STM Lithography #70

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opened 2025-06-01 21:08:33 +00:00 by rahix · 1 comment

rahix commented

2025-06-01 21:08:33 +00:00

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Apparently it is possible to use an STM for better E-Beam Lithography (#50):

[…], one can also use the STM to tunnel electrons into a layer of electron-beam photoresist on the sample, in order to do lithography. This has the advantage of offering more control of the exposure than traditional electron-beam lithography. (Wikipedia

This process is also more broadly called Scanning Probe Lithography and there are other mechanisms by which it can be performed: Scanning Probe Lithography: State-of-the-Art and Future Perspectives

We should investigate this!

Apparently it is possible to use an STM for better E-Beam Lithography (#50): > […], one can also use the STM to tunnel electrons into a layer of electron-beam photoresist on the sample, in order to do lithography. This has the advantage of offering more control of the exposure than traditional electron-beam lithography. ([Wikipedia](https://en.wikipedia.org/wiki/Scanning_tunneling_microscope#Other_related_techniques) This process is also more broadly called _Scanning Probe Lithography_ and there are other mechanisms by which it can be performed: [Scanning Probe Lithography: State-of-the-Art and Future Perspectives](https://www.mdpi.com/2072-666X/13/2/228) We should investigate this!

rahix added the

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Research

label 2025-06-01 21:08:33 +00:00

forgejo-actions commented

2025-06-01 21:08:40 +00:00

Partial Techtree

flowchart BT

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    1["<a href='https://git.fa-fo.de/fafo/techtree/issues/49' target='_blank'>#49</a> | MISSING\n<i>Development</i>\n<b>Spin Coater</b>"]
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    3["<a href='https://git.fa-fo.de/fafo/techtree/issues/42' target='_blank'>#42</a> | COMPLETED\n<i>Development</i>\n<b>STM Vibration Isolation</b>"]
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    4["<a href='https://git.fa-fo.de/fafo/techtree/issues/62' target='_blank'>#62</a> | MISSING\n<i>Process</i>\n<b>Lithography</b>"]
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Digest: 4320f9b44bd455e33a94f2188444521eb3401c8ac6207283461df1bf5eaf826b; Last Updated: 2025-06-15 21:48:34

## Partial Techtree ```mermaid flowchart BT classDef eoi fill:#fff, stroke:#000, color:#000; classDef dependant fill:#fff, stroke:#888, color:#888; classDef dep_missing fill:#fcc, stroke:#800, color:#000; classDef dep_assigned fill:#ffa, stroke:#a50, color:#000; classDef dep_completed fill:#afa, stroke:#080, color:#000; 0:::eoi 0["<a href='https://git.fa-fo.de/fafo/techtree/issues/70' target='_blank'>#70</a> | MISSING\nResearch\nSTM Lithography"] 1:::dep_missing 1["<a href='https://git.fa-fo.de/fafo/techtree/issues/49' target='_blank'>#49</a> | MISSING\nDevelopment\nSpin Coater"] 2:::dep_assigned 2["<a href='https://git.fa-fo.de/fafo/techtree/issues/43' target='_blank'>#43</a> | ASSIGNED\nDevelopment\nScanning Tunneling Microscope (STM)"] 3:::dep_completed 3["<a href='https://git.fa-fo.de/fafo/techtree/issues/42' target='_blank'>#42</a> | COMPLETED\nDevelopment\nSTM Vibration Isolation"] 4:::dependant 4["<a href='https://git.fa-fo.de/fafo/techtree/issues/62' target='_blank'>#62</a> | MISSING\nProcess\nLithography"] 0 --> 2 0 --> 1 2 --> 3 4 --> 0 ``` Digest: 4320f9b44bd455e33a94f2188444521eb3401c8ac6207283461df1bf5eaf826b; Last Updated: 2025-06-15 21:48:34

rahix added a new dependency 2025-06-01 21:08:50 +00:00

#43 Scanning Tunneling Microscope (STM)

rahix added a new dependency 2025-06-01 21:09:03 +00:00

#62 Lithography

rahix added a new dependency 2025-06-01 21:31:26 +00:00

#49 Spin Coater