Zeloof Z1 process #61

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opened 2025-05-24 10:47:08 +00:00 by q3k · 1 comment
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PMOS@175um. Starts with bare or passivated wafer.

First IC from Sam Zeloof

Write-up on Sam's blog about the Z1 process: archive.org

PMOS@175um. Starts with bare or passivated wafer. ![First IC from Sam Zeloof](https://web.archive.org/web/20250424064616im_/http://sam.zeloof.xyz/wp-content/uploads/2018/04/DSC_8683-768x509.jpg) Write-up on Sam's blog about the Z1 process: [archive.org](https://web.archive.org/web/20250424064616/http://sam.zeloof.xyz/first-ic/)
q3k added the
Type
Process
label 2025-05-24 10:47:08 +00:00
q3k added a new dependency 2025-05-24 10:47:14 +00:00

Partial Techtree

flowchart BT

    classDef eoi fill:#fff, stroke:#000, color:#000;
    classDef dependant fill:#fff, stroke:#888, color:#888;
    classDef dep_missing fill:#fcc, stroke:#800, color:#000;
    classDef dep_assigned fill:#ffa, stroke:#a50, color:#000;
    classDef dep_completed fill:#afa, stroke:#080, color:#000;
    0:::eoi
    0["#61 | MISSING\n<i>Process</i>\n<b>Zeloof Z1 process</b>"]
    1:::dep_missing
    1["#60 | MISSING\n<i>Process</i>\n<b>Thermal diffusion doping</b>"]
    2:::dep_missing
    2["#55 | MISSING\n<i>Equipment</i>\n<b>Tube Furnace</b>"]
    3:::dep_assigned
    3["#4 | ASSIGNED\n<i>Equipment</i>\n<b>Wet Lab (Chemistry)</b>"]
    4:::dep_assigned
    4["#68 | ASSIGNED\n<i>Equipment</i>\n<b>Heating Stirrer</b>"]
    5:::dep_missing
    5["#67 | MISSING\n<i>Equipment</i>\n<b>Chemical Storage/Containment</b>"]
    6:::dep_assigned
    6["#27 | ASSIGNED\n<i>Equipment</i>\n<b>Technical Ventilation</b>"]
    7:::dep_missing
    7["#23 | MISSING\n<i>Equipment</i>\n<b>Fume Hood</b>"]
    8:::dep_missing
    8["#22 | MISSING\n<i>Equipment</i>\n<b>Running Water and Sink</b>"]
    9:::dep_missing
    9["#58 | MISSING\n<i>Process</i>\n<b>Pattern Al</b>"]
    10:::dep_missing
    10["#71 | MISSING\n<i>Research</i>\n<b>STM Metal Pattern Deposition</b>"]
    11:::dep_assigned
    11["#43 | ASSIGNED\n<i>Development</i>\n<b>Scanning Tunneling Microscope (STM)</b>"]
    12:::dep_assigned
    12["#42 | ASSIGNED\n<i>Development</i>\n<b>STM Vibration Isolation</b>"]
    13:::dep_missing
    13["#62 | MISSING\n<i>Process</i>\n<b>Lithography</b>"]
    14:::dep_missing
    14["#70 | MISSING\n<i>Research</i>\n<b>STM Lithography</b>"]
    15:::dep_missing
    15["#49 | MISSING\n<i>Development</i>\n<b>Spin Coater</b>"]
    16:::dep_missing
    16["#51 | MISSING\n<i>Process</i>\n<b>Maskless Photolithography</b>"]
    17:::dep_missing
    17["#52 | MISSING\n<i>Development</i>\n<b>Maskless photolithography stepper</b>"]
    18:::dep_missing
    18["#50 | MISSING\n<i>Process</i>\n<b>E-beam Lithography</b>"]
    19:::dep_missing
    19["#35 | MISSING\n<i>Equipment</i>\n<b>SEM Beam Blanker</b>"]
    20:::dep_completed
    20["#28 | COMPLETED\n<i>Equipment</i>\n<b>Scanning Electron Microscope (SEM)</b>"]
    21:::dep_completed
    21["#26 | COMPLETED\n<i>Equipment</i>\n<b>Water Cooling</b>"]
    22:::dep_missing
    22["#59 | MISSING\n<i>Process</i>\n<b>H₃PO₄/HNO₃/AcOH Etching</b>"]
    23:::dep_missing
    23["#57 | MISSING\n<i>Process</i>\n<b>Metal thin film deposition</b>"]
    24:::dep_missing
    24["#56 | MISSING\n<i>Process</i>\n<b>PVD: Thermal Evaporation</b>"]
    25:::dep_missing
    25["#37 | MISSING\n<i>Process</i>\n<b>PVD: Sputtering</b>"]
    26:::dep_missing
    26["#53 | MISSING\n<i>Process</i>\n<b>Pattern SiO₂</b>"]
    27:::dep_missing
    27["#54 | MISSING\n<i>Process</i>\n<b>Si Thermal Oxidation</b>"]
    28:::dep_missing
    28["#21 | MISSING\n<i>Process</i>\n<b>Reactive Ion Etching</b>"]
    29:::dep_missing
    29["#25 | MISSING\n<i>Equipment</i>\n<b>Plasma Etcher</b>"]
    30:::dep_assigned
    30["#24 | ASSIGNED\n<i>Equipment</i>\n<b>~3ph Power (below 10kW)</b>"]
    31:::dep_missing
    31["#5 | MISSING\n<i>Process</i>\n<b>HNO₃/HF Etching</b>"]
    32:::dep_missing
    32["#15 | MISSING\n<i>Process</i>\n<b>Microprobing</b>"]
    33:::dep_missing
    33["#9 | MISSING\n<i>Equipment</i>\n<b>Optical Microscope: Motorized Stage</b>"]
    34:::dep_missing
    34["#63 | MISSING\n<i>Equipment</i>\n<b>OpenFlexure Delta Stage</b>"]
    35:::dep_completed
    35["#64 | COMPLETED\n<i>Equipment</i>\n<b>FFF 3D-Printer</b>"]
    36:::dep_missing
    36["#14 | MISSING\n<i>Equipment</i>\n<b>Optical Microscope</b>"]
    10 --> 11
    14 --> 11
    14 --> 15
    5 --> 6
    34 --> 35
    13 --> 18
    13 --> 16
    13 --> 14
    0 --> 32
    0 --> 26
    0 --> 9
    0 --> 1
    1 --> 3
    1 --> 2
    22 --> 3
    9 --> 23
    9 --> 22
    9 --> 13
    9 --> 10
    23 --> 25
    23 --> 24
    27 --> 2
    26 --> 31
    26 --> 28
    26 --> 27
    26 --> 13
    16 --> 15
    16 --> 17
    18 --> 19
    18 --> 15
    11 --> 12
    19 --> 20
    20 --> 21
    29 --> 30
    29 --> 6
    7 --> 6
    28 --> 29
    32 --> 33
    33 --> 36
    33 --> 34
    31 --> 3
    3 --> 8
    3 --> 7
    3 --> 6
    3 --> 5
    3 --> 4

Digest: 7bb46df9a91d11f0c5f4bc6775d1069c9de5a14bf92269b951670f6a61a55550; Last Updated: 2025-06-02 13:46:36

## Partial Techtree ```mermaid flowchart BT classDef eoi fill:#fff, stroke:#000, color:#000; classDef dependant fill:#fff, stroke:#888, color:#888; classDef dep_missing fill:#fcc, stroke:#800, color:#000; classDef dep_assigned fill:#ffa, stroke:#a50, color:#000; classDef dep_completed fill:#afa, stroke:#080, color:#000; 0:::eoi 0["#61 | MISSING\n<i>Process</i>\n<b>Zeloof Z1 process</b>"] 1:::dep_missing 1["#60 | MISSING\n<i>Process</i>\n<b>Thermal diffusion doping</b>"] 2:::dep_missing 2["#55 | MISSING\n<i>Equipment</i>\n<b>Tube Furnace</b>"] 3:::dep_assigned 3["#4 | ASSIGNED\n<i>Equipment</i>\n<b>Wet Lab (Chemistry)</b>"] 4:::dep_assigned 4["#68 | ASSIGNED\n<i>Equipment</i>\n<b>Heating Stirrer</b>"] 5:::dep_missing 5["#67 | MISSING\n<i>Equipment</i>\n<b>Chemical Storage/Containment</b>"] 6:::dep_assigned 6["#27 | ASSIGNED\n<i>Equipment</i>\n<b>Technical Ventilation</b>"] 7:::dep_missing 7["#23 | MISSING\n<i>Equipment</i>\n<b>Fume Hood</b>"] 8:::dep_missing 8["#22 | MISSING\n<i>Equipment</i>\n<b>Running Water and Sink</b>"] 9:::dep_missing 9["#58 | MISSING\n<i>Process</i>\n<b>Pattern Al</b>"] 10:::dep_missing 10["#71 | MISSING\n<i>Research</i>\n<b>STM Metal Pattern Deposition</b>"] 11:::dep_assigned 11["#43 | ASSIGNED\n<i>Development</i>\n<b>Scanning Tunneling Microscope (STM)</b>"] 12:::dep_assigned 12["#42 | ASSIGNED\n<i>Development</i>\n<b>STM Vibration Isolation</b>"] 13:::dep_missing 13["#62 | MISSING\n<i>Process</i>\n<b>Lithography</b>"] 14:::dep_missing 14["#70 | MISSING\n<i>Research</i>\n<b>STM Lithography</b>"] 15:::dep_missing 15["#49 | MISSING\n<i>Development</i>\n<b>Spin Coater</b>"] 16:::dep_missing 16["#51 | MISSING\n<i>Process</i>\n<b>Maskless Photolithography</b>"] 17:::dep_missing 17["#52 | MISSING\n<i>Development</i>\n<b>Maskless photolithography stepper</b>"] 18:::dep_missing 18["#50 | MISSING\n<i>Process</i>\n<b>E-beam Lithography</b>"] 19:::dep_missing 19["#35 | MISSING\n<i>Equipment</i>\n<b>SEM Beam Blanker</b>"] 20:::dep_completed 20["#28 | COMPLETED\n<i>Equipment</i>\n<b>Scanning Electron Microscope (SEM)</b>"] 21:::dep_completed 21["#26 | COMPLETED\n<i>Equipment</i>\n<b>Water Cooling</b>"] 22:::dep_missing 22["#59 | MISSING\n<i>Process</i>\n<b>H₃PO₄/HNO₃/AcOH Etching</b>"] 23:::dep_missing 23["#57 | MISSING\n<i>Process</i>\n<b>Metal thin film deposition</b>"] 24:::dep_missing 24["#56 | MISSING\n<i>Process</i>\n<b>PVD: Thermal Evaporation</b>"] 25:::dep_missing 25["#37 | MISSING\n<i>Process</i>\n<b>PVD: Sputtering</b>"] 26:::dep_missing 26["#53 | MISSING\n<i>Process</i>\n<b>Pattern SiO₂</b>"] 27:::dep_missing 27["#54 | MISSING\n<i>Process</i>\n<b>Si Thermal Oxidation</b>"] 28:::dep_missing 28["#21 | MISSING\n<i>Process</i>\n<b>Reactive Ion Etching</b>"] 29:::dep_missing 29["#25 | MISSING\n<i>Equipment</i>\n<b>Plasma Etcher</b>"] 30:::dep_assigned 30["#24 | ASSIGNED\n<i>Equipment</i>\n<b>~3ph Power (below 10kW)</b>"] 31:::dep_missing 31["#5 | MISSING\n<i>Process</i>\n<b>HNO₃/HF Etching</b>"] 32:::dep_missing 32["#15 | MISSING\n<i>Process</i>\n<b>Microprobing</b>"] 33:::dep_missing 33["#9 | MISSING\n<i>Equipment</i>\n<b>Optical Microscope: Motorized Stage</b>"] 34:::dep_missing 34["#63 | MISSING\n<i>Equipment</i>\n<b>OpenFlexure Delta Stage</b>"] 35:::dep_completed 35["#64 | COMPLETED\n<i>Equipment</i>\n<b>FFF 3D-Printer</b>"] 36:::dep_missing 36["#14 | MISSING\n<i>Equipment</i>\n<b>Optical Microscope</b>"] 10 --> 11 14 --> 11 14 --> 15 5 --> 6 34 --> 35 13 --> 18 13 --> 16 13 --> 14 0 --> 32 0 --> 26 0 --> 9 0 --> 1 1 --> 3 1 --> 2 22 --> 3 9 --> 23 9 --> 22 9 --> 13 9 --> 10 23 --> 25 23 --> 24 27 --> 2 26 --> 31 26 --> 28 26 --> 27 26 --> 13 16 --> 15 16 --> 17 18 --> 19 18 --> 15 11 --> 12 19 --> 20 20 --> 21 29 --> 30 29 --> 6 7 --> 6 28 --> 29 32 --> 33 33 --> 36 33 --> 34 31 --> 3 3 --> 8 3 --> 7 3 --> 6 3 --> 5 3 --> 4 ``` <small>Digest: 7bb46df9a91d11f0c5f4bc6775d1069c9de5a14bf92269b951670f6a61a55550; Last Updated: 2025-06-02 13:46:36</small>
q3k added a new dependency 2025-05-24 10:47:21 +00:00
q3k added a new dependency 2025-05-24 10:47:30 +00:00
q3k added a new dependency 2025-05-24 10:47:44 +00:00
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