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STM Lithography #70

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opened 2025-06-01 21:08:33 +00:00 by rahix · 1 comment
rahix commented 2025-06-01 21:08:33 +00:00
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Apparently it is possible to use an STM for better E-Beam Lithography (#50):

[…], one can also use the STM to tunnel electrons into a layer of electron-beam photoresist on the sample, in order to do lithography. This has the advantage of offering more control of the exposure than traditional electron-beam lithography. (Wikipedia

This process is also more broadly called Scanning Probe Lithography and there are other mechanisms by which it can be performed: Scanning Probe Lithography: State-of-the-Art and Future Perspectives

We should investigate this!

Apparently it is possible to use an STM for better E-Beam Lithography (#50): > […], one can also use the STM to tunnel electrons into a layer of electron-beam photoresist on the sample, in order to do lithography. This has the advantage of offering more control of the exposure than traditional electron-beam lithography. ([Wikipedia](https://en.wikipedia.org/wiki/Scanning_tunneling_microscope#Other_related_techniques) This process is also more broadly called _Scanning Probe Lithography_ and there are other mechanisms by which it can be performed: [Scanning Probe Lithography: State-of-the-Art and Future Perspectives](https://www.mdpi.com/2072-666X/13/2/228) We should investigate this!
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forgejo-actions commented 2025-06-01 21:08:40 +00:00
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Partial Techtree

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    1["<a href='https://git.fa-fo.de/fafo/techtree/issues/49' target='_blank'>#49</a> | ASSIGNED\n<i>Development</i>\n<b>Spin Coater</b>"]
    2:::dep_assigned
    2["<a href='https://git.fa-fo.de/fafo/techtree/issues/43' target='_blank'>#43</a> | ASSIGNED\n<i>Development</i>\n<b>Scanning Tunneling Microscope (STM)</b>"]
    3:::dep_missing
    3["<a href='https://git.fa-fo.de/fafo/techtree/issues/88' target='_blank'>#88</a> | MISSING\n<i>Development</i>\n<b>Piezo Slider Actuators</b>"]
    4:::dep_missing
    4["<a href='https://git.fa-fo.de/fafo/techtree/issues/81' target='_blank'>#81</a> | MISSING\n<i>Process</i>\n<b>Interferometry</b>"]
    5:::dep_assigned
    5["<a href='https://git.fa-fo.de/fafo/techtree/issues/86' target='_blank'>#86</a> | ASSIGNED\n<i>Development</i>\n<b>Optomechanical System</b>"]
    6:::dep_missing
    6["<a href='https://git.fa-fo.de/fafo/techtree/issues/82' target='_blank'>#82</a> | MISSING\n<i>Equipment</i>\n<b>Coherent Light Source</b>"]
    7:::dep_missing
    7["<a href='https://git.fa-fo.de/fafo/techtree/issues/87' target='_blank'>#87</a> | MISSING\n<i>Equipment</i>\n<b>Diode Laser</b>"]
    8:::dep_missing
    8["<a href='https://git.fa-fo.de/fafo/techtree/issues/85' target='_blank'>#85</a> | MISSING\n<i>Development</i>\n<b>Laser Diode Driver/Controller</b>"]
    9:::dep_missing
    9["<a href='https://git.fa-fo.de/fafo/techtree/issues/84' target='_blank'>#84</a> | MISSING\n<i>Equipment</i>\n<b>Stabilized Helium-Neon Laser</b>"]
    10:::dep_missing
    10["<a href='https://git.fa-fo.de/fafo/techtree/issues/83' target='_blank'>#83</a> | MISSING\n<i>Equipment</i>\n<b>External Cavity Diode Laser (ECDL)</b>"]
    11:::dep_completed
    11["<a href='https://git.fa-fo.de/fafo/techtree/issues/42' target='_blank'>#42</a> | COMPLETED\n<i>Development</i>\n<b>STM Vibration Isolation</b>"]
    12:::dependant
    12["<a href='https://git.fa-fo.de/fafo/techtree/issues/62' target='_blank'>#62</a> | MISSING\n<i>Process</i>\n<b>Lithography</b>"]
    7 --> 8
    10 --> 7
    6 --> 10
    6 --> 9
    6 --> 7
    4 --> 6
    4 --> 5
    0 --> 2
    0 --> 1
    2 --> 11
    2 --> 4
    2 --> 3
    12 --> 0

Digest: dca72581f1891384631d687ccd515c42d70309a1f69835342de3538a3faa66c9; Last Updated: 2025-08-21 21:33:45

## Partial Techtree ```mermaid flowchart BT classDef eoi fill:#fff, stroke:#000, color:#000; classDef dependant fill:#fff, stroke:#888, color:#888; classDef dep_missing fill:#fcc, stroke:#800, color:#000; classDef dep_assigned fill:#ffa, stroke:#a50, color:#000; classDef dep_completed fill:#afa, stroke:#080, color:#000; 0:::eoi 0["<a href='https://git.fa-fo.de/fafo/techtree/issues/70' target='_blank'>#70</a> | MISSING\n<i>Research</i>\n<b>STM Lithography</b>"] 1:::dep_assigned 1["<a href='https://git.fa-fo.de/fafo/techtree/issues/49' target='_blank'>#49</a> | ASSIGNED\n<i>Development</i>\n<b>Spin Coater</b>"] 2:::dep_assigned 2["<a href='https://git.fa-fo.de/fafo/techtree/issues/43' target='_blank'>#43</a> | ASSIGNED\n<i>Development</i>\n<b>Scanning Tunneling Microscope (STM)</b>"] 3:::dep_missing 3["<a href='https://git.fa-fo.de/fafo/techtree/issues/88' target='_blank'>#88</a> | MISSING\n<i>Development</i>\n<b>Piezo Slider Actuators</b>"] 4:::dep_missing 4["<a href='https://git.fa-fo.de/fafo/techtree/issues/81' target='_blank'>#81</a> | MISSING\n<i>Process</i>\n<b>Interferometry</b>"] 5:::dep_assigned 5["<a href='https://git.fa-fo.de/fafo/techtree/issues/86' target='_blank'>#86</a> | ASSIGNED\n<i>Development</i>\n<b>Optomechanical System</b>"] 6:::dep_missing 6["<a href='https://git.fa-fo.de/fafo/techtree/issues/82' target='_blank'>#82</a> | MISSING\n<i>Equipment</i>\n<b>Coherent Light Source</b>"] 7:::dep_missing 7["<a href='https://git.fa-fo.de/fafo/techtree/issues/87' target='_blank'>#87</a> | MISSING\n<i>Equipment</i>\n<b>Diode Laser</b>"] 8:::dep_missing 8["<a href='https://git.fa-fo.de/fafo/techtree/issues/85' target='_blank'>#85</a> | MISSING\n<i>Development</i>\n<b>Laser Diode Driver/Controller</b>"] 9:::dep_missing 9["<a href='https://git.fa-fo.de/fafo/techtree/issues/84' target='_blank'>#84</a> | MISSING\n<i>Equipment</i>\n<b>Stabilized Helium-Neon Laser</b>"] 10:::dep_missing 10["<a href='https://git.fa-fo.de/fafo/techtree/issues/83' target='_blank'>#83</a> | MISSING\n<i>Equipment</i>\n<b>External Cavity Diode Laser (ECDL)</b>"] 11:::dep_completed 11["<a href='https://git.fa-fo.de/fafo/techtree/issues/42' target='_blank'>#42</a> | COMPLETED\n<i>Development</i>\n<b>STM Vibration Isolation</b>"] 12:::dependant 12["<a href='https://git.fa-fo.de/fafo/techtree/issues/62' target='_blank'>#62</a> | MISSING\n<i>Process</i>\n<b>Lithography</b>"] 7 --> 8 10 --> 7 6 --> 10 6 --> 9 6 --> 7 4 --> 6 4 --> 5 0 --> 2 0 --> 1 2 --> 11 2 --> 4 2 --> 3 12 --> 0 ``` <small>Digest: dca72581f1891384631d687ccd515c42d70309a1f69835342de3538a3faa66c9; Last Updated: 2025-08-21 21:33:45</small>
rahix added a new dependency 2025-06-01 21:08:50 +00:00
#43 Scanning Tunneling Microscope (STM)
rahix added a new dependency 2025-06-01 21:09:03 +00:00
#62 Lithography
rahix added a new dependency 2025-06-01 21:31:26 +00:00
#49 Spin Coater
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#43 Scanning Tunneling Microscope (STM)
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#49 Spin Coater
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Reference: fafo/techtree#70
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