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Spin Coater #49

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opened 2025-05-24 09:58:22 +00:00 by q3k · 2 comments
q3k commented 2025-05-24 09:58:22 +00:00
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A machine that deposits a thin film of liquid onto a surface (Spin Coating — Wikipedia). For us, a primary usecases is depositing photoresists on wafers.

Spinner

It should not be too hard to DIY a decent spin coater. There are plenty of existing projects to draw inspiration from:

Wishlist

  • Controlled temperature
  • Vacuum sample holder
  • Fully enclosed during operation
  • Recipe system (predefined rpm & duration settings for achieving reproducible results)
  • TODO: What layer thickness do we want to achieve?
  • TODO: What max RPM should the machine support?
  • TODO: What size of sample should fit?
    • Full wafers
    • Microscope slides
A machine that deposits a thin film of liquid onto a surface ([Spin Coating — Wikipedia](https://en.wikipedia.org/wiki/Spin_coating)). For us, a primary usecases is depositing photoresists on wafers. <a title="Alison Chaiken, CC BY-SA 3.0 &lt;http://creativecommons.org/licenses/by-sa/3.0/&gt;, via Wikimedia Commons" href="https://commons.wikimedia.org/wiki/File:Spinner.jpg"><img width="256" alt="Spinner" src="https://upload.wikimedia.org/wikipedia/commons/thumb/a/ad/Spinner.jpg/256px-Spinner.jpg?20141129161955"></a> It should not be too hard to DIY a decent spin coater. There are plenty of existing projects to draw inspiration from: - [Jeroen Delcour](https://hackaday.com/2023/07/26/hackaday-prize-2023-homebrew-spin-coater-makes-micrometer-thin-layers/) - [Birdbrain](https://www.printables.com/model/658943-diy-spin-coater) ## Wishlist - Controlled temperature - Vacuum sample holder - Fully enclosed during operation - Recipe system (predefined rpm & duration settings for achieving reproducible results) - TODO: What layer thickness do we want to achieve? - TODO: What max RPM should the machine support? - TODO: What size of sample should fit? * Full wafers * Microscope slides
q3k added the
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Process
 label 2025-05-24 09:58:22 +00:00
forgejo-actions commented 2025-05-24 09:58:29 +00:00
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Partial Techtree

flowchart BT

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    0:::eoi
    0["<a href='https://git.fa-fo.de/fafo/techtree/issues/49' target='_blank'>#49</a> | ASSIGNED<br/><i>Development</i><br/><b>Spin Coater</b>"]
    1:::dependant
    1["<a href='https://git.fa-fo.de/fafo/techtree/issues/50' target='_blank'>#50</a> | MISSING<br/><i>Process</i><br/><b>E-beam Lithography</b>"]
    2:::dependant
    2["<a href='https://git.fa-fo.de/fafo/techtree/issues/51' target='_blank'>#51</a> | MISSING<br/><i>Process</i><br/><b>Maskless Photolithography</b>"]
    3:::dependant
    3["<a href='https://git.fa-fo.de/fafo/techtree/issues/60' target='_blank'>#60</a> | MISSING<br/><i>Process</i><br/><b>Thermal diffusion doping</b>"]
    4:::dependant
    4["<a href='https://git.fa-fo.de/fafo/techtree/issues/70' target='_blank'>#70</a> | MISSING<br/><i>Research</i><br/><b>STM Lithography</b>"]
    5:::dependant
    5["<a href='https://git.fa-fo.de/fafo/techtree/issues/99' target='_blank'>#99</a> | ASSIGNED<br/><i>Process</i><br/><b>Create an LCD Device</b>"]
    1 --> 0
    2 --> 0
    3 --> 0
    4 --> 0
    5 --> 0

Digest: 2bd58beabcc51b22c766cd379f43aa609bf572f04d232927e8783f08a0df6a6f; Last Updated: 2025-10-05 17:01:59

## Partial Techtree ```mermaid flowchart BT classDef eoi fill:#fff, stroke:#000, color:#000; classDef dependant fill:#fff, stroke:#888, color:#888; classDef dep_missing fill:#fcc, stroke:#800, color:#000; classDef dep_assigned fill:#ffa, stroke:#a50, color:#000; classDef dep_completed fill:#afa, stroke:#080, color:#000; 0:::eoi 0["<a href='https://git.fa-fo.de/fafo/techtree/issues/49' target='_blank'>#49</a> | ASSIGNED<br/><i>Development</i><br/><b>Spin Coater</b>"] 1:::dependant 1["<a href='https://git.fa-fo.de/fafo/techtree/issues/50' target='_blank'>#50</a> | MISSING<br/><i>Process</i><br/><b>E-beam Lithography</b>"] 2:::dependant 2["<a href='https://git.fa-fo.de/fafo/techtree/issues/51' target='_blank'>#51</a> | MISSING<br/><i>Process</i><br/><b>Maskless Photolithography</b>"] 3:::dependant 3["<a href='https://git.fa-fo.de/fafo/techtree/issues/60' target='_blank'>#60</a> | MISSING<br/><i>Process</i><br/><b>Thermal diffusion doping</b>"] 4:::dependant 4["<a href='https://git.fa-fo.de/fafo/techtree/issues/70' target='_blank'>#70</a> | MISSING<br/><i>Research</i><br/><b>STM Lithography</b>"] 5:::dependant 5["<a href='https://git.fa-fo.de/fafo/techtree/issues/99' target='_blank'>#99</a> | ASSIGNED<br/><i>Process</i><br/><b>Create an LCD Device</b>"] 1 --> 0 2 --> 0 3 --> 0 4 --> 0 5 --> 0 ``` <small>Digest: 2bd58beabcc51b22c766cd379f43aa609bf572f04d232927e8783f08a0df6a6f; Last Updated: 2025-10-05 17:01:59</small>
q3k added a new dependency 2025-05-24 10:16:08 +00:00
#50 E-beam Lithography
q3k added a new dependency 2025-05-24 10:17:27 +00:00
#51 Maskless Photolithography
rahix changed title from Spin coating to Spin Coater 2025-05-29 09:14:59 +00:00
rahix added
Type
Development
 and removed
Type
Process
 labels 2025-05-29 09:15:04 +00:00
rahix added a new dependency 2025-06-01 21:31:26 +00:00
#70 STM Lithography
rob was assigned by rahix 2025-06-28 10:47:06 +00:00
rahix added a new dependency 2025-08-10 13:10:43 +00:00
#60 Thermal diffusion doping
rahix commented 2025-08-21 12:31:33 +00:00
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One more design reference: https://github.com/klotzsch-lab/Maasi (Apparently this is what HackerFab is using)

One more design reference: https://github.com/klotzsch-lab/Maasi (Apparently this is what HackerFab is using)
jana added a new dependency 2025-10-03 17:02:44 +00:00
#99 Create an LCD Device
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#50 E-beam Lithography
fafo/techtree
#51 Maskless Photolithography
fafo/techtree
#60 Thermal diffusion doping
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#70 STM Lithography
fafo/techtree
#99 Create an LCD Device
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