Lithography #62
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#53 Pattern SiO₂
fafo/techtree
#58 Pattern Al
fafo/techtree
#50 E-beam Lithography
fafo/techtree
#51 Maskless Photolithography
fafo/techtree
#70 STM Lithography
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Reference: fafo/techtree#62
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We need a lithographic process for patterning various substances. There are many options available and we should mostly find one that works reliably with our means.
From our current understanding, two choices seem most relevant to us:
A mask-based process does not seem worth the effort due to the research nature of our work. Additionally, the feature sizes we are targeting at the moment will not prevent #51 from being an option.
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