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Lithography #62

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opened 2025-05-25 01:00:38 +00:00 by rahix · 1 comment
rahix commented 2025-05-25 01:00:38 +00:00
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We need a lithographic process for patterning various substances. There are many options available and we should mostly find one that works reliably with our means.

From our current understanding, two choices seem most relevant to us:

  • #51 — Maskless Photolitography
  • #50 — Electron-beam Lithography using our SEM

A mask-based process does not seem worth the effort due to the research nature of our work. Additionally, the feature sizes we are targeting at the moment will not prevent #51 from being an option.

We need a lithographic process for patterning various substances. There are many options available and we should mostly find one that works reliably with our means. From our current understanding, two choices seem most relevant to us: - #51 — Maskless Photolitography - #50 — Electron-beam Lithography using our SEM A mask-based process does not seem worth the effort due to the research nature of our work. Additionally, the feature sizes we are targeting at the moment will not prevent #51 from being an option.
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forgejo-actions commented 2025-05-25 01:00:44 +00:00
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Partial Techtree

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    0:::eoi
    0["<a href='https://git.fa-fo.de/fafo/techtree/issues/62' target='_blank'>#62</a> | MISSING\n<i>Process</i>\n<b>Lithography</b>"]
    1:::dep_missing
    1["<a href='https://git.fa-fo.de/fafo/techtree/issues/70' target='_blank'>#70</a> | MISSING\n<i>Research</i>\n<b>STM Lithography</b>"]
    2:::dep_assigned
    2["<a href='https://git.fa-fo.de/fafo/techtree/issues/49' target='_blank'>#49</a> | ASSIGNED\n<i>Development</i>\n<b>Spin Coater</b>"]
    3:::dep_assigned
    3["<a href='https://git.fa-fo.de/fafo/techtree/issues/43' target='_blank'>#43</a> | ASSIGNED\n<i>Development</i>\n<b>Scanning Tunneling Microscope (STM)</b>"]
    4:::dep_missing
    4["<a href='https://git.fa-fo.de/fafo/techtree/issues/88' target='_blank'>#88</a> | MISSING\n<i>Development</i>\n<b>Piezo Slider Actuators</b>"]
    5:::dep_missing
    5["<a href='https://git.fa-fo.de/fafo/techtree/issues/81' target='_blank'>#81</a> | MISSING\n<i>Process</i>\n<b>Interferometry</b>"]
    6:::dep_assigned
    6["<a href='https://git.fa-fo.de/fafo/techtree/issues/86' target='_blank'>#86</a> | ASSIGNED\n<i>Development</i>\n<b>Optomechanical System</b>"]
    7:::dep_missing
    7["<a href='https://git.fa-fo.de/fafo/techtree/issues/82' target='_blank'>#82</a> | MISSING\n<i>Equipment</i>\n<b>Coherent Light Source</b>"]
    8:::dep_missing
    8["<a href='https://git.fa-fo.de/fafo/techtree/issues/87' target='_blank'>#87</a> | MISSING\n<i>Equipment</i>\n<b>Diode Laser</b>"]
    9:::dep_missing
    9["<a href='https://git.fa-fo.de/fafo/techtree/issues/85' target='_blank'>#85</a> | MISSING\n<i>Development</i>\n<b>Laser Diode Driver/Controller</b>"]
    10:::dep_missing
    10["<a href='https://git.fa-fo.de/fafo/techtree/issues/84' target='_blank'>#84</a> | MISSING\n<i>Equipment</i>\n<b>Stabilized Helium-Neon Laser</b>"]
    11:::dep_missing
    11["<a href='https://git.fa-fo.de/fafo/techtree/issues/83' target='_blank'>#83</a> | MISSING\n<i>Equipment</i>\n<b>External Cavity Diode Laser (ECDL)</b>"]
    12:::dep_completed
    12["<a href='https://git.fa-fo.de/fafo/techtree/issues/42' target='_blank'>#42</a> | COMPLETED\n<i>Development</i>\n<b>STM Vibration Isolation</b>"]
    13:::dep_missing
    13["<a href='https://git.fa-fo.de/fafo/techtree/issues/51' target='_blank'>#51</a> | MISSING\n<i>Process</i>\n<b>Maskless Photolithography</b>"]
    14:::dep_missing
    14["<a href='https://git.fa-fo.de/fafo/techtree/issues/52' target='_blank'>#52</a> | MISSING\n<i>Development</i>\n<b>Maskless photolithography stepper</b>"]
    15:::dep_missing
    15["<a href='https://git.fa-fo.de/fafo/techtree/issues/50' target='_blank'>#50</a> | MISSING\n<i>Process</i>\n<b>E-beam Lithography</b>"]
    16:::dep_missing
    16["<a href='https://git.fa-fo.de/fafo/techtree/issues/35' target='_blank'>#35</a> | MISSING\n<i>Equipment</i>\n<b>SEM Beam Blanker</b>"]
    17:::dep_completed
    17["<a href='https://git.fa-fo.de/fafo/techtree/issues/28' target='_blank'>#28</a> | COMPLETED\n<i>Equipment</i>\n<b>Scanning Electron Microscope (SEM)</b>"]
    18:::dep_completed
    18["<a href='https://git.fa-fo.de/fafo/techtree/issues/26' target='_blank'>#26</a> | COMPLETED\n<i>Equipment</i>\n<b>Water Cooling</b>"]
    19:::dependant
    19["<a href='https://git.fa-fo.de/fafo/techtree/issues/53' target='_blank'>#53</a> | MISSING\n<i>Process</i>\n<b>Pattern SiO₂</b>"]
    20:::dependant
    20["<a href='https://git.fa-fo.de/fafo/techtree/issues/58' target='_blank'>#58</a> | MISSING\n<i>Process</i>\n<b>Pattern Al</b>"]
    8 --> 9
    11 --> 8
    7 --> 11
    7 --> 10
    7 --> 8
    5 --> 7
    5 --> 6
    1 --> 3
    1 --> 2
    0 --> 15
    0 --> 13
    0 --> 1
    13 --> 2
    13 --> 14
    15 --> 16
    15 --> 2
    3 --> 12
    3 --> 5
    3 --> 4
    16 --> 17
    17 --> 18
    19 --> 0
    20 --> 0

Digest: 20cac137971702ac3f4c26d8cd79379be6fd10aa0dd8d85cb3d463458264cb78; Last Updated: 2025-08-21 21:33:45

## Partial Techtree ```mermaid flowchart BT classDef eoi fill:#fff, stroke:#000, color:#000; classDef dependant fill:#fff, stroke:#888, color:#888; classDef dep_missing fill:#fcc, stroke:#800, color:#000; classDef dep_assigned fill:#ffa, stroke:#a50, color:#000; classDef dep_completed fill:#afa, stroke:#080, color:#000; 0:::eoi 0["<a href='https://git.fa-fo.de/fafo/techtree/issues/62' target='_blank'>#62</a> | MISSING\n<i>Process</i>\n<b>Lithography</b>"] 1:::dep_missing 1["<a href='https://git.fa-fo.de/fafo/techtree/issues/70' target='_blank'>#70</a> | MISSING\n<i>Research</i>\n<b>STM Lithography</b>"] 2:::dep_assigned 2["<a href='https://git.fa-fo.de/fafo/techtree/issues/49' target='_blank'>#49</a> | ASSIGNED\n<i>Development</i>\n<b>Spin Coater</b>"] 3:::dep_assigned 3["<a href='https://git.fa-fo.de/fafo/techtree/issues/43' target='_blank'>#43</a> | ASSIGNED\n<i>Development</i>\n<b>Scanning Tunneling Microscope (STM)</b>"] 4:::dep_missing 4["<a href='https://git.fa-fo.de/fafo/techtree/issues/88' target='_blank'>#88</a> | MISSING\n<i>Development</i>\n<b>Piezo Slider Actuators</b>"] 5:::dep_missing 5["<a href='https://git.fa-fo.de/fafo/techtree/issues/81' target='_blank'>#81</a> | MISSING\n<i>Process</i>\n<b>Interferometry</b>"] 6:::dep_assigned 6["<a href='https://git.fa-fo.de/fafo/techtree/issues/86' target='_blank'>#86</a> | ASSIGNED\n<i>Development</i>\n<b>Optomechanical System</b>"] 7:::dep_missing 7["<a href='https://git.fa-fo.de/fafo/techtree/issues/82' target='_blank'>#82</a> | MISSING\n<i>Equipment</i>\n<b>Coherent Light Source</b>"] 8:::dep_missing 8["<a href='https://git.fa-fo.de/fafo/techtree/issues/87' target='_blank'>#87</a> | MISSING\n<i>Equipment</i>\n<b>Diode Laser</b>"] 9:::dep_missing 9["<a href='https://git.fa-fo.de/fafo/techtree/issues/85' target='_blank'>#85</a> | MISSING\n<i>Development</i>\n<b>Laser Diode Driver/Controller</b>"] 10:::dep_missing 10["<a href='https://git.fa-fo.de/fafo/techtree/issues/84' target='_blank'>#84</a> | MISSING\n<i>Equipment</i>\n<b>Stabilized Helium-Neon Laser</b>"] 11:::dep_missing 11["<a href='https://git.fa-fo.de/fafo/techtree/issues/83' target='_blank'>#83</a> | MISSING\n<i>Equipment</i>\n<b>External Cavity Diode Laser (ECDL)</b>"] 12:::dep_completed 12["<a href='https://git.fa-fo.de/fafo/techtree/issues/42' target='_blank'>#42</a> | COMPLETED\n<i>Development</i>\n<b>STM Vibration Isolation</b>"] 13:::dep_missing 13["<a href='https://git.fa-fo.de/fafo/techtree/issues/51' target='_blank'>#51</a> | MISSING\n<i>Process</i>\n<b>Maskless Photolithography</b>"] 14:::dep_missing 14["<a href='https://git.fa-fo.de/fafo/techtree/issues/52' target='_blank'>#52</a> | MISSING\n<i>Development</i>\n<b>Maskless photolithography stepper</b>"] 15:::dep_missing 15["<a href='https://git.fa-fo.de/fafo/techtree/issues/50' target='_blank'>#50</a> | MISSING\n<i>Process</i>\n<b>E-beam Lithography</b>"] 16:::dep_missing 16["<a href='https://git.fa-fo.de/fafo/techtree/issues/35' target='_blank'>#35</a> | MISSING\n<i>Equipment</i>\n<b>SEM Beam Blanker</b>"] 17:::dep_completed 17["<a href='https://git.fa-fo.de/fafo/techtree/issues/28' target='_blank'>#28</a> | COMPLETED\n<i>Equipment</i>\n<b>Scanning Electron Microscope (SEM)</b>"] 18:::dep_completed 18["<a href='https://git.fa-fo.de/fafo/techtree/issues/26' target='_blank'>#26</a> | COMPLETED\n<i>Equipment</i>\n<b>Water Cooling</b>"] 19:::dependant 19["<a href='https://git.fa-fo.de/fafo/techtree/issues/53' target='_blank'>#53</a> | MISSING\n<i>Process</i>\n<b>Pattern SiO₂</b>"] 20:::dependant 20["<a href='https://git.fa-fo.de/fafo/techtree/issues/58' target='_blank'>#58</a> | MISSING\n<i>Process</i>\n<b>Pattern Al</b>"] 8 --> 9 11 --> 8 7 --> 11 7 --> 10 7 --> 8 5 --> 7 5 --> 6 1 --> 3 1 --> 2 0 --> 15 0 --> 13 0 --> 1 13 --> 2 13 --> 14 15 --> 16 15 --> 2 3 --> 12 3 --> 5 3 --> 4 16 --> 17 17 --> 18 19 --> 0 20 --> 0 ``` <small>Digest: 20cac137971702ac3f4c26d8cd79379be6fd10aa0dd8d85cb3d463458264cb78; Last Updated: 2025-08-21 21:33:45</small>
rahix added a new dependency 2025-05-25 01:01:06 +00:00
#51 Maskless Photolithography
rahix added a new dependency 2025-05-25 01:01:20 +00:00
#50 E-beam Lithography
rahix added a new dependency 2025-05-25 01:02:28 +00:00
#58 Pattern Al
rahix added a new dependency 2025-05-25 01:02:50 +00:00
#53 Pattern SiO₂
rahix added a new dependency 2025-06-01 21:09:03 +00:00
#70 STM Lithography
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#53 Pattern SiO₂
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#58 Pattern Al
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#50 E-beam Lithography
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#70 STM Lithography
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Reference: fafo/techtree#62
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