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BOE Etching #5

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opened 2025-05-22 19:53:18 +00:00 by rahix · 1 comment
rahix commented 2025-05-22 19:53:18 +00:00
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Etching process for SiO₂ using buffered oxide etch (BOE).

Hackerfab documents using a 6:1 BOE for their process.

Etching process for SiO₂ using [buffered oxide etch (BOE)](https://en.wikipedia.org/wiki/Buffered_oxide_etch). Hackerfab documents using a 6:1 BOE for their process.
rahix added the
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Process
 label 2025-05-22 19:53:18 +00:00
rahix added a new dependency 2025-05-22 19:53:27 +00:00
#4 Wet Lab (Chemistry)
forgejo-actions commented 2025-05-22 19:53:50 +00:00
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Partial Techtree

flowchart BT

    classDef eoi fill:#fff, stroke:#000, color:#000;
    classDef dependant fill:#fff, stroke:#888, color:#888;
    classDef dep_missing fill:#fcc, stroke:#800, color:#000;
    classDef dep_assigned fill:#ffa, stroke:#a50, color:#000;
    classDef dep_completed fill:#afa, stroke:#080, color:#000;
    0:::eoi
    0["<a href='https://git.fa-fo.de/fafo/techtree/issues/5' target='_blank'>#5</a> | MISSING\n<i>Process</i>\n<b>BOE Etching</b>"]
    1:::dep_assigned
    1["<a href='https://git.fa-fo.de/fafo/techtree/issues/4' target='_blank'>#4</a> | ASSIGNED\n<i>Equipment</i>\n<b>Wet Lab (Chemistry)</b>"]
    2:::dep_assigned
    2["<a href='https://git.fa-fo.de/fafo/techtree/issues/68' target='_blank'>#68</a> | ASSIGNED\n<i>Equipment</i>\n<b>Heating Stirrer</b>"]
    3:::dep_missing
    3["<a href='https://git.fa-fo.de/fafo/techtree/issues/67' target='_blank'>#67</a> | MISSING\n<i>Equipment</i>\n<b>Chemical Storage/Containment</b>"]
    4:::dep_assigned
    4["<a href='https://git.fa-fo.de/fafo/techtree/issues/27' target='_blank'>#27</a> | ASSIGNED\n<i>Equipment</i>\n<b>Technical Ventilation</b>"]
    5:::dep_missing
    5["<a href='https://git.fa-fo.de/fafo/techtree/issues/23' target='_blank'>#23</a> | MISSING\n<i>Equipment</i>\n<b>Fume Hood</b>"]
    6:::dep_missing
    6["<a href='https://git.fa-fo.de/fafo/techtree/issues/22' target='_blank'>#22</a> | MISSING\n<i>Equipment</i>\n<b>Running Water and Sink</b>"]
    7:::dependant
    7["<a href='https://git.fa-fo.de/fafo/techtree/issues/2' target='_blank'>#2</a> | MISSING\n<i>Process</i>\n<b>Chip Delayering</b>"]
    8:::dependant
    8["<a href='https://git.fa-fo.de/fafo/techtree/issues/53' target='_blank'>#53</a> | MISSING\n<i>Process</i>\n<b>Pattern SiO₂</b>"]
    3 --> 4
    5 --> 4
    0 --> 1
    1 --> 6
    1 --> 5
    1 --> 4
    1 --> 3
    1 --> 2
    7 --> 0
    8 --> 0

Digest: 1067d89321ea8ad88b82585488748a71f924d484bcfead018f6bb60dad69f310; Last Updated: 2025-07-28 13:07:22

## Partial Techtree ```mermaid flowchart BT classDef eoi fill:#fff, stroke:#000, color:#000; classDef dependant fill:#fff, stroke:#888, color:#888; classDef dep_missing fill:#fcc, stroke:#800, color:#000; classDef dep_assigned fill:#ffa, stroke:#a50, color:#000; classDef dep_completed fill:#afa, stroke:#080, color:#000; 0:::eoi 0["<a href='https://git.fa-fo.de/fafo/techtree/issues/5' target='_blank'>#5</a> | MISSING\n<i>Process</i>\n<b>BOE Etching</b>"] 1:::dep_assigned 1["<a href='https://git.fa-fo.de/fafo/techtree/issues/4' target='_blank'>#4</a> | ASSIGNED\n<i>Equipment</i>\n<b>Wet Lab (Chemistry)</b>"] 2:::dep_assigned 2["<a href='https://git.fa-fo.de/fafo/techtree/issues/68' target='_blank'>#68</a> | ASSIGNED\n<i>Equipment</i>\n<b>Heating Stirrer</b>"] 3:::dep_missing 3["<a href='https://git.fa-fo.de/fafo/techtree/issues/67' target='_blank'>#67</a> | MISSING\n<i>Equipment</i>\n<b>Chemical Storage/Containment</b>"] 4:::dep_assigned 4["<a href='https://git.fa-fo.de/fafo/techtree/issues/27' target='_blank'>#27</a> | ASSIGNED\n<i>Equipment</i>\n<b>Technical Ventilation</b>"] 5:::dep_missing 5["<a href='https://git.fa-fo.de/fafo/techtree/issues/23' target='_blank'>#23</a> | MISSING\n<i>Equipment</i>\n<b>Fume Hood</b>"] 6:::dep_missing 6["<a href='https://git.fa-fo.de/fafo/techtree/issues/22' target='_blank'>#22</a> | MISSING\n<i>Equipment</i>\n<b>Running Water and Sink</b>"] 7:::dependant 7["<a href='https://git.fa-fo.de/fafo/techtree/issues/2' target='_blank'>#2</a> | MISSING\n<i>Process</i>\n<b>Chip Delayering</b>"] 8:::dependant 8["<a href='https://git.fa-fo.de/fafo/techtree/issues/53' target='_blank'>#53</a> | MISSING\n<i>Process</i>\n<b>Pattern SiO₂</b>"] 3 --> 4 5 --> 4 0 --> 1 1 --> 6 1 --> 5 1 --> 4 1 --> 3 1 --> 2 7 --> 0 8 --> 0 ``` <small>Digest: 1067d89321ea8ad88b82585488748a71f924d484bcfead018f6bb60dad69f310; Last Updated: 2025-07-28 13:07:22</small>
rahix added the
Needs Documentation
 label 2025-05-22 20:09:36 +00:00
rahix added a new dependency 2025-05-22 20:17:19 +00:00
#2 Chip Delayering
q3k added a new dependency 2025-05-24 10:23:04 +00:00
#53 Pattern SiO₂
rahix changed title from HNO₃/HF Etching to BOE Etching 2025-07-28 13:07:04 +00:00
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#2 Chip Delayering
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#53 Pattern SiO₂
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#4 Wet Lab (Chemistry)
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Reference: fafo/techtree#5
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