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Lithography #62

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opened 2025-05-25 01:00:38 +00:00 by rahix · 1 comment
rahix commented 2025-05-25 01:00:38 +00:00
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We need a lithographic process for patterning various substances. There are many options available and we should mostly find one that works reliably with our means.

From our current understanding, two choices seem most relevant to us:

  • #51 — Maskless Photolitography
  • #50 — Electron-beam Lithography using our SEM

A mask-based process does not seem worth the effort due to the research nature of our work. Additionally, the feature sizes we are targeting at the moment will not prevent #51 from being an option.

We need a lithographic process for patterning various substances. There are many options available and we should mostly find one that works reliably with our means. From our current understanding, two choices seem most relevant to us: - #51 — Maskless Photolitography - #50 — Electron-beam Lithography using our SEM A mask-based process does not seem worth the effort due to the research nature of our work. Additionally, the feature sizes we are targeting at the moment will not prevent #51 from being an option.
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forgejo-actions commented 2025-05-25 01:00:44 +00:00
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Partial Techtree

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    1:::dep_missing
    1["<a href='https://git.fa-fo.de/fafo/techtree/issues/70' target='_blank'>#70</a> | MISSING<br/><i>Research</i><br/><b>STM Lithography</b>"]
    2:::dep_assigned
    2["<a href='https://git.fa-fo.de/fafo/techtree/issues/49' target='_blank'>#49</a> | ASSIGNED<br/><i>Development</i><br/><b>Spin Coater</b>"]
    3:::dep_assigned
    3["<a href='https://git.fa-fo.de/fafo/techtree/issues/43' target='_blank'>#43</a> | ASSIGNED<br/><i>Development</i><br/><b>Scanning Tunneling Microscope (STM)</b>"]
    4:::dep_missing
    4["<a href='https://git.fa-fo.de/fafo/techtree/issues/88' target='_blank'>#88</a> | MISSING<br/><i>Development</i><br/><b>Piezo Slider Actuators</b>"]
    5:::dep_missing
    5["<a href='https://git.fa-fo.de/fafo/techtree/issues/108' target='_blank'>#108</a> | MISSING<br/><i>Development</i><br/><b>Piezo Driver</b>"]
    6:::dep_missing
    6["<a href='https://git.fa-fo.de/fafo/techtree/issues/81' target='_blank'>#81</a> | MISSING<br/><i>Process</i><br/><b>Interferometry</b>"]
    7:::dep_assigned
    7["<a href='https://git.fa-fo.de/fafo/techtree/issues/86' target='_blank'>#86</a> | ASSIGNED<br/><i>Development</i><br/><b>Optomechanical System</b>"]
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    9:::dep_missing
    9["<a href='https://git.fa-fo.de/fafo/techtree/issues/82' target='_blank'>#82</a> | MISSING<br/><i>Equipment</i><br/><b>Coherent Light Source</b>"]
    10:::dep_missing
    10["<a href='https://git.fa-fo.de/fafo/techtree/issues/87' target='_blank'>#87</a> | MISSING<br/><i>Equipment</i><br/><b>Diode Laser</b>"]
    11:::dep_assigned
    11["<a href='https://git.fa-fo.de/fafo/techtree/issues/85' target='_blank'>#85</a> | ASSIGNED<br/><i>Development</i><br/><b>Laser Diode Driver/Controller</b>"]
    12:::dep_missing
    12["<a href='https://git.fa-fo.de/fafo/techtree/issues/84' target='_blank'>#84</a> | MISSING<br/><i>Equipment</i><br/><b>Stabilized Helium-Neon Laser</b>"]
    13:::dep_missing
    13["<a href='https://git.fa-fo.de/fafo/techtree/issues/83' target='_blank'>#83</a> | MISSING<br/><i>Equipment</i><br/><b>External Cavity Diode Laser (ECDL)</b>"]
    14:::dep_completed
    14["<a href='https://git.fa-fo.de/fafo/techtree/issues/42' target='_blank'>#42</a> | COMPLETED<br/><i>Development</i><br/><b>STM Vibration Isolation</b>"]
    15:::dep_missing
    15["<a href='https://git.fa-fo.de/fafo/techtree/issues/51' target='_blank'>#51</a> | MISSING<br/><i>Process</i><br/><b>Maskless Photolithography</b>"]
    16:::dep_missing
    16["<a href='https://git.fa-fo.de/fafo/techtree/issues/52' target='_blank'>#52</a> | MISSING<br/><i>Development</i><br/><b>Maskless photolithography stepper</b>"]
    17:::dep_missing
    17["<a href='https://git.fa-fo.de/fafo/techtree/issues/50' target='_blank'>#50</a> | MISSING<br/><i>Process</i><br/><b>E-beam Lithography</b>"]
    18:::dep_missing
    18["<a href='https://git.fa-fo.de/fafo/techtree/issues/35' target='_blank'>#35</a> | MISSING<br/><i>Equipment</i><br/><b>SEM Beam Blanker</b>"]
    19:::dep_completed
    19["<a href='https://git.fa-fo.de/fafo/techtree/issues/28' target='_blank'>#28</a> | COMPLETED<br/><i>Equipment</i><br/><b>Scanning Electron Microscope (SEM)</b>"]
    20:::dep_completed
    20["<a href='https://git.fa-fo.de/fafo/techtree/issues/26' target='_blank'>#26</a> | COMPLETED<br/><i>Equipment</i><br/><b>Water Cooling</b>"]
    21:::dependant
    21["<a href='https://git.fa-fo.de/fafo/techtree/issues/53' target='_blank'>#53</a> | MISSING<br/><i>Process</i><br/><b>Pattern SiO₂</b>"]
    22:::dependant
    22["<a href='https://git.fa-fo.de/fafo/techtree/issues/58' target='_blank'>#58</a> | MISSING<br/><i>Process</i><br/><b>Pattern Al</b>"]
    4 --> 5
    10 --> 11
    7 --> 8
    13 --> 10
    9 --> 13
    9 --> 12
    9 --> 10
    6 --> 9
    6 --> 7
    1 --> 3
    1 --> 2
    0 --> 17
    0 --> 15
    0 --> 1
    15 --> 2
    15 --> 16
    17 --> 18
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    3 --> 14
    3 --> 6
    3 --> 4
    18 --> 19
    19 --> 20
    21 --> 0
    22 --> 0

Digest: 05afd3410409d1522ee58e2c9c7c508d8c4f05ae76c8cf25f51fbfd0a5a4d539; Last Updated: 2025-10-07 04:10:19

## Partial Techtree ```mermaid flowchart BT classDef eoi fill:#fff, stroke:#000, color:#000; classDef dependant fill:#fff, stroke:#888, color:#888; classDef dep_missing fill:#fcc, stroke:#800, color:#000; classDef dep_assigned fill:#ffa, stroke:#a50, color:#000; classDef dep_completed fill:#afa, stroke:#080, color:#000; 0:::eoi 0["<a href='https://git.fa-fo.de/fafo/techtree/issues/62' target='_blank'>#62</a> | MISSING<br/><i>Process</i><br/><b>Lithography</b>"] 1:::dep_missing 1["<a href='https://git.fa-fo.de/fafo/techtree/issues/70' target='_blank'>#70</a> | MISSING<br/><i>Research</i><br/><b>STM Lithography</b>"] 2:::dep_assigned 2["<a href='https://git.fa-fo.de/fafo/techtree/issues/49' target='_blank'>#49</a> | ASSIGNED<br/><i>Development</i><br/><b>Spin Coater</b>"] 3:::dep_assigned 3["<a href='https://git.fa-fo.de/fafo/techtree/issues/43' target='_blank'>#43</a> | ASSIGNED<br/><i>Development</i><br/><b>Scanning Tunneling Microscope (STM)</b>"] 4:::dep_missing 4["<a href='https://git.fa-fo.de/fafo/techtree/issues/88' target='_blank'>#88</a> | MISSING<br/><i>Development</i><br/><b>Piezo Slider Actuators</b>"] 5:::dep_missing 5["<a href='https://git.fa-fo.de/fafo/techtree/issues/108' target='_blank'>#108</a> | MISSING<br/><i>Development</i><br/><b>Piezo Driver</b>"] 6:::dep_missing 6["<a href='https://git.fa-fo.de/fafo/techtree/issues/81' target='_blank'>#81</a> | MISSING<br/><i>Process</i><br/><b>Interferometry</b>"] 7:::dep_assigned 7["<a href='https://git.fa-fo.de/fafo/techtree/issues/86' target='_blank'>#86</a> | ASSIGNED<br/><i>Development</i><br/><b>Optomechanical System</b>"] 8:::dep_completed 8["<a href='https://git.fa-fo.de/fafo/techtree/issues/64' target='_blank'>#64</a> | COMPLETED<br/><i>Equipment</i><br/><b>FFF 3D-Printer</b>"] 9:::dep_missing 9["<a href='https://git.fa-fo.de/fafo/techtree/issues/82' target='_blank'>#82</a> | MISSING<br/><i>Equipment</i><br/><b>Coherent Light Source</b>"] 10:::dep_missing 10["<a href='https://git.fa-fo.de/fafo/techtree/issues/87' target='_blank'>#87</a> | MISSING<br/><i>Equipment</i><br/><b>Diode Laser</b>"] 11:::dep_assigned 11["<a href='https://git.fa-fo.de/fafo/techtree/issues/85' target='_blank'>#85</a> | ASSIGNED<br/><i>Development</i><br/><b>Laser Diode Driver/Controller</b>"] 12:::dep_missing 12["<a href='https://git.fa-fo.de/fafo/techtree/issues/84' target='_blank'>#84</a> | MISSING<br/><i>Equipment</i><br/><b>Stabilized Helium-Neon Laser</b>"] 13:::dep_missing 13["<a href='https://git.fa-fo.de/fafo/techtree/issues/83' target='_blank'>#83</a> | MISSING<br/><i>Equipment</i><br/><b>External Cavity Diode Laser (ECDL)</b>"] 14:::dep_completed 14["<a href='https://git.fa-fo.de/fafo/techtree/issues/42' target='_blank'>#42</a> | COMPLETED<br/><i>Development</i><br/><b>STM Vibration Isolation</b>"] 15:::dep_missing 15["<a href='https://git.fa-fo.de/fafo/techtree/issues/51' target='_blank'>#51</a> | MISSING<br/><i>Process</i><br/><b>Maskless Photolithography</b>"] 16:::dep_missing 16["<a href='https://git.fa-fo.de/fafo/techtree/issues/52' target='_blank'>#52</a> | MISSING<br/><i>Development</i><br/><b>Maskless photolithography stepper</b>"] 17:::dep_missing 17["<a href='https://git.fa-fo.de/fafo/techtree/issues/50' target='_blank'>#50</a> | MISSING<br/><i>Process</i><br/><b>E-beam Lithography</b>"] 18:::dep_missing 18["<a href='https://git.fa-fo.de/fafo/techtree/issues/35' target='_blank'>#35</a> | MISSING<br/><i>Equipment</i><br/><b>SEM Beam Blanker</b>"] 19:::dep_completed 19["<a href='https://git.fa-fo.de/fafo/techtree/issues/28' target='_blank'>#28</a> | COMPLETED<br/><i>Equipment</i><br/><b>Scanning Electron Microscope (SEM)</b>"] 20:::dep_completed 20["<a href='https://git.fa-fo.de/fafo/techtree/issues/26' target='_blank'>#26</a> | COMPLETED<br/><i>Equipment</i><br/><b>Water Cooling</b>"] 21:::dependant 21["<a href='https://git.fa-fo.de/fafo/techtree/issues/53' target='_blank'>#53</a> | MISSING<br/><i>Process</i><br/><b>Pattern SiO₂</b>"] 22:::dependant 22["<a href='https://git.fa-fo.de/fafo/techtree/issues/58' target='_blank'>#58</a> | MISSING<br/><i>Process</i><br/><b>Pattern Al</b>"] 4 --> 5 10 --> 11 7 --> 8 13 --> 10 9 --> 13 9 --> 12 9 --> 10 6 --> 9 6 --> 7 1 --> 3 1 --> 2 0 --> 17 0 --> 15 0 --> 1 15 --> 2 15 --> 16 17 --> 18 17 --> 2 3 --> 14 3 --> 6 3 --> 4 18 --> 19 19 --> 20 21 --> 0 22 --> 0 ``` <small>Digest: 05afd3410409d1522ee58e2c9c7c508d8c4f05ae76c8cf25f51fbfd0a5a4d539; Last Updated: 2025-10-07 04:10:19</small>
rahix added a new dependency 2025-05-25 01:01:06 +00:00
#51 Maskless Photolithography
rahix added a new dependency 2025-05-25 01:01:20 +00:00
#50 E-beam Lithography
rahix added a new dependency 2025-05-25 01:02:28 +00:00
#58 Pattern Al
rahix added a new dependency 2025-05-25 01:02:50 +00:00
#53 Pattern SiO₂
rahix added a new dependency 2025-06-01 21:09:03 +00:00
#70 STM Lithography
rahix added a new dependency 2025-10-03 18:00:59 +00:00
#100 Etch fractals on wafers
rahix removed a dependency 2025-10-03 18:01:40 +00:00
#100 Etch fractals on wafers
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#70 STM Lithography
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Reference: fafo/techtree#62
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