Zeloof Z1 process #61

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opened 2025-05-24 10:47:08 +00:00 by q3k · 1 comment

q3k commented

2025-05-24 10:47:08 +00:00

Owner

PMOS@175um. Starts with bare or passivated wafer.

Write-up on Sam's blog about the Z1 process: archive.org

PMOS@175um. Starts with bare or passivated wafer. ![First IC from Sam Zeloof](https://web.archive.org/web/20250424064616im_/http://sam.zeloof.xyz/wp-content/uploads/2018/04/DSC_8683-768x509.jpg) Write-up on Sam's blog about the Z1 process: [archive.org](https://web.archive.org/web/20250424064616/http://sam.zeloof.xyz/first-ic/)

q3k added the

Type

Process

label 2025-05-24 10:47:08 +00:00

q3k added a new dependency 2025-05-24 10:47:14 +00:00

#58 Pattern Al

forgejo-actions commented

2025-05-24 10:47:15 +00:00

Partial Techtree

flowchart BT

    classDef eoi fill:#fff, stroke:#000, color:#000;
    classDef dependant fill:#fff, stroke:#888, color:#888;
    classDef dep_missing fill:#fcc, stroke:#800, color:#000;
    classDef dep_assigned fill:#ffa, stroke:#a50, color:#000;
    classDef dep_completed fill:#afa, stroke:#080, color:#000;
    0:::eoi
    0["#61 | MISSING\n<i>Process</i>\n<b>Zeloof Z1 process</b>"]
    1:::dep_missing
    1["#60 | MISSING\n<i>Process</i>\n<b>Thermal diffusion doping</b>"]
    2:::dep_missing
    2["#55 | MISSING\n<i>Equipment</i>\n<b>Tube Furnace</b>"]
    3:::dep_assigned
    3["#49 | ASSIGNED\n<i>Development</i>\n<b>Spin Coater</b>"]
    4:::dep_missing
    4["#58 | MISSING\n<i>Process</i>\n<b>Pattern Al</b>"]
    5:::dep_missing
    5["#71 | MISSING\n<i>Research</i>\n<b>STM Metal Pattern Deposition</b>"]
    6:::dep_assigned
    6["#43 | ASSIGNED\n<i>Development</i>\n<b>Scanning Tunneling Microscope (STM)</b>"]
    7:::dep_completed
    7["#42 | COMPLETED\n<i>Development</i>\n<b>STM Vibration Isolation</b>"]
    8:::dep_missing
    8["#62 | MISSING\n<i>Process</i>\n<b>Lithography</b>"]
    9:::dep_missing
    9["#70 | MISSING\n<i>Research</i>\n<b>STM Lithography</b>"]
    10:::dep_missing
    10["#51 | MISSING\n<i>Process</i>\n<b>Maskless Photolithography</b>"]
    11:::dep_missing
    11["#52 | MISSING\n<i>Development</i>\n<b>Maskless photolithography stepper</b>"]
    12:::dep_missing
    12["#50 | MISSING\n<i>Process</i>\n<b>E-beam Lithography</b>"]
    13:::dep_missing
    13["#35 | MISSING\n<i>Equipment</i>\n<b>SEM Beam Blanker</b>"]
    14:::dep_completed
    14["#28 | COMPLETED\n<i>Equipment</i>\n<b>Scanning Electron Microscope (SEM)</b>"]
    15:::dep_completed
    15["#26 | COMPLETED\n<i>Equipment</i>\n<b>Water Cooling</b>"]
    16:::dep_missing
    16["#59 | MISSING\n<i>Process</i>\n<b>H₃PO₄/HNO₃/AcOH Etching</b>"]
    17:::dep_assigned
    17["#4 | ASSIGNED\n<i>Equipment</i>\n<b>Wet Lab (Chemistry)</b>"]
    18:::dep_assigned
    18["#68 | ASSIGNED\n<i>Equipment</i>\n<b>Heating Stirrer</b>"]
    19:::dep_missing
    19["#67 | MISSING\n<i>Equipment</i>\n<b>Chemical Storage/Containment</b>"]
    20:::dep_assigned
    20["#27 | ASSIGNED\n<i>Equipment</i>\n<b>Technical Ventilation</b>"]
    21:::dep_missing
    21["#23 | MISSING\n<i>Equipment</i>\n<b>Fume Hood</b>"]
    22:::dep_missing
    22["#22 | MISSING\n<i>Equipment</i>\n<b>Running Water and Sink</b>"]
    23:::dep_missing
    23["#57 | MISSING\n<i>Process</i>\n<b>Metal thin film deposition</b>"]
    24:::dep_missing
    24["#56 | MISSING\n<i>Process</i>\n<b>PVD: Thermal Evaporation</b>"]
    25:::dep_missing
    25["#37 | MISSING\n<i>Process</i>\n<b>PVD: Sputtering</b>"]
    26:::dep_missing
    26["#79 | MISSING\n<i>Equipment</i>\n<b>Sputter Coater</b>"]
    27:::dep_missing
    27["#53 | MISSING\n<i>Process</i>\n<b>Pattern SiO₂</b>"]
    28:::dep_missing
    28["#54 | MISSING\n<i>Process</i>\n<b>Si Thermal Oxidation</b>"]
    29:::dep_missing
    29["#21 | MISSING\n<i>Process</i>\n<b>Reactive Ion Etching</b>"]
    30:::dep_missing
    30["#25 | MISSING\n<i>Equipment</i>\n<b>Plasma Etcher</b>"]
    31:::dep_assigned
    31["#24 | ASSIGNED\n<i>Equipment</i>\n<b>~3ph Power (below 10kW)</b>"]
    32:::dep_missing
    32["#5 | MISSING\n<i>Process</i>\n<b>BOE Etching</b>"]
    33:::dep_missing
    33["#15 | MISSING\n<i>Process</i>\n<b>Microprobing</b>"]
    34:::dep_assigned
    34["#9 | ASSIGNED\n<i>Development</i>\n<b>Optical Microscope: Motorized Stage</b>"]
    35:::dep_assigned
    35["#63 | ASSIGNED\n<i>Equipment</i>\n<b>OpenFlexure Delta Stage</b>"]
    36:::dep_completed
    36["#64 | COMPLETED\n<i>Equipment</i>\n<b>FFF 3D-Printer</b>"]
    37:::dep_assigned
    37["#14 | ASSIGNED\n<i>Equipment</i>\n<b>Optical Microscope</b>"]
    5 --> 6
    9 --> 6
    9 --> 3
    19 --> 20
    35 --> 36
    8 --> 12
    8 --> 10
    8 --> 9
    0 --> 33
    0 --> 27
    0 --> 4
    0 --> 1
    1 --> 3
    1 --> 2
    16 --> 17
    4 --> 23
    4 --> 16
    4 --> 8
    4 --> 5
    23 --> 25
    23 --> 24
    28 --> 2
    27 --> 32
    27 --> 29
    27 --> 28
    27 --> 8
    10 --> 3
    10 --> 11
    12 --> 13
    12 --> 3
    6 --> 7
    25 --> 26
    13 --> 14
    14 --> 15
    30 --> 31
    30 --> 20
    21 --> 20
    29 --> 30
    33 --> 34
    34 --> 37
    34 --> 35
    32 --> 17
    17 --> 22
    17 --> 21
    17 --> 20
    17 --> 19
    17 --> 18

Digest: 731aeeb9439b57b79ed2a6e637c9b9809b22a1f1e6cb2b6e50b99ae18ae699b4; Last Updated: 2025-08-10 13:10:54

## Partial Techtree ```mermaid flowchart BT classDef eoi fill:#fff, stroke:#000, color:#000; classDef dependant fill:#fff, stroke:#888, color:#888; classDef dep_missing fill:#fcc, stroke:#800, color:#000; classDef dep_assigned fill:#ffa, stroke:#a50, color:#000; classDef dep_completed fill:#afa, stroke:#080, color:#000; 0:::eoi 0["#61 | MISSING\nProcess\nZeloof Z1 process"] 1:::dep_missing 1["#60 | MISSING\nProcess\nThermal diffusion doping"] 2:::dep_missing 2["#55 | MISSING\nEquipment\nTube Furnace"] 3:::dep_assigned 3["#49 | ASSIGNED\nDevelopment\nSpin Coater"] 4:::dep_missing 4["#58 | MISSING\nProcess\nPattern Al"] 5:::dep_missing 5["#71 | MISSING\nResearch\nSTM Metal Pattern Deposition"] 6:::dep_assigned 6["#43 | ASSIGNED\nDevelopment\nScanning Tunneling Microscope (STM)"] 7:::dep_completed 7["#42 | COMPLETED\nDevelopment\nSTM Vibration Isolation"] 8:::dep_missing 8["#62 | MISSING\nProcess\nLithography"] 9:::dep_missing 9["#70 | MISSING\nResearch\nSTM Lithography"] 10:::dep_missing 10["#51 | MISSING\nProcess\nMaskless Photolithography"] 11:::dep_missing 11["#52 | MISSING\nDevelopment\nMaskless photolithography stepper"] 12:::dep_missing 12["#50 | MISSING\nProcess\nE-beam Lithography"] 13:::dep_missing 13["#35 | MISSING\nEquipment\nSEM Beam Blanker"] 14:::dep_completed 14["#28 | COMPLETED\nEquipment\nScanning Electron Microscope (SEM)"] 15:::dep_completed 15["#26 | COMPLETED\nEquipment\nWater Cooling"] 16:::dep_missing 16["#59 | MISSING\nProcess\nH₃PO₄/HNO₃/AcOH Etching"] 17:::dep_assigned 17["#4 | ASSIGNED\nEquipment\nWet Lab (Chemistry)"] 18:::dep_assigned 18["#68 | ASSIGNED\nEquipment\nHeating Stirrer"] 19:::dep_missing 19["#67 | MISSING\nEquipment\nChemical Storage/Containment"] 20:::dep_assigned 20["#27 | ASSIGNED\nEquipment\nTechnical Ventilation"] 21:::dep_missing 21["#23 | MISSING\nEquipment\nFume Hood"] 22:::dep_missing 22["#22 | MISSING\nEquipment\nRunning Water and Sink"] 23:::dep_missing 23["#57 | MISSING\nProcess\nMetal thin film deposition"] 24:::dep_missing 24["#56 | MISSING\nProcess\nPVD: Thermal Evaporation"] 25:::dep_missing 25["#37 | MISSING\nProcess\nPVD: Sputtering"] 26:::dep_missing 26["#79 | MISSING\nEquipment\nSputter Coater"] 27:::dep_missing 27["#53 | MISSING\nProcess\nPattern SiO₂"] 28:::dep_missing 28["#54 | MISSING\nProcess\nSi Thermal Oxidation"] 29:::dep_missing 29["#21 | MISSING\nProcess\nReactive Ion Etching"] 30:::dep_missing 30["#25 | MISSING\nEquipment\nPlasma Etcher"] 31:::dep_assigned 31["#24 | ASSIGNED\nEquipment\n~3ph Power (below 10kW)"] 32:::dep_missing 32["#5 | MISSING\nProcess\nBOE Etching"] 33:::dep_missing 33["#15 | MISSING\nProcess\nMicroprobing"] 34:::dep_assigned 34["#9 | ASSIGNED\nDevelopment\nOptical Microscope: Motorized Stage"] 35:::dep_assigned 35["#63 | ASSIGNED\nEquipment\nOpenFlexure Delta Stage"] 36:::dep_completed 36["#64 | COMPLETED\nEquipment\nFFF 3D-Printer"] 37:::dep_assigned 37["#14 | ASSIGNED\nEquipment\nOptical Microscope"] 5 --> 6 9 --> 6 9 --> 3 19 --> 20 35 --> 36 8 --> 12 8 --> 10 8 --> 9 0 --> 33 0 --> 27 0 --> 4 0 --> 1 1 --> 3 1 --> 2 16 --> 17 4 --> 23 4 --> 16 4 --> 8 4 --> 5 23 --> 25 23 --> 24 28 --> 2 27 --> 32 27 --> 29 27 --> 28 27 --> 8 10 --> 3 10 --> 11 12 --> 13 12 --> 3 6 --> 7 25 --> 26 13 --> 14 14 --> 15 30 --> 31 30 --> 20 21 --> 20 29 --> 30 33 --> 34 34 --> 37 34 --> 35 32 --> 17 17 --> 22 17 --> 21 17 --> 20 17 --> 19 17 --> 18 ``` Digest: 731aeeb9439b57b79ed2a6e637c9b9809b22a1f1e6cb2b6e50b99ae18ae699b4; Last Updated: 2025-08-10 13:10:54

q3k added a new dependency 2025-05-24 10:47:21 +00:00

#53 Pattern SiO₂

q3k added a new dependency 2025-05-24 10:47:30 +00:00

#60 Thermal diffusion doping

q3k added a new dependency 2025-05-24 10:47:44 +00:00

#15 Microprobing