E-beam Lithography #50
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#62 Lithography
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#35 SEM Beam Blanker
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#49 Spin Coater
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Reference: fafo/techtree#50
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We can probably do electron-beam lithography on our Zeiss DSM "Kevin". A major component for making this work is a beam-blanker which we already have (#35).
Sam Zeloof has explored this topic as well (Blog) and noted that standard photoresists seem to work reasonably well. Beyond that, there are special e-beam resists, but they may be hard to acquire.
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