Reactive Ion Etching #21

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opened 2025-05-22 20:16:01 +00:00 by rahix · 1 comment
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rahix added the
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Process
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labels 2025-05-22 20:16:01 +00:00

Partial Techtree

flowchart BT

    classDef eoi fill:#fff, stroke:#000, color:#000;
    classDef dependant fill:#fff, stroke:#888, color:#888;
    classDef dep_missing fill:#fcc, stroke:#800, color:#000;
    classDef dep_assigned fill:#ffa, stroke:#a50, color:#000;
    classDef dep_completed fill:#afa, stroke:#080, color:#000;
    0:::eoi
    0["<a href='https://git.fa-fo.de/fafo/techtree/issues/21' target='_blank'>#21</a> | MISSING\n<i>Process</i>\n<b>Reactive Ion Etching</b>"]
    1:::dep_missing
    1["<a href='https://git.fa-fo.de/fafo/techtree/issues/25' target='_blank'>#25</a> | MISSING\n<i>Equipment</i>\n<b>Plasma Etcher</b>"]
    2:::dep_assigned
    2["<a href='https://git.fa-fo.de/fafo/techtree/issues/27' target='_blank'>#27</a> | ASSIGNED\n<i>Equipment</i>\n<b>Technical Ventilation</b>"]
    3:::dep_assigned
    3["<a href='https://git.fa-fo.de/fafo/techtree/issues/24' target='_blank'>#24</a> | ASSIGNED\n<i>Equipment</i>\n<b>~3ph Power (below 10kW)</b>"]
    4:::dependant
    4["<a href='https://git.fa-fo.de/fafo/techtree/issues/2' target='_blank'>#2</a> | MISSING\n<i>Process</i>\n<b>Chip Delayering</b>"]
    5:::dependant
    5["<a href='https://git.fa-fo.de/fafo/techtree/issues/53' target='_blank'>#53</a> | MISSING\n<i>Process</i>\n<b>Pattern SiO₂</b>"]
    1 --> 3
    1 --> 2
    0 --> 1
    4 --> 0
    5 --> 0

Digest: 11f400f6c383b36a7800ec40a31c51aec81e0e6d522af7290d837bf093dfd023; Last Updated: 2025-05-29 11:51:14

## Partial Techtree ```mermaid flowchart BT classDef eoi fill:#fff, stroke:#000, color:#000; classDef dependant fill:#fff, stroke:#888, color:#888; classDef dep_missing fill:#fcc, stroke:#800, color:#000; classDef dep_assigned fill:#ffa, stroke:#a50, color:#000; classDef dep_completed fill:#afa, stroke:#080, color:#000; 0:::eoi 0["<a href='https://git.fa-fo.de/fafo/techtree/issues/21' target='_blank'>#21</a> | MISSING\n<i>Process</i>\n<b>Reactive Ion Etching</b>"] 1:::dep_missing 1["<a href='https://git.fa-fo.de/fafo/techtree/issues/25' target='_blank'>#25</a> | MISSING\n<i>Equipment</i>\n<b>Plasma Etcher</b>"] 2:::dep_assigned 2["<a href='https://git.fa-fo.de/fafo/techtree/issues/27' target='_blank'>#27</a> | ASSIGNED\n<i>Equipment</i>\n<b>Technical Ventilation</b>"] 3:::dep_assigned 3["<a href='https://git.fa-fo.de/fafo/techtree/issues/24' target='_blank'>#24</a> | ASSIGNED\n<i>Equipment</i>\n<b>~3ph Power (below 10kW)</b>"] 4:::dependant 4["<a href='https://git.fa-fo.de/fafo/techtree/issues/2' target='_blank'>#2</a> | MISSING\n<i>Process</i>\n<b>Chip Delayering</b>"] 5:::dependant 5["<a href='https://git.fa-fo.de/fafo/techtree/issues/53' target='_blank'>#53</a> | MISSING\n<i>Process</i>\n<b>Pattern SiO₂</b>"] 1 --> 3 1 --> 2 0 --> 1 4 --> 0 5 --> 0 ``` <small>Digest: 11f400f6c383b36a7800ec40a31c51aec81e0e6d522af7290d837bf093dfd023; Last Updated: 2025-05-29 11:51:14</small>
rahix added a new dependency 2025-05-22 20:16:19 +00:00
rahix added a new dependency 2025-05-22 23:47:53 +00:00
q3k added a new dependency 2025-05-24 10:23:00 +00:00
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