Etch fractals on wafers #100

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opened 2025-10-03 17:13:19 +00:00 by vrs · 1 comment
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A coin-sized wafer with a Mandelbrot on one side and a Julia set on the other (seeing that these two are two sides of the same coin mathematically), etched to the limits of optical resolution and maybe below.

More of an arts&crafts project but it would be a fun test of our lithography capabilities and possibly a great item to give to donators or display at congress.

A coin-sized wafer with a Mandelbrot on one side and a Julia set on the other (seeing that these two are two sides of the same coin mathematically), etched to the limits of optical resolution and maybe below. More of an arts&crafts project but it would be a fun test of our lithography capabilities and possibly a great item to give to donators or display at congress.

Partial Techtree

flowchart BT

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    classDef dependant fill:#fff, stroke:#888, color:#888;
    classDef dep_missing fill:#fcc, stroke:#800, color:#000;
    classDef dep_assigned fill:#ffa, stroke:#a50, color:#000;
    classDef dep_completed fill:#afa, stroke:#080, color:#000;
    0:::eoi
    0["#100 | MISSING<br/><i>Process</i><br/><b>Etch fractals on wafers</b>"]
    1:::dep_missing
    1["#53 | MISSING<br/><i>Process</i><br/><b>Pattern SiO₂</b>"]
    2:::dep_missing
    2["#62 | MISSING<br/><i>Process</i><br/><b>Lithography</b>"]
    3:::dep_missing
    3["#70 | MISSING<br/><i>Research</i><br/><b>STM Lithography</b>"]
    4:::dep_assigned
    4["#49 | ASSIGNED<br/><i>Development</i><br/><b>Spin Coater</b>"]
    5:::dep_assigned
    5["#43 | ASSIGNED<br/><i>Development</i><br/><b>Scanning Tunneling Microscope (STM)</b>"]
    6:::dep_missing
    6["#88 | MISSING<br/><i>Development</i><br/><b>Piezo Slider Actuators</b>"]
    7:::dep_missing
    7["#108 | MISSING<br/><i>Development</i><br/><b>Piezo Driver</b>"]
    8:::dep_missing
    8["#81 | MISSING<br/><i>Process</i><br/><b>Interferometry</b>"]
    9:::dep_assigned
    9["#86 | ASSIGNED<br/><i>Development</i><br/><b>Optomechanical System</b>"]
    10:::dep_completed
    10["#64 | COMPLETED<br/><i>Equipment</i><br/><b>FFF 3D-Printer</b>"]
    11:::dep_missing
    11["#82 | MISSING<br/><i>Equipment</i><br/><b>Coherent Light Source</b>"]
    12:::dep_missing
    12["#87 | MISSING<br/><i>Equipment</i><br/><b>Diode Laser</b>"]
    13:::dep_assigned
    13["#85 | ASSIGNED<br/><i>Development</i><br/><b>Laser Diode Driver/Controller</b>"]
    14:::dep_missing
    14["#84 | MISSING<br/><i>Equipment</i><br/><b>Stabilized Helium-Neon Laser</b>"]
    15:::dep_missing
    15["#83 | MISSING<br/><i>Equipment</i><br/><b>External Cavity Diode Laser (ECDL)</b>"]
    16:::dep_completed
    16["#42 | COMPLETED<br/><i>Development</i><br/><b>STM Vibration Isolation</b>"]
    17:::dep_missing
    17["#51 | MISSING<br/><i>Process</i><br/><b>Maskless Photolithography</b>"]
    18:::dep_missing
    18["#52 | MISSING<br/><i>Development</i><br/><b>Maskless photolithography stepper</b>"]
    19:::dep_missing
    19["#50 | MISSING<br/><i>Process</i><br/><b>E-beam Lithography</b>"]
    20:::dep_missing
    20["#35 | MISSING<br/><i>Equipment</i><br/><b>SEM Beam Blanker</b>"]
    21:::dep_completed
    21["#28 | COMPLETED<br/><i>Equipment</i><br/><b>Scanning Electron Microscope (SEM)</b>"]
    22:::dep_completed
    22["#26 | COMPLETED<br/><i>Equipment</i><br/><b>Water Cooling</b>"]
    23:::dep_missing
    23["#54 | MISSING<br/><i>Process</i><br/><b>Si Thermal Oxidation</b>"]
    24:::dep_assigned
    24["#55 | ASSIGNED<br/><i>Equipment</i><br/><b>Tube Furnace</b>"]
    25:::dep_missing
    25["#21 | MISSING<br/><i>Process</i><br/><b>Reactive Ion Etching</b>"]
    26:::dep_missing
    26["#25 | MISSING<br/><i>Equipment</i><br/><b>Plasma Etcher</b>"]
    27:::dep_assigned
    27["#27 | ASSIGNED<br/><i>Equipment</i><br/><b>Technical Ventilation</b>"]
    28:::dep_completed
    28["#24 | COMPLETED<br/><i>Equipment</i><br/><b>~3ph Power (below 10kW)</b>"]
    29:::dep_missing
    29["#5 | MISSING<br/><i>Process</i><br/><b>BOE Etching</b>"]
    30:::dep_assigned
    30["#4 | ASSIGNED<br/><i>Equipment</i><br/><b>Wet Lab (Chemistry)</b>"]
    31:::dep_assigned
    31["#68 | ASSIGNED<br/><i>Equipment</i><br/><b>Heating Stirrer</b>"]
    32:::dep_missing
    32["#67 | MISSING<br/><i>Equipment</i><br/><b>Chemical Storage/Containment</b>"]
    33:::dep_missing
    33["#23 | MISSING<br/><i>Equipment</i><br/><b>Fume Hood</b>"]
    0 --> 1
    6 --> 7
    12 --> 13
    9 --> 10
    15 --> 12
    11 --> 15
    11 --> 14
    11 --> 12
    8 --> 11
    8 --> 9
    3 --> 5
    3 --> 4
    32 --> 27
    2 --> 19
    2 --> 17
    2 --> 3
    23 --> 24
    1 --> 29
    1 --> 25
    1 --> 23
    1 --> 2
    17 --> 4
    17 --> 18
    19 --> 20
    19 --> 4
    5 --> 16
    5 --> 8
    5 --> 6
    20 --> 21
    21 --> 22
    26 --> 28
    26 --> 27
    33 --> 27
    25 --> 26
    29 --> 30
    30 --> 33
    30 --> 27
    30 --> 32
    30 --> 31

Digest: e0e2be7ad662998000181c5fe1c5d30e65bc4d03bb122aa24437ec3c7844cbe3; Last Updated: 2025-10-07 04:10:19

## Partial Techtree ```mermaid flowchart BT classDef eoi fill:#fff, stroke:#000, color:#000; classDef dependant fill:#fff, stroke:#888, color:#888; classDef dep_missing fill:#fcc, stroke:#800, color:#000; classDef dep_assigned fill:#ffa, stroke:#a50, color:#000; classDef dep_completed fill:#afa, stroke:#080, color:#000; 0:::eoi 0["#100 | MISSING<br/><i>Process</i><br/><b>Etch fractals on wafers</b>"] 1:::dep_missing 1["#53 | MISSING<br/><i>Process</i><br/><b>Pattern SiO₂</b>"] 2:::dep_missing 2["#62 | MISSING<br/><i>Process</i><br/><b>Lithography</b>"] 3:::dep_missing 3["#70 | MISSING<br/><i>Research</i><br/><b>STM Lithography</b>"] 4:::dep_assigned 4["#49 | ASSIGNED<br/><i>Development</i><br/><b>Spin Coater</b>"] 5:::dep_assigned 5["#43 | ASSIGNED<br/><i>Development</i><br/><b>Scanning Tunneling Microscope (STM)</b>"] 6:::dep_missing 6["#88 | MISSING<br/><i>Development</i><br/><b>Piezo Slider Actuators</b>"] 7:::dep_missing 7["#108 | MISSING<br/><i>Development</i><br/><b>Piezo Driver</b>"] 8:::dep_missing 8["#81 | MISSING<br/><i>Process</i><br/><b>Interferometry</b>"] 9:::dep_assigned 9["#86 | ASSIGNED<br/><i>Development</i><br/><b>Optomechanical System</b>"] 10:::dep_completed 10["#64 | COMPLETED<br/><i>Equipment</i><br/><b>FFF 3D-Printer</b>"] 11:::dep_missing 11["#82 | MISSING<br/><i>Equipment</i><br/><b>Coherent Light Source</b>"] 12:::dep_missing 12["#87 | MISSING<br/><i>Equipment</i><br/><b>Diode Laser</b>"] 13:::dep_assigned 13["#85 | ASSIGNED<br/><i>Development</i><br/><b>Laser Diode Driver/Controller</b>"] 14:::dep_missing 14["#84 | MISSING<br/><i>Equipment</i><br/><b>Stabilized Helium-Neon Laser</b>"] 15:::dep_missing 15["#83 | MISSING<br/><i>Equipment</i><br/><b>External Cavity Diode Laser (ECDL)</b>"] 16:::dep_completed 16["#42 | COMPLETED<br/><i>Development</i><br/><b>STM Vibration Isolation</b>"] 17:::dep_missing 17["#51 | MISSING<br/><i>Process</i><br/><b>Maskless Photolithography</b>"] 18:::dep_missing 18["#52 | MISSING<br/><i>Development</i><br/><b>Maskless photolithography stepper</b>"] 19:::dep_missing 19["#50 | MISSING<br/><i>Process</i><br/><b>E-beam Lithography</b>"] 20:::dep_missing 20["#35 | MISSING<br/><i>Equipment</i><br/><b>SEM Beam Blanker</b>"] 21:::dep_completed 21["#28 | COMPLETED<br/><i>Equipment</i><br/><b>Scanning Electron Microscope (SEM)</b>"] 22:::dep_completed 22["#26 | COMPLETED<br/><i>Equipment</i><br/><b>Water Cooling</b>"] 23:::dep_missing 23["#54 | MISSING<br/><i>Process</i><br/><b>Si Thermal Oxidation</b>"] 24:::dep_assigned 24["#55 | ASSIGNED<br/><i>Equipment</i><br/><b>Tube Furnace</b>"] 25:::dep_missing 25["#21 | MISSING<br/><i>Process</i><br/><b>Reactive Ion Etching</b>"] 26:::dep_missing 26["#25 | MISSING<br/><i>Equipment</i><br/><b>Plasma Etcher</b>"] 27:::dep_assigned 27["#27 | ASSIGNED<br/><i>Equipment</i><br/><b>Technical Ventilation</b>"] 28:::dep_completed 28["#24 | COMPLETED<br/><i>Equipment</i><br/><b>~3ph Power (below 10kW)</b>"] 29:::dep_missing 29["#5 | MISSING<br/><i>Process</i><br/><b>BOE Etching</b>"] 30:::dep_assigned 30["#4 | ASSIGNED<br/><i>Equipment</i><br/><b>Wet Lab (Chemistry)</b>"] 31:::dep_assigned 31["#68 | ASSIGNED<br/><i>Equipment</i><br/><b>Heating Stirrer</b>"] 32:::dep_missing 32["#67 | MISSING<br/><i>Equipment</i><br/><b>Chemical Storage/Containment</b>"] 33:::dep_missing 33["#23 | MISSING<br/><i>Equipment</i><br/><b>Fume Hood</b>"] 0 --> 1 6 --> 7 12 --> 13 9 --> 10 15 --> 12 11 --> 15 11 --> 14 11 --> 12 8 --> 11 8 --> 9 3 --> 5 3 --> 4 32 --> 27 2 --> 19 2 --> 17 2 --> 3 23 --> 24 1 --> 29 1 --> 25 1 --> 23 1 --> 2 17 --> 4 17 --> 18 19 --> 20 19 --> 4 5 --> 16 5 --> 8 5 --> 6 20 --> 21 21 --> 22 26 --> 28 26 --> 27 33 --> 27 25 --> 26 29 --> 30 30 --> 33 30 --> 27 30 --> 32 30 --> 31 ``` <small>Digest: e0e2be7ad662998000181c5fe1c5d30e65bc4d03bb122aa24437ec3c7844cbe3; Last Updated: 2025-10-07 04:10:19</small>
rahix added the
Type
Process
label 2025-10-03 17:55:16 +00:00
rahix added a new dependency 2025-10-03 18:00:59 +00:00
rahix added a new dependency 2025-10-03 18:01:19 +00:00
rahix removed a dependency 2025-10-03 18:01:40 +00:00
rahix added the
Needs Documentation
label 2025-10-07 04:20:45 +00:00
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