STM Lithography #70

New issue

Open

opened 2025-06-01 21:08:33 +00:00 by rahix · 1 comment

rahix commented

2025-06-01 21:08:33 +00:00

Owner

Apparently it is possible to use an STM for better E-Beam Lithography (#50):

[…], one can also use the STM to tunnel electrons into a layer of electron-beam photoresist on the sample, in order to do lithography. This has the advantage of offering more control of the exposure than traditional electron-beam lithography. (Wikipedia

This process is also more broadly called Scanning Probe Lithography and there are other mechanisms by which it can be performed: Scanning Probe Lithography: State-of-the-Art and Future Perspectives

We should investigate this!

Apparently it is possible to use an STM for better E-Beam Lithography (#50): > […], one can also use the STM to tunnel electrons into a layer of electron-beam photoresist on the sample, in order to do lithography. This has the advantage of offering more control of the exposure than traditional electron-beam lithography. ([Wikipedia](https://en.wikipedia.org/wiki/Scanning_tunneling_microscope#Other_related_techniques) This process is also more broadly called _Scanning Probe Lithography_ and there are other mechanisms by which it can be performed: [Scanning Probe Lithography: State-of-the-Art and Future Perspectives](https://www.mdpi.com/2072-666X/13/2/228) We should investigate this!

rahix added the

Type

Research

label 2025-06-01 21:08:33 +00:00

forgejo-actions commented

2025-06-01 21:08:40 +00:00

Partial Techtree

flowchart BT

    classDef eoi fill:#fff, stroke:#000, color:#000;
    classDef dependant fill:#fff, stroke:#888, color:#888;
    classDef dep_missing fill:#fcc, stroke:#800, color:#000;
    classDef dep_assigned fill:#ffa, stroke:#a50, color:#000;
    classDef dep_completed fill:#afa, stroke:#080, color:#000;
    0:::eoi
    0["<a href='https://git.fa-fo.de/fafo/techtree/issues/70' target='_blank'>#70</a> | MISSING\n<i>Research</i>\n<b>STM Lithography</b>"]
    1:::dep_missing
    1["<a href='https://git.fa-fo.de/fafo/techtree/issues/49' target='_blank'>#49</a> | MISSING\n<i>Development</i>\n<b>Spin Coater</b>"]
    2:::dep_assigned
    2["<a href='https://git.fa-fo.de/fafo/techtree/issues/43' target='_blank'>#43</a> | ASSIGNED\n<i>Development</i>\n<b>Scanning Tunneling Microscope (STM)</b>"]
    3:::dep_assigned
    3["<a href='https://git.fa-fo.de/fafo/techtree/issues/42' target='_blank'>#42</a> | ASSIGNED\n<i>Development</i>\n<b>STM Vibration Isolation</b>"]
    4:::dependant
    4["<a href='https://git.fa-fo.de/fafo/techtree/issues/62' target='_blank'>#62</a> | MISSING\n<i>Process</i>\n<b>Lithography</b>"]
    0 --> 2
    0 --> 1
    2 --> 3
    4 --> 0

Digest: e2660d5d3d283d1d209f8f342bf8d3f4fbdb4c71a2ccc66fb72930d39212859c; Last Updated: 2025-06-01 21:31:43

## Partial Techtree ```mermaid flowchart BT classDef eoi fill:#fff, stroke:#000, color:#000; classDef dependant fill:#fff, stroke:#888, color:#888; classDef dep_missing fill:#fcc, stroke:#800, color:#000; classDef dep_assigned fill:#ffa, stroke:#a50, color:#000; classDef dep_completed fill:#afa, stroke:#080, color:#000; 0:::eoi 0["<a href='https://git.fa-fo.de/fafo/techtree/issues/70' target='_blank'>#70</a> | MISSING\nResearch\nSTM Lithography"] 1:::dep_missing 1["<a href='https://git.fa-fo.de/fafo/techtree/issues/49' target='_blank'>#49</a> | MISSING\nDevelopment\nSpin Coater"] 2:::dep_assigned 2["<a href='https://git.fa-fo.de/fafo/techtree/issues/43' target='_blank'>#43</a> | ASSIGNED\nDevelopment\nScanning Tunneling Microscope (STM)"] 3:::dep_assigned 3["<a href='https://git.fa-fo.de/fafo/techtree/issues/42' target='_blank'>#42</a> | ASSIGNED\nDevelopment\nSTM Vibration Isolation"] 4:::dependant 4["<a href='https://git.fa-fo.de/fafo/techtree/issues/62' target='_blank'>#62</a> | MISSING\nProcess\nLithography"] 0 --> 2 0 --> 1 2 --> 3 4 --> 0 ``` Digest: e2660d5d3d283d1d209f8f342bf8d3f4fbdb4c71a2ccc66fb72930d39212859c; Last Updated: 2025-06-01 21:31:43

rahix added a new dependency 2025-06-01 21:08:50 +00:00

#43 Scanning Tunneling Microscope (STM)

rahix added a new dependency 2025-06-01 21:09:03 +00:00

#62 Lithography

rahix added a new dependency 2025-06-01 21:31:26 +00:00

#49 Spin Coater