Pattern SiO₂ #53
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#61 Zeloof Z1 process
fafo/techtree
#5 HNO₃/HF Etching
fafo/techtree
#21 Reactive Ion Etching
fafo/techtree
#54 Si Thermal Oxidation
fafo/techtree
#62 Lithography
fafo/techtree
Reference: fafo/techtree#53
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Microfabrication process for getting features etched out of silicon oxide grown on silicon substrate, eg. to expose active areas.
There are three main steps to this:
Partial Techtree
Digest: 123c5e5ad6bfd9d1d02716cae9fd47d253905d5c4d8bda46028a9fbec84e1272; Last Updated: 2025-06-01 21:31:43
Pattern SiO2to Pattern SiO₂