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Si Thermal Oxidation #54

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opened 2025-05-24 10:23:47 +00:00 by q3k · 1 comment
q3k commented 2025-05-24 10:23:47 +00:00
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The ability to grow SiO₂ on bare Si.

This process is needed to build up insulating features on a die.

The ability to grow SiO₂ on bare Si. This process is needed to build up insulating features on a die.
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forgejo-actions commented 2025-05-24 10:24:03 +00:00
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Partial Techtree

flowchart BT

    classDef eoi fill:#fff, stroke:#000, color:#000;
    classDef dependant fill:#fff, stroke:#888, color:#888;
    classDef dep_missing fill:#fcc, stroke:#800, color:#000;
    classDef dep_assigned fill:#ffa, stroke:#a50, color:#000;
    classDef dep_completed fill:#afa, stroke:#080, color:#000;
    0:::eoi
    0["<a href='https://git.fa-fo.de/fafo/techtree/issues/54' target='_blank'>#54</a> | MISSING\n<i>Process</i>\n<b>Si Thermal Oxidation</b>"]
    1:::dep_assigned
    1["<a href='https://git.fa-fo.de/fafo/techtree/issues/55' target='_blank'>#55</a> | ASSIGNED\n<i>Equipment</i>\n<b>Tube Furnace</b>"]
    2:::dependant
    2["<a href='https://git.fa-fo.de/fafo/techtree/issues/53' target='_blank'>#53</a> | MISSING\n<i>Process</i>\n<b>Pattern SiO₂</b>"]
    0 --> 1
    2 --> 0

Digest: 087911fa9697e19a8caab0ab93a69300283c89db931c7ad967bd02ee47bde450; Last Updated: 2025-08-18 13:14:38

## Partial Techtree ```mermaid flowchart BT classDef eoi fill:#fff, stroke:#000, color:#000; classDef dependant fill:#fff, stroke:#888, color:#888; classDef dep_missing fill:#fcc, stroke:#800, color:#000; classDef dep_assigned fill:#ffa, stroke:#a50, color:#000; classDef dep_completed fill:#afa, stroke:#080, color:#000; 0:::eoi 0["<a href='https://git.fa-fo.de/fafo/techtree/issues/54' target='_blank'>#54</a> | MISSING\n<i>Process</i>\n<b>Si Thermal Oxidation</b>"] 1:::dep_assigned 1["<a href='https://git.fa-fo.de/fafo/techtree/issues/55' target='_blank'>#55</a> | ASSIGNED\n<i>Equipment</i>\n<b>Tube Furnace</b>"] 2:::dependant 2["<a href='https://git.fa-fo.de/fafo/techtree/issues/53' target='_blank'>#53</a> | MISSING\n<i>Process</i>\n<b>Pattern SiO₂</b>"] 0 --> 1 2 --> 0 ``` <small>Digest: 087911fa9697e19a8caab0ab93a69300283c89db931c7ad967bd02ee47bde450; Last Updated: 2025-08-18 13:14:38</small>
q3k added a new dependency 2025-05-24 10:26:17 +00:00
#55 Tube Furnace
q3k added a new dependency 2025-05-24 10:26:45 +00:00
#53 Pattern SiO₂
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