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Pattern Al #58

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opened 2025-05-24 10:30:27 +00:00 by q3k · 1 comment
q3k commented 2025-05-24 10:30:27 +00:00
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Microfabrication process to build Aluminium features, eg. contacts/vias or metal interconnect layers.

The industry-standard process to do this works like this:

  1. A thin film of aluminum is deposited onto the surface (#57)
  2. A pattern of photoresist is lithographically added on top (#62)
  3. The pattern is etched out of the aluminum (#59)

There may be an alternative path to take, by using a Scanning Tunneling Microscope: #71

Microfabrication process to build Aluminium features, eg. contacts/vias or metal interconnect layers. The industry-standard process to do this works like this: 1. A thin film of aluminum is deposited onto the surface (#57) 2. A pattern of photoresist is lithographically added on top (#62) 3. The pattern is etched out of the aluminum (#59) There may be an alternative path to take, by using a Scanning Tunneling Microscope: #71
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q3k added a new dependency 2025-05-24 10:30:41 +00:00
#50 E-beam Lithography
forgejo-actions commented 2025-05-24 10:30:41 +00:00
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Partial Techtree

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    0["<a href='https://git.fa-fo.de/fafo/techtree/issues/58' target='_blank'>#58</a> | MISSING\n<i>Process</i>\n<b>Pattern Al</b>"]
    1:::dep_missing
    1["<a href='https://git.fa-fo.de/fafo/techtree/issues/71' target='_blank'>#71</a> | MISSING\n<i>Research</i>\n<b>STM Metal Pattern Deposition</b>"]
    2:::dep_assigned
    2["<a href='https://git.fa-fo.de/fafo/techtree/issues/43' target='_blank'>#43</a> | ASSIGNED\n<i>Development</i>\n<b>Scanning Tunneling Microscope (STM)</b>"]
    3:::dep_completed
    3["<a href='https://git.fa-fo.de/fafo/techtree/issues/42' target='_blank'>#42</a> | COMPLETED\n<i>Development</i>\n<b>STM Vibration Isolation</b>"]
    4:::dep_missing
    4["<a href='https://git.fa-fo.de/fafo/techtree/issues/62' target='_blank'>#62</a> | MISSING\n<i>Process</i>\n<b>Lithography</b>"]
    5:::dep_missing
    5["<a href='https://git.fa-fo.de/fafo/techtree/issues/70' target='_blank'>#70</a> | MISSING\n<i>Research</i>\n<b>STM Lithography</b>"]
    6:::dep_missing
    6["<a href='https://git.fa-fo.de/fafo/techtree/issues/49' target='_blank'>#49</a> | MISSING\n<i>Development</i>\n<b>Spin Coater</b>"]
    7:::dep_missing
    7["<a href='https://git.fa-fo.de/fafo/techtree/issues/51' target='_blank'>#51</a> | MISSING\n<i>Process</i>\n<b>Maskless Photolithography</b>"]
    8:::dep_missing
    8["<a href='https://git.fa-fo.de/fafo/techtree/issues/52' target='_blank'>#52</a> | MISSING\n<i>Development</i>\n<b>Maskless photolithography stepper</b>"]
    9:::dep_missing
    9["<a href='https://git.fa-fo.de/fafo/techtree/issues/50' target='_blank'>#50</a> | MISSING\n<i>Process</i>\n<b>E-beam Lithography</b>"]
    10:::dep_missing
    10["<a href='https://git.fa-fo.de/fafo/techtree/issues/35' target='_blank'>#35</a> | MISSING\n<i>Equipment</i>\n<b>SEM Beam Blanker</b>"]
    11:::dep_completed
    11["<a href='https://git.fa-fo.de/fafo/techtree/issues/28' target='_blank'>#28</a> | COMPLETED\n<i>Equipment</i>\n<b>Scanning Electron Microscope (SEM)</b>"]
    12:::dep_completed
    12["<a href='https://git.fa-fo.de/fafo/techtree/issues/26' target='_blank'>#26</a> | COMPLETED\n<i>Equipment</i>\n<b>Water Cooling</b>"]
    13:::dep_missing
    13["<a href='https://git.fa-fo.de/fafo/techtree/issues/59' target='_blank'>#59</a> | MISSING\n<i>Process</i>\n<b>H₃PO₄/HNO₃/AcOH Etching</b>"]
    14:::dep_assigned
    14["<a href='https://git.fa-fo.de/fafo/techtree/issues/4' target='_blank'>#4</a> | ASSIGNED\n<i>Equipment</i>\n<b>Wet Lab (Chemistry)</b>"]
    15:::dep_assigned
    15["<a href='https://git.fa-fo.de/fafo/techtree/issues/68' target='_blank'>#68</a> | ASSIGNED\n<i>Equipment</i>\n<b>Heating Stirrer</b>"]
    16:::dep_missing
    16["<a href='https://git.fa-fo.de/fafo/techtree/issues/67' target='_blank'>#67</a> | MISSING\n<i>Equipment</i>\n<b>Chemical Storage/Containment</b>"]
    17:::dep_assigned
    17["<a href='https://git.fa-fo.de/fafo/techtree/issues/27' target='_blank'>#27</a> | ASSIGNED\n<i>Equipment</i>\n<b>Technical Ventilation</b>"]
    18:::dep_missing
    18["<a href='https://git.fa-fo.de/fafo/techtree/issues/23' target='_blank'>#23</a> | MISSING\n<i>Equipment</i>\n<b>Fume Hood</b>"]
    19:::dep_missing
    19["<a href='https://git.fa-fo.de/fafo/techtree/issues/22' target='_blank'>#22</a> | MISSING\n<i>Equipment</i>\n<b>Running Water and Sink</b>"]
    20:::dep_missing
    20["<a href='https://git.fa-fo.de/fafo/techtree/issues/57' target='_blank'>#57</a> | MISSING\n<i>Process</i>\n<b>Metal thin film deposition</b>"]
    21:::dep_missing
    21["<a href='https://git.fa-fo.de/fafo/techtree/issues/56' target='_blank'>#56</a> | MISSING\n<i>Process</i>\n<b>PVD: Thermal Evaporation</b>"]
    22:::dep_missing
    22["<a href='https://git.fa-fo.de/fafo/techtree/issues/37' target='_blank'>#37</a> | MISSING\n<i>Process</i>\n<b>PVD: Sputtering</b>"]
    23:::dependant
    23["<a href='https://git.fa-fo.de/fafo/techtree/issues/61' target='_blank'>#61</a> | MISSING\n<i>Process</i>\n<b>Zeloof Z1 process</b>"]
    1 --> 2
    5 --> 2
    5 --> 6
    16 --> 17
    4 --> 9
    4 --> 7
    4 --> 5
    13 --> 14
    0 --> 20
    0 --> 13
    0 --> 4
    0 --> 1
    20 --> 22
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    23 --> 0

Digest: bf7e9ca1671f9b737afd8fbef756a283f0ee3c1d97827e3f749aac70d68b7c48; Last Updated: 2025-06-15 21:48:34

## Partial Techtree ```mermaid flowchart BT classDef eoi fill:#fff, stroke:#000, color:#000; classDef dependant fill:#fff, stroke:#888, color:#888; classDef dep_missing fill:#fcc, stroke:#800, color:#000; classDef dep_assigned fill:#ffa, stroke:#a50, color:#000; classDef dep_completed fill:#afa, stroke:#080, color:#000; 0:::eoi 0["<a href='https://git.fa-fo.de/fafo/techtree/issues/58' target='_blank'>#58</a> | MISSING\n<i>Process</i>\n<b>Pattern Al</b>"] 1:::dep_missing 1["<a href='https://git.fa-fo.de/fafo/techtree/issues/71' target='_blank'>#71</a> | MISSING\n<i>Research</i>\n<b>STM Metal Pattern Deposition</b>"] 2:::dep_assigned 2["<a href='https://git.fa-fo.de/fafo/techtree/issues/43' target='_blank'>#43</a> | ASSIGNED\n<i>Development</i>\n<b>Scanning Tunneling Microscope (STM)</b>"] 3:::dep_completed 3["<a href='https://git.fa-fo.de/fafo/techtree/issues/42' target='_blank'>#42</a> | COMPLETED\n<i>Development</i>\n<b>STM Vibration Isolation</b>"] 4:::dep_missing 4["<a href='https://git.fa-fo.de/fafo/techtree/issues/62' target='_blank'>#62</a> | MISSING\n<i>Process</i>\n<b>Lithography</b>"] 5:::dep_missing 5["<a href='https://git.fa-fo.de/fafo/techtree/issues/70' target='_blank'>#70</a> | MISSING\n<i>Research</i>\n<b>STM Lithography</b>"] 6:::dep_missing 6["<a href='https://git.fa-fo.de/fafo/techtree/issues/49' target='_blank'>#49</a> | MISSING\n<i>Development</i>\n<b>Spin Coater</b>"] 7:::dep_missing 7["<a href='https://git.fa-fo.de/fafo/techtree/issues/51' target='_blank'>#51</a> | MISSING\n<i>Process</i>\n<b>Maskless Photolithography</b>"] 8:::dep_missing 8["<a href='https://git.fa-fo.de/fafo/techtree/issues/52' target='_blank'>#52</a> | MISSING\n<i>Development</i>\n<b>Maskless photolithography stepper</b>"] 9:::dep_missing 9["<a href='https://git.fa-fo.de/fafo/techtree/issues/50' target='_blank'>#50</a> | MISSING\n<i>Process</i>\n<b>E-beam Lithography</b>"] 10:::dep_missing 10["<a href='https://git.fa-fo.de/fafo/techtree/issues/35' target='_blank'>#35</a> | MISSING\n<i>Equipment</i>\n<b>SEM Beam Blanker</b>"] 11:::dep_completed 11["<a href='https://git.fa-fo.de/fafo/techtree/issues/28' target='_blank'>#28</a> | COMPLETED\n<i>Equipment</i>\n<b>Scanning Electron Microscope (SEM)</b>"] 12:::dep_completed 12["<a href='https://git.fa-fo.de/fafo/techtree/issues/26' target='_blank'>#26</a> | COMPLETED\n<i>Equipment</i>\n<b>Water Cooling</b>"] 13:::dep_missing 13["<a href='https://git.fa-fo.de/fafo/techtree/issues/59' target='_blank'>#59</a> | MISSING\n<i>Process</i>\n<b>H₃PO₄/HNO₃/AcOH Etching</b>"] 14:::dep_assigned 14["<a href='https://git.fa-fo.de/fafo/techtree/issues/4' target='_blank'>#4</a> | ASSIGNED\n<i>Equipment</i>\n<b>Wet Lab (Chemistry)</b>"] 15:::dep_assigned 15["<a href='https://git.fa-fo.de/fafo/techtree/issues/68' target='_blank'>#68</a> | ASSIGNED\n<i>Equipment</i>\n<b>Heating Stirrer</b>"] 16:::dep_missing 16["<a href='https://git.fa-fo.de/fafo/techtree/issues/67' target='_blank'>#67</a> | MISSING\n<i>Equipment</i>\n<b>Chemical Storage/Containment</b>"] 17:::dep_assigned 17["<a href='https://git.fa-fo.de/fafo/techtree/issues/27' target='_blank'>#27</a> | ASSIGNED\n<i>Equipment</i>\n<b>Technical Ventilation</b>"] 18:::dep_missing 18["<a href='https://git.fa-fo.de/fafo/techtree/issues/23' target='_blank'>#23</a> | MISSING\n<i>Equipment</i>\n<b>Fume Hood</b>"] 19:::dep_missing 19["<a href='https://git.fa-fo.de/fafo/techtree/issues/22' target='_blank'>#22</a> | MISSING\n<i>Equipment</i>\n<b>Running Water and Sink</b>"] 20:::dep_missing 20["<a href='https://git.fa-fo.de/fafo/techtree/issues/57' target='_blank'>#57</a> | MISSING\n<i>Process</i>\n<b>Metal thin film deposition</b>"] 21:::dep_missing 21["<a href='https://git.fa-fo.de/fafo/techtree/issues/56' target='_blank'>#56</a> | MISSING\n<i>Process</i>\n<b>PVD: Thermal Evaporation</b>"] 22:::dep_missing 22["<a href='https://git.fa-fo.de/fafo/techtree/issues/37' target='_blank'>#37</a> | MISSING\n<i>Process</i>\n<b>PVD: Sputtering</b>"] 23:::dependant 23["<a href='https://git.fa-fo.de/fafo/techtree/issues/61' target='_blank'>#61</a> | MISSING\n<i>Process</i>\n<b>Zeloof Z1 process</b>"] 1 --> 2 5 --> 2 5 --> 6 16 --> 17 4 --> 9 4 --> 7 4 --> 5 13 --> 14 0 --> 20 0 --> 13 0 --> 4 0 --> 1 20 --> 22 20 --> 21 7 --> 6 7 --> 8 9 --> 10 9 --> 6 2 --> 3 10 --> 11 11 --> 12 18 --> 17 14 --> 19 14 --> 18 14 --> 17 14 --> 16 14 --> 15 23 --> 0 ``` <small>Digest: bf7e9ca1671f9b737afd8fbef756a283f0ee3c1d97827e3f749aac70d68b7c48; Last Updated: 2025-06-15 21:48:34</small>
q3k added a new dependency 2025-05-24 10:31:04 +00:00
#51 Maskless Photolithography
q3k added a new dependency 2025-05-24 10:35:48 +00:00
#59 H₃PO₄/HNO₃/AcOH Etching
q3k added a new dependency 2025-05-24 10:36:10 +00:00
#57 Metal thin film deposition
q3k added a new dependency 2025-05-24 10:47:14 +00:00
#61 Zeloof Z1 process
rahix added a new dependency 2025-05-25 01:02:28 +00:00
#62 Lithography
rahix removed a dependency 2025-05-25 01:02:40 +00:00
#51 Maskless Photolithography
rahix removed a dependency 2025-05-25 01:02:43 +00:00
#50 E-beam Lithography
rahix added a new dependency 2025-06-02 13:43:47 +00:00
#71 STM Metal Pattern Deposition
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#71 STM Metal Pattern Deposition
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