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Pattern SiO₂ #53

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opened 2025-05-24 10:22:23 +00:00 by q3k · 1 comment
q3k commented 2025-05-24 10:22:23 +00:00
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Microfabrication process for getting features etched out of silicon oxide grown on silicon substrate, eg. to expose active areas.

There are three main steps to this:

  1. Growing a layer of SiO₂ using #54
  2. Adding a lithography mask using #62
  3. Etching away the exposed areas of SiO₂ using #5
Microfabrication process for getting features etched out of silicon oxide grown on silicon substrate, eg. to expose active areas. There are three main steps to this: 1. Growing a layer of SiO₂ using #54 2. Adding a lithography mask using #62 3. Etching away the exposed areas of SiO₂ using #5
q3k added the
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 label 2025-05-24 10:22:23 +00:00
forgejo-actions commented 2025-05-24 10:22:29 +00:00
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Partial Techtree

flowchart BT

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    classDef dependant fill:#fff, stroke:#888, color:#888;
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    0:::eoi
    0["<a href='https://git.fa-fo.de/fafo/techtree/issues/53' target='_blank'>#53</a> | MISSING\n<i>Process</i>\n<b>Pattern SiO₂</b>"]
    1:::dep_missing
    1["<a href='https://git.fa-fo.de/fafo/techtree/issues/62' target='_blank'>#62</a> | MISSING\n<i>Process</i>\n<b>Lithography</b>"]
    2:::dep_missing
    2["<a href='https://git.fa-fo.de/fafo/techtree/issues/70' target='_blank'>#70</a> | MISSING\n<i>Research</i>\n<b>STM Lithography</b>"]
    3:::dep_missing
    3["<a href='https://git.fa-fo.de/fafo/techtree/issues/49' target='_blank'>#49</a> | MISSING\n<i>Development</i>\n<b>Spin Coater</b>"]
    4:::dep_assigned
    4["<a href='https://git.fa-fo.de/fafo/techtree/issues/43' target='_blank'>#43</a> | ASSIGNED\n<i>Development</i>\n<b>Scanning Tunneling Microscope (STM)</b>"]
    5:::dep_completed
    5["<a href='https://git.fa-fo.de/fafo/techtree/issues/42' target='_blank'>#42</a> | COMPLETED\n<i>Development</i>\n<b>STM Vibration Isolation</b>"]
    6:::dep_missing
    6["<a href='https://git.fa-fo.de/fafo/techtree/issues/51' target='_blank'>#51</a> | MISSING\n<i>Process</i>\n<b>Maskless Photolithography</b>"]
    7:::dep_missing
    7["<a href='https://git.fa-fo.de/fafo/techtree/issues/52' target='_blank'>#52</a> | MISSING\n<i>Development</i>\n<b>Maskless photolithography stepper</b>"]
    8:::dep_missing
    8["<a href='https://git.fa-fo.de/fafo/techtree/issues/50' target='_blank'>#50</a> | MISSING\n<i>Process</i>\n<b>E-beam Lithography</b>"]
    9:::dep_missing
    9["<a href='https://git.fa-fo.de/fafo/techtree/issues/35' target='_blank'>#35</a> | MISSING\n<i>Equipment</i>\n<b>SEM Beam Blanker</b>"]
    10:::dep_completed
    10["<a href='https://git.fa-fo.de/fafo/techtree/issues/28' target='_blank'>#28</a> | COMPLETED\n<i>Equipment</i>\n<b>Scanning Electron Microscope (SEM)</b>"]
    11:::dep_completed
    11["<a href='https://git.fa-fo.de/fafo/techtree/issues/26' target='_blank'>#26</a> | COMPLETED\n<i>Equipment</i>\n<b>Water Cooling</b>"]
    12:::dep_missing
    12["<a href='https://git.fa-fo.de/fafo/techtree/issues/54' target='_blank'>#54</a> | MISSING\n<i>Process</i>\n<b>Si Thermal Oxidation</b>"]
    13:::dep_missing
    13["<a href='https://git.fa-fo.de/fafo/techtree/issues/55' target='_blank'>#55</a> | MISSING\n<i>Equipment</i>\n<b>Tube Furnace</b>"]
    14:::dep_missing
    14["<a href='https://git.fa-fo.de/fafo/techtree/issues/21' target='_blank'>#21</a> | MISSING\n<i>Process</i>\n<b>Reactive Ion Etching</b>"]
    15:::dep_missing
    15["<a href='https://git.fa-fo.de/fafo/techtree/issues/25' target='_blank'>#25</a> | MISSING\n<i>Equipment</i>\n<b>Plasma Etcher</b>"]
    16:::dep_assigned
    16["<a href='https://git.fa-fo.de/fafo/techtree/issues/27' target='_blank'>#27</a> | ASSIGNED\n<i>Equipment</i>\n<b>Technical Ventilation</b>"]
    17:::dep_assigned
    17["<a href='https://git.fa-fo.de/fafo/techtree/issues/24' target='_blank'>#24</a> | ASSIGNED\n<i>Equipment</i>\n<b>~3ph Power (below 10kW)</b>"]
    18:::dep_missing
    18["<a href='https://git.fa-fo.de/fafo/techtree/issues/5' target='_blank'>#5</a> | MISSING\n<i>Process</i>\n<b>HNO₃/HF Etching</b>"]
    19:::dep_assigned
    19["<a href='https://git.fa-fo.de/fafo/techtree/issues/4' target='_blank'>#4</a> | ASSIGNED\n<i>Equipment</i>\n<b>Wet Lab (Chemistry)</b>"]
    20:::dep_assigned
    20["<a href='https://git.fa-fo.de/fafo/techtree/issues/68' target='_blank'>#68</a> | ASSIGNED\n<i>Equipment</i>\n<b>Heating Stirrer</b>"]
    21:::dep_missing
    21["<a href='https://git.fa-fo.de/fafo/techtree/issues/67' target='_blank'>#67</a> | MISSING\n<i>Equipment</i>\n<b>Chemical Storage/Containment</b>"]
    22:::dep_missing
    22["<a href='https://git.fa-fo.de/fafo/techtree/issues/23' target='_blank'>#23</a> | MISSING\n<i>Equipment</i>\n<b>Fume Hood</b>"]
    23:::dep_missing
    23["<a href='https://git.fa-fo.de/fafo/techtree/issues/22' target='_blank'>#22</a> | MISSING\n<i>Equipment</i>\n<b>Running Water and Sink</b>"]
    24:::dependant
    24["<a href='https://git.fa-fo.de/fafo/techtree/issues/61' target='_blank'>#61</a> | MISSING\n<i>Process</i>\n<b>Zeloof Z1 process</b>"]
    2 --> 4
    2 --> 3
    21 --> 16
    1 --> 8
    1 --> 6
    1 --> 2
    12 --> 13
    0 --> 18
    0 --> 14
    0 --> 12
    0 --> 1
    6 --> 3
    6 --> 7
    8 --> 9
    8 --> 3
    4 --> 5
    9 --> 10
    10 --> 11
    15 --> 17
    15 --> 16
    22 --> 16
    14 --> 15
    18 --> 19
    19 --> 23
    19 --> 22
    19 --> 16
    19 --> 21
    19 --> 20
    24 --> 0

Digest: 293ae6bc9f4e244adfddc3704d97784c7d3f23c0a56156b3fa6ecfc28523253e; Last Updated: 2025-06-15 21:48:34

## Partial Techtree ```mermaid flowchart BT classDef eoi fill:#fff, stroke:#000, color:#000; classDef dependant fill:#fff, stroke:#888, color:#888; classDef dep_missing fill:#fcc, stroke:#800, color:#000; classDef dep_assigned fill:#ffa, stroke:#a50, color:#000; classDef dep_completed fill:#afa, stroke:#080, color:#000; 0:::eoi 0["<a href='https://git.fa-fo.de/fafo/techtree/issues/53' target='_blank'>#53</a> | MISSING\n<i>Process</i>\n<b>Pattern SiO₂</b>"] 1:::dep_missing 1["<a href='https://git.fa-fo.de/fafo/techtree/issues/62' target='_blank'>#62</a> | MISSING\n<i>Process</i>\n<b>Lithography</b>"] 2:::dep_missing 2["<a href='https://git.fa-fo.de/fafo/techtree/issues/70' target='_blank'>#70</a> | MISSING\n<i>Research</i>\n<b>STM Lithography</b>"] 3:::dep_missing 3["<a href='https://git.fa-fo.de/fafo/techtree/issues/49' target='_blank'>#49</a> | MISSING\n<i>Development</i>\n<b>Spin Coater</b>"] 4:::dep_assigned 4["<a href='https://git.fa-fo.de/fafo/techtree/issues/43' target='_blank'>#43</a> | ASSIGNED\n<i>Development</i>\n<b>Scanning Tunneling Microscope (STM)</b>"] 5:::dep_completed 5["<a href='https://git.fa-fo.de/fafo/techtree/issues/42' target='_blank'>#42</a> | COMPLETED\n<i>Development</i>\n<b>STM Vibration Isolation</b>"] 6:::dep_missing 6["<a href='https://git.fa-fo.de/fafo/techtree/issues/51' target='_blank'>#51</a> | MISSING\n<i>Process</i>\n<b>Maskless Photolithography</b>"] 7:::dep_missing 7["<a href='https://git.fa-fo.de/fafo/techtree/issues/52' target='_blank'>#52</a> | MISSING\n<i>Development</i>\n<b>Maskless photolithography stepper</b>"] 8:::dep_missing 8["<a href='https://git.fa-fo.de/fafo/techtree/issues/50' target='_blank'>#50</a> | MISSING\n<i>Process</i>\n<b>E-beam Lithography</b>"] 9:::dep_missing 9["<a href='https://git.fa-fo.de/fafo/techtree/issues/35' target='_blank'>#35</a> | MISSING\n<i>Equipment</i>\n<b>SEM Beam Blanker</b>"] 10:::dep_completed 10["<a href='https://git.fa-fo.de/fafo/techtree/issues/28' target='_blank'>#28</a> | COMPLETED\n<i>Equipment</i>\n<b>Scanning Electron Microscope (SEM)</b>"] 11:::dep_completed 11["<a href='https://git.fa-fo.de/fafo/techtree/issues/26' target='_blank'>#26</a> | COMPLETED\n<i>Equipment</i>\n<b>Water Cooling</b>"] 12:::dep_missing 12["<a href='https://git.fa-fo.de/fafo/techtree/issues/54' target='_blank'>#54</a> | MISSING\n<i>Process</i>\n<b>Si Thermal Oxidation</b>"] 13:::dep_missing 13["<a href='https://git.fa-fo.de/fafo/techtree/issues/55' target='_blank'>#55</a> | MISSING\n<i>Equipment</i>\n<b>Tube Furnace</b>"] 14:::dep_missing 14["<a href='https://git.fa-fo.de/fafo/techtree/issues/21' target='_blank'>#21</a> | MISSING\n<i>Process</i>\n<b>Reactive Ion Etching</b>"] 15:::dep_missing 15["<a href='https://git.fa-fo.de/fafo/techtree/issues/25' target='_blank'>#25</a> | MISSING\n<i>Equipment</i>\n<b>Plasma Etcher</b>"] 16:::dep_assigned 16["<a href='https://git.fa-fo.de/fafo/techtree/issues/27' target='_blank'>#27</a> | ASSIGNED\n<i>Equipment</i>\n<b>Technical Ventilation</b>"] 17:::dep_assigned 17["<a href='https://git.fa-fo.de/fafo/techtree/issues/24' target='_blank'>#24</a> | ASSIGNED\n<i>Equipment</i>\n<b>~3ph Power (below 10kW)</b>"] 18:::dep_missing 18["<a href='https://git.fa-fo.de/fafo/techtree/issues/5' target='_blank'>#5</a> | MISSING\n<i>Process</i>\n<b>HNO₃/HF Etching</b>"] 19:::dep_assigned 19["<a href='https://git.fa-fo.de/fafo/techtree/issues/4' target='_blank'>#4</a> | ASSIGNED\n<i>Equipment</i>\n<b>Wet Lab (Chemistry)</b>"] 20:::dep_assigned 20["<a href='https://git.fa-fo.de/fafo/techtree/issues/68' target='_blank'>#68</a> | ASSIGNED\n<i>Equipment</i>\n<b>Heating Stirrer</b>"] 21:::dep_missing 21["<a href='https://git.fa-fo.de/fafo/techtree/issues/67' target='_blank'>#67</a> | MISSING\n<i>Equipment</i>\n<b>Chemical Storage/Containment</b>"] 22:::dep_missing 22["<a href='https://git.fa-fo.de/fafo/techtree/issues/23' target='_blank'>#23</a> | MISSING\n<i>Equipment</i>\n<b>Fume Hood</b>"] 23:::dep_missing 23["<a href='https://git.fa-fo.de/fafo/techtree/issues/22' target='_blank'>#22</a> | MISSING\n<i>Equipment</i>\n<b>Running Water and Sink</b>"] 24:::dependant 24["<a href='https://git.fa-fo.de/fafo/techtree/issues/61' target='_blank'>#61</a> | MISSING\n<i>Process</i>\n<b>Zeloof Z1 process</b>"] 2 --> 4 2 --> 3 21 --> 16 1 --> 8 1 --> 6 1 --> 2 12 --> 13 0 --> 18 0 --> 14 0 --> 12 0 --> 1 6 --> 3 6 --> 7 8 --> 9 8 --> 3 4 --> 5 9 --> 10 10 --> 11 15 --> 17 15 --> 16 22 --> 16 14 --> 15 18 --> 19 19 --> 23 19 --> 22 19 --> 16 19 --> 21 19 --> 20 24 --> 0 ``` <small>Digest: 293ae6bc9f4e244adfddc3704d97784c7d3f23c0a56156b3fa6ecfc28523253e; Last Updated: 2025-06-15 21:48:34</small>
q3k added a new dependency 2025-05-24 10:22:50 +00:00
#51 Maskless Photolithography
q3k added a new dependency 2025-05-24 10:22:55 +00:00
#50 E-beam Lithography
q3k added a new dependency 2025-05-24 10:23:00 +00:00
#21 Reactive Ion Etching
q3k added a new dependency 2025-05-24 10:23:04 +00:00
#5 HNO₃/HF Etching
q3k added a new dependency 2025-05-24 10:26:45 +00:00
#54 Si Thermal Oxidation
q3k added a new dependency 2025-05-24 10:47:21 +00:00
#61 Zeloof Z1 process
rahix added a new dependency 2025-05-25 01:02:50 +00:00
#62 Lithography
rahix removed a dependency 2025-05-25 01:02:56 +00:00
#50 E-beam Lithography
rahix removed a dependency 2025-05-25 01:03:00 +00:00
#51 Maskless Photolithography
rahix changed title from Pattern SiO2 to Pattern SiO₂ 2025-05-29 11:51:10 +00:00
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#61 Zeloof Z1 process
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#21 Reactive Ion Etching
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#54 Si Thermal Oxidation
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Reference: fafo/techtree#53
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