fafo/techtree
fafo/techtree
15
0
Fork 0
Code Issues 116 Pull requests Projects 2 Wiki Activity Actions

BOE Etching of SiO₂ #5

New issue
Open
opened 2025-05-22 19:53:18 +00:00 by rahix · 1 comment
rahix commented 2025-05-22 19:53:18 +00:00
Owner
Copy link

Etching process for SiO₂ using buffered oxide etch (BOE).

Hackerfab documents using a 6:1 BOE for their process.

Etching process for SiO₂ using [buffered oxide etch (BOE)](https://en.wikipedia.org/wiki/Buffered_oxide_etch). Hackerfab documents using a 6:1 BOE for their process.
rahix added the
Type
Process
 label 2025-05-22 19:53:18 +00:00
rahix added a new dependency 2025-05-22 19:53:27 +00:00
#4 Wet Lab (Chemistry)
forgejo-actions commented 2025-05-22 19:53:50 +00:00
Copy link

Partial Techtree

flowchart BT

    classDef eoi fill:#fff, stroke:#000, color:#000;
    classDef dependant fill:#fff, stroke:#888, color:#888;
    classDef ultimate fill:#fff, stroke:#000, color:#000;
    classDef dep_missing fill:#fcc, stroke:#800, color:#000;
    classDef dep_assigned fill:#ffa, stroke:#a50, color:#000;
    classDef dep_completed fill:#afa, stroke:#080, color:#000;
    0:::eoi
    0["<a href='https://git.fa-fo.de/fafo/techtree/issues/5' target='_blank'>#5</a> | MISSING<br/><i>Process</i><br/><b>BOE Etching of SiO₂</b>"]
    1:::dep_assigned
    1["<a href='https://git.fa-fo.de/fafo/techtree/issues/4' target='_blank'>#4</a> | ASSIGNED<br/><i>Equipment</i><br/><b>Wet Lab (Chemistry)</b>"]
    2:::dep_assigned
    2["<a href='https://git.fa-fo.de/fafo/techtree/issues/118' target='_blank'>#118</a> | ASSIGNED<br/><i>Development</i><br/><b>Hazard Assessment</b>"]
    3:::dep_completed
    3["<a href='https://git.fa-fo.de/fafo/techtree/issues/68' target='_blank'>#68</a> | COMPLETED<br/><i>Equipment</i><br/><b>Heating Stirrer</b>"]
    4:::dep_assigned
    4["<a href='https://git.fa-fo.de/fafo/techtree/issues/67' target='_blank'>#67</a> | ASSIGNED<br/><i>Equipment</i><br/><b>Chemical Storage/Containment</b>"]
    5:::dep_assigned
    5["<a href='https://git.fa-fo.de/fafo/techtree/issues/27' target='_blank'>#27</a> | ASSIGNED<br/><i>Equipment</i><br/><b>Technical Ventilation</b>"]
    6:::dep_assigned
    6["<a href='https://git.fa-fo.de/fafo/techtree/issues/23' target='_blank'>#23</a> | ASSIGNED<br/><i>Equipment</i><br/><b>Fume Hood</b>"]
    7:::dependant
    7["<a href='https://git.fa-fo.de/fafo/techtree/issues/2' target='_blank'>#2</a> | MISSING<br/><i>Process</i><br/><b>Chip Delayering</b>"]
    8:::dependant
    8["<a href='https://git.fa-fo.de/fafo/techtree/issues/53' target='_blank'>#53</a> | MISSING<br/><i>Process</i><br/><b>Pattern SiO₂</b>"]
    4 --> 5
    4 --> 2
    5 --> 2
    6 --> 5
    0 --> 1
    1 --> 6
    1 --> 5
    1 --> 4
    1 --> 3
    1 --> 2
    7 --> 0
    8 --> 0

Digest: eeba5477316e8edc5c425fb73e1c4f9577bb871a907a05aae9dab87ad8fcd846; Last Updated: 2026-01-25 23:22:54

## Partial Techtree ```mermaid flowchart BT classDef eoi fill:#fff, stroke:#000, color:#000; classDef dependant fill:#fff, stroke:#888, color:#888; classDef ultimate fill:#fff, stroke:#000, color:#000; classDef dep_missing fill:#fcc, stroke:#800, color:#000; classDef dep_assigned fill:#ffa, stroke:#a50, color:#000; classDef dep_completed fill:#afa, stroke:#080, color:#000; 0:::eoi 0["<a href='https://git.fa-fo.de/fafo/techtree/issues/5' target='_blank'>#5</a> | MISSING<br/><i>Process</i><br/><b>BOE Etching of SiO₂</b>"] 1:::dep_assigned 1["<a href='https://git.fa-fo.de/fafo/techtree/issues/4' target='_blank'>#4</a> | ASSIGNED<br/><i>Equipment</i><br/><b>Wet Lab (Chemistry)</b>"] 2:::dep_assigned 2["<a href='https://git.fa-fo.de/fafo/techtree/issues/118' target='_blank'>#118</a> | ASSIGNED<br/><i>Development</i><br/><b>Hazard Assessment</b>"] 3:::dep_completed 3["<a href='https://git.fa-fo.de/fafo/techtree/issues/68' target='_blank'>#68</a> | COMPLETED<br/><i>Equipment</i><br/><b>Heating Stirrer</b>"] 4:::dep_assigned 4["<a href='https://git.fa-fo.de/fafo/techtree/issues/67' target='_blank'>#67</a> | ASSIGNED<br/><i>Equipment</i><br/><b>Chemical Storage/Containment</b>"] 5:::dep_assigned 5["<a href='https://git.fa-fo.de/fafo/techtree/issues/27' target='_blank'>#27</a> | ASSIGNED<br/><i>Equipment</i><br/><b>Technical Ventilation</b>"] 6:::dep_assigned 6["<a href='https://git.fa-fo.de/fafo/techtree/issues/23' target='_blank'>#23</a> | ASSIGNED<br/><i>Equipment</i><br/><b>Fume Hood</b>"] 7:::dependant 7["<a href='https://git.fa-fo.de/fafo/techtree/issues/2' target='_blank'>#2</a> | MISSING<br/><i>Process</i><br/><b>Chip Delayering</b>"] 8:::dependant 8["<a href='https://git.fa-fo.de/fafo/techtree/issues/53' target='_blank'>#53</a> | MISSING<br/><i>Process</i><br/><b>Pattern SiO₂</b>"] 4 --> 5 4 --> 2 5 --> 2 6 --> 5 0 --> 1 1 --> 6 1 --> 5 1 --> 4 1 --> 3 1 --> 2 7 --> 0 8 --> 0 ``` <small>Digest: eeba5477316e8edc5c425fb73e1c4f9577bb871a907a05aae9dab87ad8fcd846; Last Updated: 2026-01-25 23:22:54</small>
rahix added the
Needs Documentation
 label 2025-05-22 20:09:36 +00:00
rahix added a new dependency 2025-05-22 20:17:19 +00:00
#2 Chip Delayering
q3k added a new dependency 2025-05-24 10:23:04 +00:00
#53 Pattern SiO₂
rahix changed title from HNO₃/HF Etching to BOE Etching 2025-07-28 13:07:04 +00:00
rahix changed title from BOE Etching to BOE Etching of SiO₂ 2025-11-02 10:02:12 +00:00
rahix added this to the Wet-Lab Working Group project 2025-11-09 01:15:06 +00:00
Sign in to join this conversation.
No Branch/Tag specified
Branches Tags
main
render
No results found.
Labels
Clear labels   
Completed

This element has been completed but we do not want to close the issue yet!

  
Needs Documentation

Please add more documentation to this tech tree element!

  
Stale

This issue is stale and needs reintegration into the tech tree.

  
Type
Development
A device, software, or other thing we need to develop.

  
Type
Equipment
A piece of machinery that we need to acquire or get running.

  
Type
Process
A process we need to achieve.

  
Type
Research
A topic that we can or must research to unlock future capabilities.

  
Ultimate Goal

This is an ultimate goal of FAFO e.V.

No labels
Completed
Needs Documentation
Stale
Type
Development
Type
Equipment
Type
Process
Type
Research
Ultimate Goal
Milestone
Clear milestone
No items
No milestone
Projects
Clear projects
No items
No project
Wet-Lab Working Group
Assignees
Clear assignees
No assignees
2 participants
Notifications
Due date
The due date is invalid or out of range. Please use the format "yyyy-mm-dd".

No due date set.

Blocks
#2 Chip Delayering
fafo/techtree
#53 Pattern SiO₂
fafo/techtree
Depends on
#4 Wet Lab (Chemistry)
fafo/techtree
Reference: fafo/techtree#5
No description provided.
Delete branch "%!s()"

Deleting a branch is permanent. Although the deleted branch may continue to exist for a short time before it actually gets removed, it CANNOT be undone in most cases. Continue?