Zeloof Z1 process #61
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#15 Microprobing
fafo/techtree
#53 Pattern SiO₂
fafo/techtree
#58 Pattern Al
fafo/techtree
#60 Thermal diffusion doping
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Reference: fafo/techtree#61
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PMOS@175um. Starts with bare or passivated wafer.
Write-up on Sam's blog about the Z1 process: archive.org
Partial Techtree
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