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Lithography #62

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opened 2025-05-25 01:00:38 +00:00 by rahix · 1 comment
rahix commented 2025-05-25 01:00:38 +00:00
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We need a lithographic process for patterning various substances. There are many options available and we should mostly find one that works reliably with our means.

From our current understanding, two choices seem most relevant to us:

  • #51 — Maskless Photolitography
  • #50 — Electron-beam Lithography using our SEM

A mask-based process does not seem worth the effort due to the research nature of our work. Additionally, the feature sizes we are targeting at the moment will not prevent #51 from being an option.

We need a lithographic process for patterning various substances. There are many options available and we should mostly find one that works reliably with our means. From our current understanding, two choices seem most relevant to us: - #51 — Maskless Photolitography - #50 — Electron-beam Lithography using our SEM A mask-based process does not seem worth the effort due to the research nature of our work. Additionally, the feature sizes we are targeting at the moment will not prevent #51 from being an option.
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forgejo-actions commented 2025-05-25 01:00:44 +00:00
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Partial Techtree

flowchart BT

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    0:::eoi
    0["<a href='https://git.fa-fo.de/fafo/techtree/issues/62' target='_blank'>#62</a> | MISSING\n<i>Process</i>\n<b>Lithography</b>"]
    1:::dep_missing
    1["<a href='https://git.fa-fo.de/fafo/techtree/issues/70' target='_blank'>#70</a> | MISSING\n<i>Research</i>\n<b>STM Lithography</b>"]
    2:::dep_missing
    2["<a href='https://git.fa-fo.de/fafo/techtree/issues/49' target='_blank'>#49</a> | MISSING\n<i>Development</i>\n<b>Spin Coater</b>"]
    3:::dep_assigned
    3["<a href='https://git.fa-fo.de/fafo/techtree/issues/43' target='_blank'>#43</a> | ASSIGNED\n<i>Development</i>\n<b>Scanning Tunneling Microscope (STM)</b>"]
    4:::dep_assigned
    4["<a href='https://git.fa-fo.de/fafo/techtree/issues/42' target='_blank'>#42</a> | ASSIGNED\n<i>Development</i>\n<b>STM Vibration Isolation</b>"]
    5:::dep_missing
    5["<a href='https://git.fa-fo.de/fafo/techtree/issues/51' target='_blank'>#51</a> | MISSING\n<i>Process</i>\n<b>Maskless Photolithography</b>"]
    6:::dep_missing
    6["<a href='https://git.fa-fo.de/fafo/techtree/issues/52' target='_blank'>#52</a> | MISSING\n<i>Development</i>\n<b>Maskless photolithography stepper</b>"]
    7:::dep_missing
    7["<a href='https://git.fa-fo.de/fafo/techtree/issues/50' target='_blank'>#50</a> | MISSING\n<i>Process</i>\n<b>E-beam Lithography</b>"]
    8:::dep_missing
    8["<a href='https://git.fa-fo.de/fafo/techtree/issues/35' target='_blank'>#35</a> | MISSING\n<i>Equipment</i>\n<b>SEM Beam Blanker</b>"]
    9:::dep_completed
    9["<a href='https://git.fa-fo.de/fafo/techtree/issues/28' target='_blank'>#28</a> | COMPLETED\n<i>Equipment</i>\n<b>Scanning Electron Microscope (SEM)</b>"]
    10:::dep_completed
    10["<a href='https://git.fa-fo.de/fafo/techtree/issues/26' target='_blank'>#26</a> | COMPLETED\n<i>Equipment</i>\n<b>Water Cooling</b>"]
    11:::dependant
    11["<a href='https://git.fa-fo.de/fafo/techtree/issues/53' target='_blank'>#53</a> | MISSING\n<i>Process</i>\n<b>Pattern SiO₂</b>"]
    12:::dependant
    12["<a href='https://git.fa-fo.de/fafo/techtree/issues/58' target='_blank'>#58</a> | MISSING\n<i>Process</i>\n<b>Pattern Al</b>"]
    1 --> 3
    1 --> 2
    0 --> 7
    0 --> 5
    0 --> 1
    5 --> 2
    5 --> 6
    7 --> 8
    7 --> 2
    3 --> 4
    8 --> 9
    9 --> 10
    11 --> 0
    12 --> 0

Digest: 642296028a838d57b8f731eb7c927ebbf40b1dba80160f168d901a6195a96a9c; Last Updated: 2025-06-01 21:31:43

## Partial Techtree ```mermaid flowchart BT classDef eoi fill:#fff, stroke:#000, color:#000; classDef dependant fill:#fff, stroke:#888, color:#888; classDef dep_missing fill:#fcc, stroke:#800, color:#000; classDef dep_assigned fill:#ffa, stroke:#a50, color:#000; classDef dep_completed fill:#afa, stroke:#080, color:#000; 0:::eoi 0["<a href='https://git.fa-fo.de/fafo/techtree/issues/62' target='_blank'>#62</a> | MISSING\n<i>Process</i>\n<b>Lithography</b>"] 1:::dep_missing 1["<a href='https://git.fa-fo.de/fafo/techtree/issues/70' target='_blank'>#70</a> | MISSING\n<i>Research</i>\n<b>STM Lithography</b>"] 2:::dep_missing 2["<a href='https://git.fa-fo.de/fafo/techtree/issues/49' target='_blank'>#49</a> | MISSING\n<i>Development</i>\n<b>Spin Coater</b>"] 3:::dep_assigned 3["<a href='https://git.fa-fo.de/fafo/techtree/issues/43' target='_blank'>#43</a> | ASSIGNED\n<i>Development</i>\n<b>Scanning Tunneling Microscope (STM)</b>"] 4:::dep_assigned 4["<a href='https://git.fa-fo.de/fafo/techtree/issues/42' target='_blank'>#42</a> | ASSIGNED\n<i>Development</i>\n<b>STM Vibration Isolation</b>"] 5:::dep_missing 5["<a href='https://git.fa-fo.de/fafo/techtree/issues/51' target='_blank'>#51</a> | MISSING\n<i>Process</i>\n<b>Maskless Photolithography</b>"] 6:::dep_missing 6["<a href='https://git.fa-fo.de/fafo/techtree/issues/52' target='_blank'>#52</a> | MISSING\n<i>Development</i>\n<b>Maskless photolithography stepper</b>"] 7:::dep_missing 7["<a href='https://git.fa-fo.de/fafo/techtree/issues/50' target='_blank'>#50</a> | MISSING\n<i>Process</i>\n<b>E-beam Lithography</b>"] 8:::dep_missing 8["<a href='https://git.fa-fo.de/fafo/techtree/issues/35' target='_blank'>#35</a> | MISSING\n<i>Equipment</i>\n<b>SEM Beam Blanker</b>"] 9:::dep_completed 9["<a href='https://git.fa-fo.de/fafo/techtree/issues/28' target='_blank'>#28</a> | COMPLETED\n<i>Equipment</i>\n<b>Scanning Electron Microscope (SEM)</b>"] 10:::dep_completed 10["<a href='https://git.fa-fo.de/fafo/techtree/issues/26' target='_blank'>#26</a> | COMPLETED\n<i>Equipment</i>\n<b>Water Cooling</b>"] 11:::dependant 11["<a href='https://git.fa-fo.de/fafo/techtree/issues/53' target='_blank'>#53</a> | MISSING\n<i>Process</i>\n<b>Pattern SiO₂</b>"] 12:::dependant 12["<a href='https://git.fa-fo.de/fafo/techtree/issues/58' target='_blank'>#58</a> | MISSING\n<i>Process</i>\n<b>Pattern Al</b>"] 1 --> 3 1 --> 2 0 --> 7 0 --> 5 0 --> 1 5 --> 2 5 --> 6 7 --> 8 7 --> 2 3 --> 4 8 --> 9 9 --> 10 11 --> 0 12 --> 0 ``` <small>Digest: 642296028a838d57b8f731eb7c927ebbf40b1dba80160f168d901a6195a96a9c; Last Updated: 2025-06-01 21:31:43</small>
rahix added a new dependency 2025-05-25 01:01:06 +00:00
#51 Maskless Photolithography
rahix added a new dependency 2025-05-25 01:01:20 +00:00
#50 E-beam Lithography
rahix added a new dependency 2025-05-25 01:02:28 +00:00
#58 Pattern Al
rahix added a new dependency 2025-05-25 01:02:50 +00:00
#53 Pattern SiO₂
rahix added a new dependency 2025-06-01 21:09:03 +00:00
#70 STM Lithography
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#53 Pattern SiO₂
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#58 Pattern Al
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#50 E-beam Lithography
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#51 Maskless Photolithography
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#70 STM Lithography
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Reference: fafo/techtree#62
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