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Si Thermal Oxidation #54

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opened 2025-05-24 10:23:47 +00:00 by q3k · 1 comment
q3k commented 2025-05-24 10:23:47 +00:00
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The ability to grow SiO₂ on bare Si.

This process is needed to build up insulating features on a die.

The ability to grow SiO₂ on bare Si. This process is needed to build up insulating features on a die.
forgejo-actions commented 2025-05-24 10:24:03 +00:00

Partial Techtree

flowchart BT

    classDef eoi fill:#fff, stroke:#000, color:#000;
    classDef dependant fill:#fff, stroke:#888, color:#888;
    classDef ultimate fill:#fff, stroke:#000, color:#000;
    classDef dep_missing fill:#fcc, stroke:#800, color:#000;
    classDef dep_assigned fill:#ffa, stroke:#a50, color:#000;
    classDef dep_completed fill:#afa, stroke:#080, color:#000;
    0:::eoi
    0["<a href='https://git.fa-fo.de/fafo/techtree/issues/54' target='_blank'>#54</a> | MISSING<br/><i>Process</i><br/><b>Si Thermal Oxidation</b>"]
    1:::dep_assigned
    1["<a href='https://git.fa-fo.de/fafo/techtree/issues/55' target='_blank'>#55</a> | ASSIGNED<br/><i>Equipment</i><br/><b>Tube Furnace</b>"]
    2:::dependant
    2["<a href='https://git.fa-fo.de/fafo/techtree/issues/53' target='_blank'>#53</a> | MISSING<br/><i>Process</i><br/><b>Pattern SiO₂</b>"]
    3:::dependant
    3["<a href='https://git.fa-fo.de/fafo/techtree/issues/127' target='_blank'>#127</a> | MISSING<br/><i>Process</i><br/><b>Jeri Ellsworth NMOS Transistor</b>"]
    0 --> 1
    2 --> 0
    3 --> 0

Digest: b225bba95181c290e9ebe547b3d6ea48fbd457a32bbe03482e8ef34b0d4d12aa; Last Updated: 2026-10-25 22:34:54

## Partial Techtree ```mermaid flowchart BT classDef eoi fill:#fff, stroke:#000, color:#000; classDef dependant fill:#fff, stroke:#888, color:#888; classDef ultimate fill:#fff, stroke:#000, color:#000; classDef dep_missing fill:#fcc, stroke:#800, color:#000; classDef dep_assigned fill:#ffa, stroke:#a50, color:#000; classDef dep_completed fill:#afa, stroke:#080, color:#000; 0:::eoi 0["<a href='https://git.fa-fo.de/fafo/techtree/issues/54' target='_blank'>#54</a> | MISSING<br/><i>Process</i><br/><b>Si Thermal Oxidation</b>"] 1:::dep_assigned 1["<a href='https://git.fa-fo.de/fafo/techtree/issues/55' target='_blank'>#55</a> | ASSIGNED<br/><i>Equipment</i><br/><b>Tube Furnace</b>"] 2:::dependant 2["<a href='https://git.fa-fo.de/fafo/techtree/issues/53' target='_blank'>#53</a> | MISSING<br/><i>Process</i><br/><b>Pattern SiO₂</b>"] 3:::dependant 3["<a href='https://git.fa-fo.de/fafo/techtree/issues/127' target='_blank'>#127</a> | MISSING<br/><i>Process</i><br/><b>Jeri Ellsworth NMOS Transistor</b>"] 0 --> 1 2 --> 0 3 --> 0 ``` <small>Digest: b225bba95181c290e9ebe547b3d6ea48fbd457a32bbe03482e8ef34b0d4d12aa; Last Updated: 2026-10-25 22:34:54</small>
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#53 Pattern SiO₂
fafo/techtree
#127 Jeri Ellsworth NMOS Transistor
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#55 Tube Furnace
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fafo/techtree#54
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