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Pattern Al #58

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opened 2025-05-24 10:30:27 +00:00 by q3k · 1 comment
q3k commented 2025-05-24 10:30:27 +00:00
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Microfabrication process to build Aluminium features, eg. contacts/vias or metal interconnect layers.

The industry-standard process to do this works like this:

  1. A thin film of aluminum is deposited onto the surface (#57)
  2. A pattern of photoresist is lithographically added on top (#62)
  3. The pattern is etched out of the aluminum (#59)

There may be an alternative path to take, by using a Scanning Tunneling Microscope: #71

Microfabrication process to build Aluminium features, eg. contacts/vias or metal interconnect layers. The industry-standard process to do this works like this: 1. A thin film of aluminum is deposited onto the surface (#57) 2. A pattern of photoresist is lithographically added on top (#62) 3. The pattern is etched out of the aluminum (#59) There may be an alternative path to take, by using a Scanning Tunneling Microscope: #71
q3k added the
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Process
 label 2025-05-24 10:30:27 +00:00
q3k added a new dependency 2025-05-24 10:30:41 +00:00
#50 E-beam Lithography
forgejo-actions commented 2025-05-24 10:30:41 +00:00
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Partial Techtree

flowchart BT

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    classDef dependant fill:#fff, stroke:#888, color:#888;
    classDef dep_missing fill:#fcc, stroke:#800, color:#000;
    classDef dep_assigned fill:#ffa, stroke:#a50, color:#000;
    classDef dep_completed fill:#afa, stroke:#080, color:#000;
    0:::eoi
    0["#58 | MISSING\n<i>Process</i>\n<b>Pattern Al</b>"]
    1:::dep_missing
    1["#71 | MISSING\n<i>Research</i>\n<b>STM Metal Pattern Deposition</b>"]
    2:::dep_assigned
    2["#43 | ASSIGNED\n<i>Development</i>\n<b>Scanning Tunneling Microscope (STM)</b>"]
    3:::dep_missing
    3["#88 | MISSING\n<i>Development</i>\n<b>Piezo Slider Actuators</b>"]
    4:::dep_missing
    4["#81 | MISSING\n<i>Process</i>\n<b>Interferometry</b>"]
    5:::dep_assigned
    5["#86 | ASSIGNED\n<i>Development</i>\n<b>Optomechanical System</b>"]
    6:::dep_missing
    6["#82 | MISSING\n<i>Equipment</i>\n<b>Coherent Light Source</b>"]
    7:::dep_missing
    7["#87 | MISSING\n<i>Equipment</i>\n<b>Diode Laser</b>"]
    8:::dep_missing
    8["#85 | MISSING\n<i>Development</i>\n<b>Laser Diode Driver/Controller</b>"]
    9:::dep_missing
    9["#84 | MISSING\n<i>Equipment</i>\n<b>Stabilized Helium-Neon Laser</b>"]
    10:::dep_missing
    10["#83 | MISSING\n<i>Equipment</i>\n<b>External Cavity Diode Laser (ECDL)</b>"]
    11:::dep_completed
    11["#42 | COMPLETED\n<i>Development</i>\n<b>STM Vibration Isolation</b>"]
    12:::dep_missing
    12["#62 | MISSING\n<i>Process</i>\n<b>Lithography</b>"]
    13:::dep_missing
    13["#70 | MISSING\n<i>Research</i>\n<b>STM Lithography</b>"]
    14:::dep_assigned
    14["#49 | ASSIGNED\n<i>Development</i>\n<b>Spin Coater</b>"]
    15:::dep_missing
    15["#51 | MISSING\n<i>Process</i>\n<b>Maskless Photolithography</b>"]
    16:::dep_missing
    16["#52 | MISSING\n<i>Development</i>\n<b>Maskless photolithography stepper</b>"]
    17:::dep_missing
    17["#50 | MISSING\n<i>Process</i>\n<b>E-beam Lithography</b>"]
    18:::dep_missing
    18["#35 | MISSING\n<i>Equipment</i>\n<b>SEM Beam Blanker</b>"]
    19:::dep_completed
    19["#28 | COMPLETED\n<i>Equipment</i>\n<b>Scanning Electron Microscope (SEM)</b>"]
    20:::dep_completed
    20["#26 | COMPLETED\n<i>Equipment</i>\n<b>Water Cooling</b>"]
    21:::dep_missing
    21["#59 | MISSING\n<i>Process</i>\n<b>H₃PO₄/HNO₃/AcOH Etching</b>"]
    22:::dep_assigned
    22["#4 | ASSIGNED\n<i>Equipment</i>\n<b>Wet Lab (Chemistry)</b>"]
    23:::dep_assigned
    23["#68 | ASSIGNED\n<i>Equipment</i>\n<b>Heating Stirrer</b>"]
    24:::dep_missing
    24["#67 | MISSING\n<i>Equipment</i>\n<b>Chemical Storage/Containment</b>"]
    25:::dep_assigned
    25["#27 | ASSIGNED\n<i>Equipment</i>\n<b>Technical Ventilation</b>"]
    26:::dep_missing
    26["#23 | MISSING\n<i>Equipment</i>\n<b>Fume Hood</b>"]
    27:::dep_missing
    27["#22 | MISSING\n<i>Equipment</i>\n<b>Running Water and Sink</b>"]
    28:::dep_missing
    28["#57 | MISSING\n<i>Process</i>\n<b>Metal thin film deposition</b>"]
    29:::dep_missing
    29["#56 | MISSING\n<i>Process</i>\n<b>PVD: Thermal Evaporation</b>"]
    30:::dep_missing
    30["#37 | MISSING\n<i>Process</i>\n<b>PVD: Sputtering</b>"]
    31:::dep_missing
    31["#79 | MISSING\n<i>Equipment</i>\n<b>Sputter Coater</b>"]
    32:::dependant
    32["#61 | MISSING\n<i>Process</i>\n<b>Zeloof Z1 process</b>"]
    7 --> 8
    10 --> 7
    6 --> 10
    6 --> 9
    6 --> 7
    4 --> 6
    4 --> 5
    1 --> 2
    13 --> 2
    13 --> 14
    24 --> 25
    12 --> 17
    12 --> 15
    12 --> 13
    21 --> 22
    0 --> 28
    0 --> 21
    0 --> 12
    0 --> 1
    28 --> 30
    28 --> 29
    15 --> 14
    15 --> 16
    17 --> 18
    17 --> 14
    2 --> 11
    2 --> 4
    2 --> 3
    30 --> 31
    18 --> 19
    19 --> 20
    26 --> 25
    22 --> 27
    22 --> 26
    22 --> 25
    22 --> 24
    22 --> 23
    32 --> 0

Digest: 256c6f1bab1d353dc49e3a9c75aa4559add0e7ee948784120a45f9091d4fe752; Last Updated: 2025-08-21 21:33:45

## Partial Techtree ```mermaid flowchart BT classDef eoi fill:#fff, stroke:#000, color:#000; classDef dependant fill:#fff, stroke:#888, color:#888; classDef dep_missing fill:#fcc, stroke:#800, color:#000; classDef dep_assigned fill:#ffa, stroke:#a50, color:#000; classDef dep_completed fill:#afa, stroke:#080, color:#000; 0:::eoi 0["#58 | MISSING\n<i>Process</i>\n<b>Pattern Al</b>"] 1:::dep_missing 1["#71 | MISSING\n<i>Research</i>\n<b>STM Metal Pattern Deposition</b>"] 2:::dep_assigned 2["#43 | ASSIGNED\n<i>Development</i>\n<b>Scanning Tunneling Microscope (STM)</b>"] 3:::dep_missing 3["#88 | MISSING\n<i>Development</i>\n<b>Piezo Slider Actuators</b>"] 4:::dep_missing 4["#81 | MISSING\n<i>Process</i>\n<b>Interferometry</b>"] 5:::dep_assigned 5["#86 | ASSIGNED\n<i>Development</i>\n<b>Optomechanical System</b>"] 6:::dep_missing 6["#82 | MISSING\n<i>Equipment</i>\n<b>Coherent Light Source</b>"] 7:::dep_missing 7["#87 | MISSING\n<i>Equipment</i>\n<b>Diode Laser</b>"] 8:::dep_missing 8["#85 | MISSING\n<i>Development</i>\n<b>Laser Diode Driver/Controller</b>"] 9:::dep_missing 9["#84 | MISSING\n<i>Equipment</i>\n<b>Stabilized Helium-Neon Laser</b>"] 10:::dep_missing 10["#83 | MISSING\n<i>Equipment</i>\n<b>External Cavity Diode Laser (ECDL)</b>"] 11:::dep_completed 11["#42 | COMPLETED\n<i>Development</i>\n<b>STM Vibration Isolation</b>"] 12:::dep_missing 12["#62 | MISSING\n<i>Process</i>\n<b>Lithography</b>"] 13:::dep_missing 13["#70 | MISSING\n<i>Research</i>\n<b>STM Lithography</b>"] 14:::dep_assigned 14["#49 | ASSIGNED\n<i>Development</i>\n<b>Spin Coater</b>"] 15:::dep_missing 15["#51 | MISSING\n<i>Process</i>\n<b>Maskless Photolithography</b>"] 16:::dep_missing 16["#52 | MISSING\n<i>Development</i>\n<b>Maskless photolithography stepper</b>"] 17:::dep_missing 17["#50 | MISSING\n<i>Process</i>\n<b>E-beam Lithography</b>"] 18:::dep_missing 18["#35 | MISSING\n<i>Equipment</i>\n<b>SEM Beam Blanker</b>"] 19:::dep_completed 19["#28 | COMPLETED\n<i>Equipment</i>\n<b>Scanning Electron Microscope (SEM)</b>"] 20:::dep_completed 20["#26 | COMPLETED\n<i>Equipment</i>\n<b>Water Cooling</b>"] 21:::dep_missing 21["#59 | MISSING\n<i>Process</i>\n<b>H₃PO₄/HNO₃/AcOH Etching</b>"] 22:::dep_assigned 22["#4 | ASSIGNED\n<i>Equipment</i>\n<b>Wet Lab (Chemistry)</b>"] 23:::dep_assigned 23["#68 | ASSIGNED\n<i>Equipment</i>\n<b>Heating Stirrer</b>"] 24:::dep_missing 24["#67 | MISSING\n<i>Equipment</i>\n<b>Chemical Storage/Containment</b>"] 25:::dep_assigned 25["#27 | ASSIGNED\n<i>Equipment</i>\n<b>Technical Ventilation</b>"] 26:::dep_missing 26["#23 | MISSING\n<i>Equipment</i>\n<b>Fume Hood</b>"] 27:::dep_missing 27["#22 | MISSING\n<i>Equipment</i>\n<b>Running Water and Sink</b>"] 28:::dep_missing 28["#57 | MISSING\n<i>Process</i>\n<b>Metal thin film deposition</b>"] 29:::dep_missing 29["#56 | MISSING\n<i>Process</i>\n<b>PVD: Thermal Evaporation</b>"] 30:::dep_missing 30["#37 | MISSING\n<i>Process</i>\n<b>PVD: Sputtering</b>"] 31:::dep_missing 31["#79 | MISSING\n<i>Equipment</i>\n<b>Sputter Coater</b>"] 32:::dependant 32["#61 | MISSING\n<i>Process</i>\n<b>Zeloof Z1 process</b>"] 7 --> 8 10 --> 7 6 --> 10 6 --> 9 6 --> 7 4 --> 6 4 --> 5 1 --> 2 13 --> 2 13 --> 14 24 --> 25 12 --> 17 12 --> 15 12 --> 13 21 --> 22 0 --> 28 0 --> 21 0 --> 12 0 --> 1 28 --> 30 28 --> 29 15 --> 14 15 --> 16 17 --> 18 17 --> 14 2 --> 11 2 --> 4 2 --> 3 30 --> 31 18 --> 19 19 --> 20 26 --> 25 22 --> 27 22 --> 26 22 --> 25 22 --> 24 22 --> 23 32 --> 0 ``` <small>Digest: 256c6f1bab1d353dc49e3a9c75aa4559add0e7ee948784120a45f9091d4fe752; Last Updated: 2025-08-21 21:33:45</small>
q3k added a new dependency 2025-05-24 10:31:04 +00:00
#51 Maskless Photolithography
q3k added a new dependency 2025-05-24 10:35:48 +00:00
#59 H₃PO₄/HNO₃/AcOH Etching
q3k added a new dependency 2025-05-24 10:36:10 +00:00
#57 Metal thin film deposition
q3k added a new dependency 2025-05-24 10:47:14 +00:00
#61 Zeloof Z1 process
rahix added a new dependency 2025-05-25 01:02:28 +00:00
#62 Lithography
rahix removed a dependency 2025-05-25 01:02:40 +00:00
#51 Maskless Photolithography
rahix removed a dependency 2025-05-25 01:02:43 +00:00
#50 E-beam Lithography
rahix added a new dependency 2025-06-02 13:43:47 +00:00
#71 STM Metal Pattern Deposition
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#61 Zeloof Z1 process
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#57 Metal thin film deposition
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#59 H₃PO₄/HNO₃/AcOH Etching
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#62 Lithography
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#71 STM Metal Pattern Deposition
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Reference: fafo/techtree#58
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