing
    26["#5 | MISSING\n<i>Process</i>\n<b>BOE Etching</b>"]
    27:::dep_assigned
    27["#4 | ASSIGNED\n<i>Equipment</i>\n<b>Wet Lab (Chemistry)</b>"]
    28:::dep_assigned
    28["#68 | ASSIGNED\n<i>Equipment</i>\n<b>Heating Stirrer</b>"]
    29:::dep_missing
    29["#67 | MISSING\n<i>Equipment</i>\n<b>Chemical Storage/Containment</b>"]
    30:::dep_missing
    30["#23 | MISSING\n<i>Equipment</i>\n<b>Fume Hood</b>"]
    31:::dep_missing
    31["#22 | MISSING\n<i>Equipment</i>\n<b>Running Water and Sink</b>"]
    32:::dependant
    32["#61 | MISSING\n<i>Process</i>\n<b>Zeloof Z1 process</b>"]
    9 --> 10
    12 --> 9
    8 --> 12
    8 --> 11
    8 --> 9
    6 --> 8
    6 --> 7
    2 --> 4
    2 --> 3
    29 --> 24
    1 --> 16
    1 --> 14
    1 --> 2
    20 --> 21
    0 --> 26
    0 --> 22
    0 --> 20
    0 --> 1
    14 --> 3
    14 --> 15
    16 --> 17
    16 --> 3
    4 --> 13
    4 --> 6
    4 --> 5
    17 --> 18
    18 --> 19
    23 --> 25
    23 --> 24
    30 --> 24
    22 --> 23
    26 --> 27
    27 --> 31
    27 --> 30
    27 --> 24
    27 --> 29
    27 --> 28
    32 --> 0

Digest: 7f814d477628725fe6b34559775931f7ffd5dfb371cb3325c06b8c2d9727bd16; Last Updated: 2025-08-21 21:33:45

## Partial Techtree ```mermaid flowchart BT classDef eoi fill:#fff, stroke:#000, color:#000; classDef dependant fill:#fff, stroke:#888, color:#888; classDef dep_missing fill:#fcc, stroke:#800, color:#000; classDef dep_assigned fill:#ffa, stroke:#a50, color:#000; classDef dep_completed fill:#afa, stroke:#080, color:#000; 0:::eoi 0["#53 | MISSING\nProcess\nPattern SiO₂"] 1:::dep_missing 1["#62 | MISSING\nProcess\nLithography"] 2:::dep_missing 2["#70 | MISSING\nResearch\nSTM Lithography"] 3:::dep_assigned 3["#49 | ASSIGNED\nDevelopment\nSpin Coater"] 4:::dep_assigned 4["#43 | ASSIGNED\nDevelopment\nScanning Tunneling Microscope (STM)"] 5:::dep_missing 5["#88 | MISSING\nDevelopment\nPiezo Slider Actuators"] 6:::dep_missing 6["#81 | MISSING\nProcess\nInterferometry"] 7:::dep_assigned 7["#86 | ASSIGNED\nDevelopment\nOptomechanical System"] 8:::dep_missing 8["#82 | MISSING\nEquipment\nCoherent Light Source"] 9:::dep_missing 9["#87 | MISSING\nEquipment\nDiode Laser"] 10:::dep_missing 10["#85 | MISSING\nDevelopment\nLaser Diode Driver/Controller"] 11:::dep_missing 11["#84 | MISSING\nEquipment\nStabilized Helium-Neon Laser"] 12:::dep_missing 12["#83 | MISSING\nEquipment\nExternal Cavity Diode Laser (ECDL)"] 13:::dep_completed 13["#42 | COMPLETED\nDevelopment\nSTM Vibration Isolation"] 14:::dep_missing 14["#51 | MISSING\nProcess\nMaskless Photolithography"] 15:::dep_missing 15["#52 | MISSING\nDevelopment\nMaskless photolithography stepper"] 16:::dep_missing 16["#50 | MISSING\nProcess\nE-beam Lithography"] 17:::dep_missing 17["#35 | MISSING\nEquipment\nSEM Beam Blanker"] 18:::dep_completed 18["#28 | COMPLETED\nEquipment\nScanning Electron Microscope (SEM)"] 19:::dep_completed 19["#26 | COMPLETED\nEquipment\nWater Cooling"] 20:::dep_missing 20["#54 | MISSING\nProcess\nSi Thermal Oxidation"] 21:::dep_assigned 21["#55 | ASSIGNED\nEquipment\nTube Furnace"] 22:::dep_missing 22["#21 | MISSING\nProcess\nReactive Ion Etching"] 23:::dep_missing 23["#25 | MISSING\nEquipment\nPlasma Etcher"] 24:::dep_assigned 24["#27 | ASSIGNED\nEquipment\nTechnical Ventilation"] 25:::dep_assigned 25["#24 | ASSIGNED\nEquipment\n~3ph Power (below 10kW)"] 26:::dep_missing 26["#5 | MISSING\nProcess\nBOE Etching"] 27:::dep_assigned 27["#4 | ASSIGNED\nEquipment\nWet Lab (Chemistry)"] 28:::dep_assigned 28["#68 | ASSIGNED\nEquipment\nHeating Stirrer"] 29:::dep_missing 29["#67 | MISSING\nEquipment\nChemical Storage/Containment"] 30:::dep_missing 30["#23 | MISSING\nEquipment\nFume Hood"] 31:::dep_missing 31["#22 | MISSING\nEquipment\nRunning Water and Sink"] 32:::dependant 32["#61 | MISSING\nProcess\nZeloof Z1 process"] 9 --> 10 12 --> 9 8 --> 12 8 --> 11 8 --> 9 6 --> 8 6 --> 7 2 --> 4 2 --> 3 29 --> 24 1 --> 16 1 --> 14 1 --> 2 20 --> 21 0 --> 26 0 --> 22 0 --> 20 0 --> 1 14 --> 3 14 --> 15 16 --> 17 16 --> 3 4 --> 13 4 --> 6 4 --> 5 17 --> 18 18 --> 19 23 --> 25 23 --> 24 30 --> 24 22 --> 23 26 --> 27 27 --> 31 27 --> 30 27 --> 24 27 --> 29 27 --> 28 32 --> 0 ``` Digest: 7f814d477628725fe6b34559775931f7ffd5dfb371cb3325c06b8c2d9727bd16; Last Updated: 2025-08-21 21:33:45

q3k added a new dependency 2025-05-24 10:22:50 +00:00

#51 Maskless Photolithography

q3k added a new dependency 2025-05-24 10:22:55 +00:00

#50 E-beam Lithography

q3k added a new dependency 2025-05-24 10:23:00 +00:00

#21 Reactive Ion Etching

q3k added a new dependency 2025-05-24 10:23:04 +00:00

#5 BOE Etching

q3k added a new dependency 2025-05-24 10:26:45 +00:00

#54 Si Thermal Oxidation

q3k added a new dependency 2025-05-24 10:47:21 +00:00

#61 Zeloof Z1 process