Zeloof Z1 process #61

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opened 2025-05-24 10:47:08 +00:00 by q3k · 1 comment

q3k commented

2025-05-24 10:47:08 +00:00

Owner

PMOS@175um. Starts with bare or passivated wafer.

Write-up on Sam's blog about the Z1 process: archive.org

PMOS@175um. Starts with bare or passivated wafer. ![First IC from Sam Zeloof](https://web.archive.org/web/20250424064616im_/http://sam.zeloof.xyz/wp-content/uploads/2018/04/DSC_8683-768x509.jpg) Write-up on Sam's blog about the Z1 process: [archive.org](https://web.archive.org/web/20250424064616/http://sam.zeloof.xyz/first-ic/)

q3k added the

Type

Process

label 2025-05-24 10:47:08 +00:00

q3k added a new dependency 2025-05-24 10:47:14 +00:00

#58 Pattern Al

forgejo-actions commented

2025-05-24 10:47:15 +00:00

Partial Techtree

flowchart BT

    classDef eoi fill:#fff, stroke:#000, color:#000;
    classDef dependant fill:#fff, stroke:#888, color:#888;
    classDef dep_missing fill:#fcc, stroke:#800, color:#000;
    classDef dep_assigned fill:#ffa, stroke:#a50, color:#000;
    classDef dep_completed fill:#afa, stroke:#080, color:#000;
    0:::eoi
    0["#61 | MISSING\n<i>Process</i>\n<b>Zeloof Z1 process</b>"]
    1:::dep_missing
    1["#60 | MISSING\n<i>Process</i>\n<b>Thermal diffusion doping</b>"]
    2:::dep_missing
    2["#55 | MISSING\n<i>Equipment</i>\n<b>Tube Furnace</b>"]
    3:::dep_assigned
    3["#4 | ASSIGNED\n<i>Equipment</i>\n<b>Wet Lab (Chemistry)</b>"]
    4:::dep_assigned
    4["#68 | ASSIGNED\n<i>Equipment</i>\n<b>Heating Stirrer</b>"]
    5:::dep_missing
    5["#67 | MISSING\n<i>Equipment</i>\n<b>Chemical Storage/Containment</b>"]
    6:::dep_assigned
    6["#27 | ASSIGNED\n<i>Equipment</i>\n<b>Technical Ventilation</b>"]
    7:::dep_missing
    7["#23 | MISSING\n<i>Equipment</i>\n<b>Fume Hood</b>"]
    8:::dep_missing
    8["#22 | MISSING\n<i>Equipment</i>\n<b>Running Water and Sink</b>"]
    9:::dep_missing
    9["#58 | MISSING\n<i>Process</i>\n<b>Pattern Al</b>"]
    10:::dep_missing
    10["#71 | MISSING\n<i>Research</i>\n<b>STM Metal Pattern Deposition</b>"]
    11:::dep_assigned
    11["#43 | ASSIGNED\n<i>Development</i>\n<b>Scanning Tunneling Microscope (STM)</b>"]
    12:::dep_completed
    12["#42 | COMPLETED\n<i>Development</i>\n<b>STM Vibration Isolation</b>"]
    13:::dep_missing
    13["#62 | MISSING\n<i>Process</i>\n<b>Lithography</b>"]
    14:::dep_missing
    14["#70 | MISSING\n<i>Research</i>\n<b>STM Lithography</b>"]
    15:::dep_missing
    15["#49 | MISSING\n<i>Development</i>\n<b>Spin Coater</b>"]
    16:::dep_missing
    16["#51 | MISSING\n<i>Process</i>\n<b>Maskless Photolithography</b>"]
    17:::dep_missing
    17["#52 | MISSING\n<i>Development</i>\n<b>Maskless photolithography stepper</b>"]
    18:::dep_missing
    18["#50 | MISSING\n<i>Process</i>\n<b>E-beam Lithography</b>"]
    19:::dep_missing
    19["#35 | MISSING\n<i>Equipment</i>\n<b>SEM Beam Blanker</b>"]
    20:::dep_completed
    20["#28 | COMPLETED\n<i>Equipment</i>\n<b>Scanning Electron Microscope (SEM)</b>"]
    21:::dep_completed
    21["#26 | COMPLETED\n<i>Equipment</i>\n<b>Water Cooling</b>"]
    22:::dep_missing
    22["#59 | MISSING\n<i>Process</i>\n<b>H₃PO₄/HNO₃/AcOH Etching</b>"]
    23:::dep_missing
    23["#57 | MISSING\n<i>Process</i>\n<b>Metal thin film deposition</b>"]
    24:::dep_missing
    24["#56 | MISSING\n<i>Process</i>\n<b>PVD: Thermal Evaporation</b>"]
    25:::dep_missing
    25["#37 | MISSING\n<i>Process</i>\n<b>PVD: Sputtering</b>"]
    26:::dep_missing
    26["#53 | MISSING\n<i>Process</i>\n<b>Pattern SiO₂</b>"]
    27:::dep_missing
    27["#54 | MISSING\n<i>Process</i>\n<b>Si Thermal Oxidation</b>"]
    28:::dep_missing
    28["#21 | MISSING\n<i>Process</i>\n<b>Reactive Ion Etching</b>"]
    29:::dep_missing
    29["#25 | MISSING\n<i>Equipment</i>\n<b>Plasma Etcher</b>"]
    30:::dep_assigned
    30["#24 | ASSIGNED\n<i>Equipment</i>\n<b>~3ph Power (below 10kW)</b>"]
    31:::dep_missing
    31["#5 | MISSING\n<i>Process</i>\n<b>HNO₃/HF Etching</b>"]
    32:::dep_missing
    32["#15 | MISSING\n<i>Process</i>\n<b>Microprobing</b>"]
    33:::dep_missing
    33["#9 | MISSING\n<i>Equipment</i>\n<b>Optical Microscope: Motorized Stage</b>"]
    34:::dep_missing
    34["#63 | MISSING\n<i>Equipment</i>\n<b>OpenFlexure Delta Stage</b>"]
    35:::dep_completed
    35["#64 | COMPLETED\n<i>Equipment</i>\n<b>FFF 3D-Printer</b>"]
    36:::dep_missing
    36["#14 | MISSING\n<i>Equipment</i>\n<b>Optical Microscope</b>"]
    10 --> 11
    14 --> 11
    14 --> 15
    5 --> 6
    34 --> 35
    13 --> 18
    13 --> 16
    13 --> 14
    0 --> 32
    0 --> 26
    0 --> 9
    0 --> 1
    1 --> 3
    1 --> 2
    22 --> 3
    9 --> 23
    9 --> 22
    9 --> 13
    9 --> 10
    23 --> 25
    23 --> 24
    27 --> 2
    26 --> 31
    26 --> 28
    26 --> 27
    26 --> 13
    16 --> 15
    16 --> 17
    18 --> 19
    18 --> 15
    11 --> 12
    19 --> 20
    20 --> 21
    29 --> 30
    29 --> 6
    7 --> 6
    28 --> 29
    32 --> 33
    33 --> 36
    33 --> 34
    31 --> 3
    3 --> 8
    3 --> 7
    3 --> 6
    3 --> 5
    3 --> 4

Digest: e27c1e7cd92a8153ebada7f11ddc3e2102c3a22b8fcbc1144f9cd9f8a5492a26; Last Updated: 2025-06-15 21:48:34

## Partial Techtree ```mermaid flowchart BT classDef eoi fill:#fff, stroke:#000, color:#000; classDef dependant fill:#fff, stroke:#888, color:#888; classDef dep_missing fill:#fcc, stroke:#800, color:#000; classDef dep_assigned fill:#ffa, stroke:#a50, color:#000; classDef dep_completed fill:#afa, stroke:#080, color:#000; 0:::eoi 0["#61 | MISSING\nProcess\nZeloof Z1 process"] 1:::dep_missing 1["#60 | MISSING\nProcess\nThermal diffusion doping"] 2:::dep_missing 2["#55 | MISSING\nEquipment\nTube Furnace"] 3:::dep_assigned 3["#4 | ASSIGNED\nEquipment\nWet Lab (Chemistry)"] 4:::dep_assigned 4["#68 | ASSIGNED\nEquipment\nHeating Stirrer"] 5:::dep_missing 5["#67 | MISSING\nEquipment\nChemical Storage/Containment"] 6:::dep_assigned 6["#27 | ASSIGNED\nEquipment\nTechnical Ventilation"] 7:::dep_missing 7["#23 | MISSING\nEquipment\nFume Hood"] 8:::dep_missing 8["#22 | MISSING\nEquipment\nRunning Water and Sink"] 9:::dep_missing 9["#58 | MISSING\nProcess\nPattern Al"] 10:::dep_missing 10["#71 | MISSING\nResearch\nSTM Metal Pattern Deposition"] 11:::dep_assigned 11["#43 | ASSIGNED\nDevelopment\nScanning Tunneling Microscope (STM)"] 12:::dep_completed 12["#42 | COMPLETED\nDevelopment\nSTM Vibration Isolation"] 13:::dep_missing 13["#62 | MISSING\nProcess\nLithography"] 14:::dep_missing 14["#70 | MISSING\nResearch\nSTM Lithography"] 15:::dep_missing 15["#49 | MISSING\nDevelopment\nSpin Coater"] 16:::dep_missing 16["#51 | MISSING\nProcess\nMaskless Photolithography"] 17:::dep_missing 17["#52 | MISSING\nDevelopment\nMaskless photolithography stepper"] 18:::dep_missing 18["#50 | MISSING\nProcess\nE-beam Lithography"] 19:::dep_missing 19["#35 | MISSING\nEquipment\nSEM Beam Blanker"] 20:::dep_completed 20["#28 | COMPLETED\nEquipment\nScanning Electron Microscope (SEM)"] 21:::dep_completed 21["#26 | COMPLETED\nEquipment\nWater Cooling"] 22:::dep_missing 22["#59 | MISSING\nProcess\nH₃PO₄/HNO₃/AcOH Etching"] 23:::dep_missing 23["#57 | MISSING\nProcess\nMetal thin film deposition"] 24:::dep_missing 24["#56 | MISSING\nProcess\nPVD: Thermal Evaporation"] 25:::dep_missing 25["#37 | MISSING\nProcess\nPVD: Sputtering"] 26:::dep_missing 26["#53 | MISSING\nProcess\nPattern SiO₂"] 27:::dep_missing 27["#54 | MISSING\nProcess\nSi Thermal Oxidation"] 28:::dep_missing 28["#21 | MISSING\nProcess\nReactive Ion Etching"] 29:::dep_missing 29["#25 | MISSING\nEquipment\nPlasma Etcher"] 30:::dep_assigned 30["#24 | ASSIGNED\nEquipment\n~3ph Power (below 10kW)"] 31:::dep_missing 31["#5 | MISSING\nProcess\nHNO₃/HF Etching"] 32:::dep_missing 32["#15 | MISSING\nProcess\nMicroprobing"] 33:::dep_missing 33["#9 | MISSING\nEquipment\nOptical Microscope: Motorized Stage"] 34:::dep_missing 34["#63 | MISSING\nEquipment\nOpenFlexure Delta Stage"] 35:::dep_completed 35["#64 | COMPLETED\nEquipment\nFFF 3D-Printer"] 36:::dep_missing 36["#14 | MISSING\nEquipment\nOptical Microscope"] 10 --> 11 14 --> 11 14 --> 15 5 --> 6 34 --> 35 13 --> 18 13 --> 16 13 --> 14 0 --> 32 0 --> 26 0 --> 9 0 --> 1 1 --> 3 1 --> 2 22 --> 3 9 --> 23 9 --> 22 9 --> 13 9 --> 10 23 --> 25 23 --> 24 27 --> 2 26 --> 31 26 --> 28 26 --> 27 26 --> 13 16 --> 15 16 --> 17 18 --> 19 18 --> 15 11 --> 12 19 --> 20 20 --> 21 29 --> 30 29 --> 6 7 --> 6 28 --> 29 32 --> 33 33 --> 36 33 --> 34 31 --> 3 3 --> 8 3 --> 7 3 --> 6 3 --> 5 3 --> 4 ``` Digest: e27c1e7cd92a8153ebada7f11ddc3e2102c3a22b8fcbc1144f9cd9f8a5492a26; Last Updated: 2025-06-15 21:48:34

q3k added a new dependency 2025-05-24 10:47:21 +00:00

#53 Pattern SiO₂

q3k added a new dependency 2025-05-24 10:47:30 +00:00

#60 Thermal diffusion doping

q3k added a new dependency 2025-05-24 10:47:44 +00:00

#15 Microprobing