Spin Coater #49

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opened 2025-05-24 09:58:22 +00:00 by q3k · 1 comment

q3k commented

2025-05-24 09:58:22 +00:00

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A machine that deposits a thin film of liquid onto a surface (Spin Coating — Wikipedia). For us, a primary usecases is depositing photoresists on wafers.

It should not be too hard to DIY a decent spin coater. There are plenty of existing projects to draw inspiration from:

Wishlist

Controlled temperature
Vacuum sample holder
Fully enclosed during operation
Recipe system (predefined rpm & duration settings for achieving reproducible results)
TODO: What layer thickness do we want to achieve?
TODO: What max RPM should the machine support?
TODO: What size of sample should fit?
- Full wafers
- Microscope slides

A machine that deposits a thin film of liquid onto a surface ([Spin Coating — Wikipedia](https://en.wikipedia.org/wiki/Spin_coating)). For us, a primary usecases is depositing photoresists on wafers. <a title="Alison Chaiken, CC BY-SA 3.0 <http://creativecommons.org/licenses/by-sa/3.0/>, via Wikimedia Commons" href="https://commons.wikimedia.org/wiki/File:Spinner.jpg"><img width="256" alt="Spinner" src="https://upload.wikimedia.org/wikipedia/commons/thumb/a/ad/Spinner.jpg/256px-Spinner.jpg?20141129161955"></a> It should not be too hard to DIY a decent spin coater. There are plenty of existing projects to draw inspiration from: - [Jeroen Delcour](https://hackaday.com/2023/07/26/hackaday-prize-2023-homebrew-spin-coater-makes-micrometer-thin-layers/) - [Birdbrain](https://www.printables.com/model/658943-diy-spin-coater) ## Wishlist - Controlled temperature - Vacuum sample holder - Fully enclosed during operation - Recipe system (predefined rpm & duration settings for achieving reproducible results) - TODO: What layer thickness do we want to achieve? - TODO: What max RPM should the machine support? - TODO: What size of sample should fit? * Full wafers * Microscope slides

q3k added the

Type

Process

label 2025-05-24 09:58:22 +00:00

forgejo-actions commented

2025-05-24 09:58:29 +00:00

Partial Techtree

flowchart BT

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    1:::dependant
    1["<a href='https://git.fa-fo.de/fafo/techtree/issues/50' target='_blank'>#50</a> | MISSING\n<i>Process</i>\n<b>E-beam Lithography</b>"]
    2:::dependant
    2["<a href='https://git.fa-fo.de/fafo/techtree/issues/51' target='_blank'>#51</a> | MISSING\n<i>Process</i>\n<b>Maskless Photolithography</b>"]
    3:::dependant
    3["<a href='https://git.fa-fo.de/fafo/techtree/issues/60' target='_blank'>#60</a> | MISSING\n<i>Process</i>\n<b>Thermal diffusion doping</b>"]
    4:::dependant
    4["<a href='https://git.fa-fo.de/fafo/techtree/issues/70' target='_blank'>#70</a> | MISSING\n<i>Research</i>\n<b>STM Lithography</b>"]
    1 --> 0
    2 --> 0
    3 --> 0
    4 --> 0

Digest: 9ff1ef2293c1ee6019c76692e6b8040376e7becee5198c4cd442ff0288cf0fdc; Last Updated: 2025-08-10 13:10:54

## Partial Techtree ```mermaid flowchart BT classDef eoi fill:#fff, stroke:#000, color:#000; classDef dependant fill:#fff, stroke:#888, color:#888; classDef dep_missing fill:#fcc, stroke:#800, color:#000; classDef dep_assigned fill:#ffa, stroke:#a50, color:#000; classDef dep_completed fill:#afa, stroke:#080, color:#000; 0:::eoi 0["<a href='https://git.fa-fo.de/fafo/techtree/issues/49' target='_blank'>#49</a> | ASSIGNED\nDevelopment\nSpin Coater"] 1:::dependant 1["<a href='https://git.fa-fo.de/fafo/techtree/issues/50' target='_blank'>#50</a> | MISSING\nProcess\nE-beam Lithography"] 2:::dependant 2["<a href='https://git.fa-fo.de/fafo/techtree/issues/51' target='_blank'>#51</a> | MISSING\nProcess\nMaskless Photolithography"] 3:::dependant 3["<a href='https://git.fa-fo.de/fafo/techtree/issues/60' target='_blank'>#60</a> | MISSING\nProcess\nThermal diffusion doping"] 4:::dependant 4["<a href='https://git.fa-fo.de/fafo/techtree/issues/70' target='_blank'>#70</a> | MISSING\nResearch\nSTM Lithography"] 1 --> 0 2 --> 0 3 --> 0 4 --> 0 ``` Digest: 9ff1ef2293c1ee6019c76692e6b8040376e7becee5198c4cd442ff0288cf0fdc; Last Updated: 2025-08-10 13:10:54

q3k added a new dependency 2025-05-24 10:16:08 +00:00

#50 E-beam Lithography

q3k added a new dependency 2025-05-24 10:17:27 +00:00

#51 Maskless Photolithography