fafo/techtree
fafo/techtree
15
0
Fork 0
Code Issues 107 Pull requests Projects Activity Actions

Pattern Al #58

New issue
Open
opened 2025-05-24 10:30:27 +00:00 by q3k · 1 comment
q3k commented 2025-05-24 10:30:27 +00:00
Owner
Copy link

Microfabrication process to build Aluminium features, eg. contacts/vias or metal interconnect layers.

The industry-standard process to do this works like this:

  1. A thin film of aluminum is deposited onto the surface (#57)
  2. A pattern of photoresist is lithographically added on top (#62)
  3. The pattern is etched out of the aluminum (#59)

There may be an alternative path to take, by using a Scanning Tunneling Microscope: #71

Microfabrication process to build Aluminium features, eg. contacts/vias or metal interconnect layers. The industry-standard process to do this works like this: 1. A thin film of aluminum is deposited onto the surface (#57) 2. A pattern of photoresist is lithographically added on top (#62) 3. The pattern is etched out of the aluminum (#59) There may be an alternative path to take, by using a Scanning Tunneling Microscope: #71
q3k added the
Type
Process
 label 2025-05-24 10:30:27 +00:00
q3k added a new dependency 2025-05-24 10:30:41 +00:00
#50 E-beam Lithography
forgejo-actions commented 2025-05-24 10:30:41 +00:00
Copy link

Partial Techtree

flowchart BT

    classDef eoi fill:#fff, stroke:#000, color:#000;
    classDef dependant fill:#fff, stroke:#888, color:#888;
    classDef dep_missing fill:#fcc, stroke:#800, color:#000;
    classDef dep_assigned fill:#ffa, stroke:#a50, color:#000;
    classDef dep_completed fill:#afa, stroke:#080, color:#000;
    0:::eoi
    0["#58 | MISSING<br/><i>Process</i><br/><b>Pattern Al</b>"]
    1:::dep_missing
    1["#71 | MISSING<br/><i>Research</i><br/><b>STM Metal Pattern Deposition</b>"]
    2:::dep_assigned
    2["#43 | ASSIGNED<br/><i>Development</i><br/><b>Scanning Tunneling Microscope (STM)</b>"]
    3:::dep_missing
    3["#88 | MISSING<br/><i>Development</i><br/><b>Piezo Slider Actuators</b>"]
    4:::dep_missing
    4["#108 | MISSING<br/><i>Development</i><br/><b>Piezo Driver</b>"]
    5:::dep_missing
    5["#81 | MISSING<br/><i>Process</i><br/><b>Interferometry</b>"]
    6:::dep_assigned
    6["#86 | ASSIGNED<br/><i>Development</i><br/><b>Optomechanical System</b>"]
    7:::dep_completed
    7["#64 | COMPLETED<br/><i>Equipment</i><br/><b>FFF 3D-Printer</b>"]
    8:::dep_missing
    8["#82 | MISSING<br/><i>Equipment</i><br/><b>Coherent Light Source</b>"]
    9:::dep_missing
    9["#87 | MISSING<br/><i>Equipment</i><br/><b>Diode Laser</b>"]
    10:::dep_assigned
    10["#85 | ASSIGNED<br/><i>Development</i><br/><b>Laser Diode Driver/Controller</b>"]
    11:::dep_missing
    11["#84 | MISSING<br/><i>Equipment</i><br/><b>Stabilized Helium-Neon Laser</b>"]
    12:::dep_missing
    12["#83 | MISSING<br/><i>Equipment</i><br/><b>External Cavity Diode Laser (ECDL)</b>"]
    13:::dep_completed
    13["#42 | COMPLETED<br/><i>Development</i><br/><b>STM Vibration Isolation</b>"]
    14:::dep_missing
    14["#62 | MISSING<br/><i>Process</i><br/><b>Lithography</b>"]
    15:::dep_missing
    15["#70 | MISSING<br/><i>Research</i><br/><b>STM Lithography</b>"]
    16:::dep_assigned
    16["#49 | ASSIGNED<br/><i>Development</i><br/><b>Spin Coater</b>"]
    17:::dep_missing
    17["#51 | MISSING<br/><i>Process</i><br/><b>Maskless Photolithography</b>"]
    18:::dep_missing
    18["#52 | MISSING<br/><i>Development</i><br/><b>Maskless photolithography stepper</b>"]
    19:::dep_missing
    19["#50 | MISSING<br/><i>Process</i><br/><b>E-beam Lithography</b>"]
    20:::dep_missing
    20["#35 | MISSING<br/><i>Equipment</i><br/><b>SEM Beam Blanker</b>"]
    21:::dep_completed
    21["#28 | COMPLETED<br/><i>Equipment</i><br/><b>Scanning Electron Microscope (SEM)</b>"]
    22:::dep_completed
    22["#26 | COMPLETED<br/><i>Equipment</i><br/><b>Water Cooling</b>"]
    23:::dep_missing
    23["#59 | MISSING<br/><i>Process</i><br/><b>H₃PO₄/HNO₃/AcOH Etching</b>"]
    24:::dep_assigned
    24["#4 | ASSIGNED<br/><i>Equipment</i><br/><b>Wet Lab (Chemistry)</b>"]
    25:::dep_assigned
    25["#68 | ASSIGNED<br/><i>Equipment</i><br/><b>Heating Stirrer</b>"]
    26:::dep_missing
    26["#67 | MISSING<br/><i>Equipment</i><br/><b>Chemical Storage/Containment</b>"]
    27:::dep_assigned
    27["#27 | ASSIGNED<br/><i>Equipment</i><br/><b>Technical Ventilation</b>"]
    28:::dep_missing
    28["#23 | MISSING<br/><i>Equipment</i><br/><b>Fume Hood</b>"]
    29:::dep_missing
    29["#57 | MISSING<br/><i>Process</i><br/><b>Metal thin film deposition</b>"]
    30:::dep_missing
    30["#56 | MISSING<br/><i>Process</i><br/><b>PVD: Thermal Evaporation</b>"]
    31:::dep_missing
    31["#37 | MISSING<br/><i>Process</i><br/><b>PVD: Sputtering</b>"]
    32:::dep_missing
    32["#79 | MISSING<br/><i>Equipment</i><br/><b>Sputter Coater</b>"]
    33:::dependant
    33["#61 | MISSING<br/><i>Process</i><br/><b>Zeloof Z1 process</b>"]
    3 --> 4
    9 --> 10
    6 --> 7
    12 --> 9
    8 --> 12
    8 --> 11
    8 --> 9
    5 --> 8
    5 --> 6
    1 --> 2
    15 --> 2
    15 --> 16
    26 --> 27
    14 --> 19
    14 --> 17
    14 --> 15
    23 --> 24
    0 --> 29
    0 --> 23
    0 --> 14
    0 --> 1
    29 --> 31
    29 --> 30
    17 --> 16
    17 --> 18
    19 --> 20
    19 --> 16
    2 --> 13
    2 --> 5
    2 --> 3
    31 --> 32
    20 --> 21
    21 --> 22
    28 --> 27
    24 --> 28
    24 --> 27
    24 --> 26
    24 --> 25
    33 --> 0

Digest: 18d1830e27810094828df44508b76c752f40e8a17e9b5005e4bdb7b136e0a4c4; Last Updated: 2025-10-07 04:10:19

## Partial Techtree ```mermaid flowchart BT classDef eoi fill:#fff, stroke:#000, color:#000; classDef dependant fill:#fff, stroke:#888, color:#888; classDef dep_missing fill:#fcc, stroke:#800, color:#000; classDef dep_assigned fill:#ffa, stroke:#a50, color:#000; classDef dep_completed fill:#afa, stroke:#080, color:#000; 0:::eoi 0["#58 | MISSING<br/><i>Process</i><br/><b>Pattern Al</b>"] 1:::dep_missing 1["#71 | MISSING<br/><i>Research</i><br/><b>STM Metal Pattern Deposition</b>"] 2:::dep_assigned 2["#43 | ASSIGNED<br/><i>Development</i><br/><b>Scanning Tunneling Microscope (STM)</b>"] 3:::dep_missing 3["#88 | MISSING<br/><i>Development</i><br/><b>Piezo Slider Actuators</b>"] 4:::dep_missing 4["#108 | MISSING<br/><i>Development</i><br/><b>Piezo Driver</b>"] 5:::dep_missing 5["#81 | MISSING<br/><i>Process</i><br/><b>Interferometry</b>"] 6:::dep_assigned 6["#86 | ASSIGNED<br/><i>Development</i><br/><b>Optomechanical System</b>"] 7:::dep_completed 7["#64 | COMPLETED<br/><i>Equipment</i><br/><b>FFF 3D-Printer</b>"] 8:::dep_missing 8["#82 | MISSING<br/><i>Equipment</i><br/><b>Coherent Light Source</b>"] 9:::dep_missing 9["#87 | MISSING<br/><i>Equipment</i><br/><b>Diode Laser</b>"] 10:::dep_assigned 10["#85 | ASSIGNED<br/><i>Development</i><br/><b>Laser Diode Driver/Controller</b>"] 11:::dep_missing 11["#84 | MISSING<br/><i>Equipment</i><br/><b>Stabilized Helium-Neon Laser</b>"] 12:::dep_missing 12["#83 | MISSING<br/><i>Equipment</i><br/><b>External Cavity Diode Laser (ECDL)</b>"] 13:::dep_completed 13["#42 | COMPLETED<br/><i>Development</i><br/><b>STM Vibration Isolation</b>"] 14:::dep_missing 14["#62 | MISSING<br/><i>Process</i><br/><b>Lithography</b>"] 15:::dep_missing 15["#70 | MISSING<br/><i>Research</i><br/><b>STM Lithography</b>"] 16:::dep_assigned 16["#49 | ASSIGNED<br/><i>Development</i><br/><b>Spin Coater</b>"] 17:::dep_missing 17["#51 | MISSING<br/><i>Process</i><br/><b>Maskless Photolithography</b>"] 18:::dep_missing 18["#52 | MISSING<br/><i>Development</i><br/><b>Maskless photolithography stepper</b>"] 19:::dep_missing 19["#50 | MISSING<br/><i>Process</i><br/><b>E-beam Lithography</b>"] 20:::dep_missing 20["#35 | MISSING<br/><i>Equipment</i><br/><b>SEM Beam Blanker</b>"] 21:::dep_completed 21["#28 | COMPLETED<br/><i>Equipment</i><br/><b>Scanning Electron Microscope (SEM)</b>"] 22:::dep_completed 22["#26 | COMPLETED<br/><i>Equipment</i><br/><b>Water Cooling</b>"] 23:::dep_missing 23["#59 | MISSING<br/><i>Process</i><br/><b>H₃PO₄/HNO₃/AcOH Etching</b>"] 24:::dep_assigned 24["#4 | ASSIGNED<br/><i>Equipment</i><br/><b>Wet Lab (Chemistry)</b>"] 25:::dep_assigned 25["#68 | ASSIGNED<br/><i>Equipment</i><br/><b>Heating Stirrer</b>"] 26:::dep_missing 26["#67 | MISSING<br/><i>Equipment</i><br/><b>Chemical Storage/Containment</b>"] 27:::dep_assigned 27["#27 | ASSIGNED<br/><i>Equipment</i><br/><b>Technical Ventilation</b>"] 28:::dep_missing 28["#23 | MISSING<br/><i>Equipment</i><br/><b>Fume Hood</b>"] 29:::dep_missing 29["#57 | MISSING<br/><i>Process</i><br/><b>Metal thin film deposition</b>"] 30:::dep_missing 30["#56 | MISSING<br/><i>Process</i><br/><b>PVD: Thermal Evaporation</b>"] 31:::dep_missing 31["#37 | MISSING<br/><i>Process</i><br/><b>PVD: Sputtering</b>"] 32:::dep_missing 32["#79 | MISSING<br/><i>Equipment</i><br/><b>Sputter Coater</b>"] 33:::dependant 33["#61 | MISSING<br/><i>Process</i><br/><b>Zeloof Z1 process</b>"] 3 --> 4 9 --> 10 6 --> 7 12 --> 9 8 --> 12 8 --> 11 8 --> 9 5 --> 8 5 --> 6 1 --> 2 15 --> 2 15 --> 16 26 --> 27 14 --> 19 14 --> 17 14 --> 15 23 --> 24 0 --> 29 0 --> 23 0 --> 14 0 --> 1 29 --> 31 29 --> 30 17 --> 16 17 --> 18 19 --> 20 19 --> 16 2 --> 13 2 --> 5 2 --> 3 31 --> 32 20 --> 21 21 --> 22 28 --> 27 24 --> 28 24 --> 27 24 --> 26 24 --> 25 33 --> 0 ``` <small>Digest: 18d1830e27810094828df44508b76c752f40e8a17e9b5005e4bdb7b136e0a4c4; Last Updated: 2025-10-07 04:10:19</small>
q3k added a new dependency 2025-05-24 10:31:04 +00:00
#51 Maskless Photolithography
q3k added a new dependency 2025-05-24 10:35:48 +00:00
#59 H₃PO₄/HNO₃/AcOH Etching
q3k added a new dependency 2025-05-24 10:36:10 +00:00
#57 Metal thin film deposition
q3k added a new dependency 2025-05-24 10:47:14 +00:00
#61 Zeloof Z1 process
rahix added a new dependency 2025-05-25 01:02:28 +00:00
#62 Lithography
rahix removed a dependency 2025-05-25 01:02:40 +00:00
#51 Maskless Photolithography
rahix removed a dependency 2025-05-25 01:02:43 +00:00
#50 E-beam Lithography
rahix added a new dependency 2025-06-02 13:43:47 +00:00
#71 STM Metal Pattern Deposition
Sign in to join this conversation.
No Branch/Tag specified
Branches Tags
main
render
No results found.
Labels
Clear labels   
Completed

This element has been completed but we do not want to close the issue yet!

  
Needs Documentation

Please add more documentation to this tech tree element!

  
Stale

This issue is stale and needs reintegration into the tech tree.

  
Type
Development
A device, software, or other thing we need to develop.

  
Type
Equipment
A piece of machinery that we need to acquire or get running.

  
Type
Process
A process we need to achieve.

  
Type
Research
A topic that we can or must research to unlock future capabilities.

No labels
Completed
Needs Documentation
Stale
Type
Development
Type
Equipment
Type
Process
Type
Research
Milestone
Clear milestone
No items
No milestone
Projects
Clear projects
No items
No project
Assignees
Clear assignees
No assignees
2 participants
Notifications
Due date
The due date is invalid or out of range. Please use the format "yyyy-mm-dd".

No due date set.

Blocks
#61 Zeloof Z1 process
fafo/techtree
Depends on
#57 Metal thin film deposition
fafo/techtree
#59 H₃PO₄/HNO₃/AcOH Etching
fafo/techtree
#62 Lithography
fafo/techtree
#71 STM Metal Pattern Deposition
fafo/techtree
Reference: fafo/techtree#58
No description provided.
Delete branch "%!s()"

Deleting a branch is permanent. Although the deleted branch may continue to exist for a short time before it actually gets removed, it CANNOT be undone in most cases. Continue?