STM Lithography #70

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opened 2025-06-01 21:08:33 +00:00 by rahix · 1 comment

rahix commented

2025-06-01 21:08:33 +00:00

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Apparently it is possible to use an STM for better E-Beam Lithography (#50):

[…], one can also use the STM to tunnel electrons into a layer of electron-beam photoresist on the sample, in order to do lithography. This has the advantage of offering more control of the exposure than traditional electron-beam lithography. (Wikipedia

This process is also more broadly called Scanning Probe Lithography and there are other mechanisms by which it can be performed: Scanning Probe Lithography: State-of-the-Art and Future Perspectives

We should investigate this!

Apparently it is possible to use an STM for better E-Beam Lithography (#50): > […], one can also use the STM to tunnel electrons into a layer of electron-beam photoresist on the sample, in order to do lithography. This has the advantage of offering more control of the exposure than traditional electron-beam lithography. ([Wikipedia](https://en.wikipedia.org/wiki/Scanning_tunneling_microscope#Other_related_techniques) This process is also more broadly called _Scanning Probe Lithography_ and there are other mechanisms by which it can be performed: [Scanning Probe Lithography: State-of-the-Art and Future Perspectives](https://www.mdpi.com/2072-666X/13/2/228) We should investigate this!

rahix added the

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Research

label 2025-06-01 21:08:33 +00:00

forgejo-actions commented

2025-06-01 21:08:40 +00:00

Partial Techtree

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    4["<a href='https://git.fa-fo.de/fafo/techtree/issues/108' target='_blank'>#108</a> | MISSING<br/><i>Development</i><br/><b>Piezo Driver</b>"]
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    5["<a href='https://git.fa-fo.de/fafo/techtree/issues/81' target='_blank'>#81</a> | MISSING<br/><i>Process</i><br/><b>Interferometry</b>"]
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    9["<a href='https://git.fa-fo.de/fafo/techtree/issues/87' target='_blank'>#87</a> | MISSING<br/><i>Equipment</i><br/><b>Diode Laser</b>"]
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    10["<a href='https://git.fa-fo.de/fafo/techtree/issues/85' target='_blank'>#85</a> | ASSIGNED<br/><i>Development</i><br/><b>Laser Diode Driver/Controller</b>"]
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Digest: 56f77a9ec7e9f2d8f730d22c7ff0bfd73d785a9b8855b15cc207cfc15fefc119; Last Updated: 2025-10-07 04:10:19

## Partial Techtree ```mermaid flowchart BT classDef eoi fill:#fff, stroke:#000, color:#000; classDef dependant fill:#fff, stroke:#888, color:#888; classDef dep_missing fill:#fcc, stroke:#800, color:#000; classDef dep_assigned fill:#ffa, stroke:#a50, color:#000; classDef dep_completed fill:#afa, stroke:#080, color:#000; 0:::eoi 0["<a href='https://git.fa-fo.de/fafo/techtree/issues/70' target='_blank'>#70</a> | MISSING Research STM Lithography"] 1:::dep_assigned 1["<a href='https://git.fa-fo.de/fafo/techtree/issues/49' target='_blank'>#49</a> | ASSIGNED Development Spin Coater"] 2:::dep_assigned 2["<a href='https://git.fa-fo.de/fafo/techtree/issues/43' target='_blank'>#43</a> | ASSIGNED Development Scanning Tunneling Microscope (STM)"] 3:::dep_missing 3["<a href='https://git.fa-fo.de/fafo/techtree/issues/88' target='_blank'>#88</a> | MISSING Development Piezo Slider Actuators"] 4:::dep_missing 4["<a href='https://git.fa-fo.de/fafo/techtree/issues/108' target='_blank'>#108</a> | MISSING Development Piezo Driver"] 5:::dep_missing 5["<a href='https://git.fa-fo.de/fafo/techtree/issues/81' target='_blank'>#81</a> | MISSING Process Interferometry"] 6:::dep_assigned 6["<a href='https://git.fa-fo.de/fafo/techtree/issues/86' target='_blank'>#86</a> | ASSIGNED Development Optomechanical System"] 7:::dep_completed 7["<a href='https://git.fa-fo.de/fafo/techtree/issues/64' target='_blank'>#64</a> | COMPLETED Equipment FFF 3D-Printer"] 8:::dep_missing 8["<a href='https://git.fa-fo.de/fafo/techtree/issues/82' target='_blank'>#82</a> | MISSING Equipment Coherent Light Source"] 9:::dep_missing 9["<a href='https://git.fa-fo.de/fafo/techtree/issues/87' target='_blank'>#87</a> | MISSING Equipment Diode Laser"] 10:::dep_assigned 10["<a href='https://git.fa-fo.de/fafo/techtree/issues/85' target='_blank'>#85</a> | ASSIGNED Development Laser Diode Driver/Controller"] 11:::dep_missing 11["<a href='https://git.fa-fo.de/fafo/techtree/issues/84' target='_blank'>#84</a> | MISSING Equipment Stabilized Helium-Neon Laser"] 12:::dep_missing 12["<a href='https://git.fa-fo.de/fafo/techtree/issues/83' target='_blank'>#83</a> | MISSING Equipment External Cavity Diode Laser (ECDL)"] 13:::dep_completed 13["<a href='https://git.fa-fo.de/fafo/techtree/issues/42' target='_blank'>#42</a> | COMPLETED Development STM Vibration Isolation"] 14:::dependant 14["<a href='https://git.fa-fo.de/fafo/techtree/issues/62' target='_blank'>#62</a> | MISSING Process Lithography"] 3 --> 4 9 --> 10 6 --> 7 12 --> 9 8 --> 12 8 --> 11 8 --> 9 5 --> 8 5 --> 6 0 --> 2 0 --> 1 2 --> 13 2 --> 5 2 --> 3 14 --> 0 ``` Digest: 56f77a9ec7e9f2d8f730d22c7ff0bfd73d785a9b8855b15cc207cfc15fefc119; Last Updated: 2025-10-07 04:10:19

rahix added a new dependency 2025-06-01 21:08:50 +00:00

#43 Scanning Tunneling Microscope (STM)

rahix added a new dependency 2025-06-01 21:09:03 +00:00

#62 Lithography

rahix added a new dependency 2025-06-01 21:31:26 +00:00

#49 Spin Coater