E-beam Lithography #50

New issue

Open

opened 2025-05-24 10:15:47 +00:00 by q3k · 1 comment

q3k commented

2025-05-24 10:15:47 +00:00

Owner

Electron-beam lithography is the practice of scanning a focused beam of electrons to draw custom shapes on a surface covered with an electron-sensitive film called a resist (exposing). — Wikipedia

We can probably do electron-beam lithography on our Zeiss DSM "Kevin". A major component for making this work is a beam-blanker which we already have (#35).

Sam Zeloof has explored this topic as well (Blog) and noted that standard photoresists seem to work reasonably well. Beyond that, there are special e-beam resists, but they may be hard to acquire.

> Electron-beam lithography is the practice of scanning a focused beam of electrons to draw custom shapes on a surface covered with an electron-sensitive film called a resist (exposing). — [Wikipedia](https://en.wikipedia.org/wiki/Electron-beam_lithography) We can probably do electron-beam lithography on our Zeiss DSM "Kevin". A major component for making this work is a beam-blanker which we already have (#35). Sam Zeloof has explored this topic as well ([Blog](https://web.archive.org/web/20250220162430/http://sam.zeloof.xyz/e-beam-lithography/)) and noted that standard photoresists seem to work reasonably well. Beyond that, there are special e-beam resists, but they may be hard to acquire.

q3k added the

Type

Process

label 2025-05-24 10:15:47 +00:00

forgejo-actions commented

2025-05-24 10:15:53 +00:00

Partial Techtree

flowchart BT

    classDef eoi fill:#fff, stroke:#000, color:#000;
    classDef dependant fill:#fff, stroke:#888, color:#888;
    classDef dep_missing fill:#fcc, stroke:#800, color:#000;
    classDef dep_assigned fill:#ffa, stroke:#a50, color:#000;
    classDef dep_completed fill:#afa, stroke:#080, color:#000;
    0:::eoi
    0["<a href='https://git.fa-fo.de/fafo/techtree/issues/50' target='_blank'>#50</a> | MISSING\n<i>Process</i>\n<b>E-beam Lithography</b>"]
    1:::dep_missing
    1["<a href='https://git.fa-fo.de/fafo/techtree/issues/49' target='_blank'>#49</a> | MISSING\n<i>Development</i>\n<b>Spin Coater</b>"]
    2:::dep_missing
    2["<a href='https://git.fa-fo.de/fafo/techtree/issues/35' target='_blank'>#35</a> | MISSING\n<i>Equipment</i>\n<b>SEM Beam Blanker</b>"]
    3:::dep_completed
    3["<a href='https://git.fa-fo.de/fafo/techtree/issues/28' target='_blank'>#28</a> | COMPLETED\n<i>Equipment</i>\n<b>Scanning Electron Microscope (SEM)</b>"]
    4:::dep_completed
    4["<a href='https://git.fa-fo.de/fafo/techtree/issues/26' target='_blank'>#26</a> | COMPLETED\n<i>Equipment</i>\n<b>Water Cooling</b>"]
    5:::dependant
    5["<a href='https://git.fa-fo.de/fafo/techtree/issues/62' target='_blank'>#62</a> | MISSING\n<i>Process</i>\n<b>Lithography</b>"]
    0 --> 2
    0 --> 1
    2 --> 3
    3 --> 4
    5 --> 0

Digest: 08583d25b4e6ca6ee869462afe24d117d9042ab857e0d78eecad3ddec6a40d0e; Last Updated: 2025-05-29 09:15:28

## Partial Techtree ```mermaid flowchart BT classDef eoi fill:#fff, stroke:#000, color:#000; classDef dependant fill:#fff, stroke:#888, color:#888; classDef dep_missing fill:#fcc, stroke:#800, color:#000; classDef dep_assigned fill:#ffa, stroke:#a50, color:#000; classDef dep_completed fill:#afa, stroke:#080, color:#000; 0:::eoi 0["<a href='https://git.fa-fo.de/fafo/techtree/issues/50' target='_blank'>#50</a> | MISSING\nProcess\nE-beam Lithography"] 1:::dep_missing 1["<a href='https://git.fa-fo.de/fafo/techtree/issues/49' target='_blank'>#49</a> | MISSING\nDevelopment\nSpin Coater"] 2:::dep_missing 2["<a href='https://git.fa-fo.de/fafo/techtree/issues/35' target='_blank'>#35</a> | MISSING\nEquipment\nSEM Beam Blanker"] 3:::dep_completed 3["<a href='https://git.fa-fo.de/fafo/techtree/issues/28' target='_blank'>#28</a> | COMPLETED\nEquipment\nScanning Electron Microscope (SEM)"] 4:::dep_completed 4["<a href='https://git.fa-fo.de/fafo/techtree/issues/26' target='_blank'>#26</a> | COMPLETED\nEquipment\nWater Cooling"] 5:::dependant 5["<a href='https://git.fa-fo.de/fafo/techtree/issues/62' target='_blank'>#62</a> | MISSING\nProcess\nLithography"] 0 --> 2 0 --> 1 2 --> 3 3 --> 4 5 --> 0 ``` Digest: 08583d25b4e6ca6ee869462afe24d117d9042ab857e0d78eecad3ddec6a40d0e; Last Updated: 2025-05-29 09:15:28

q3k added a new dependency 2025-05-24 10:15:58 +00:00

#35 SEM Beam Blanker

q3k added a new dependency 2025-05-24 10:16:08 +00:00

#49 Spin Coater

q3k added a new dependency 2025-05-24 10:22:55 +00:00

#53 Pattern SiO₂

q3k added a new dependency 2025-05-24 10:30:41 +00:00

#58 Pattern Al