Jeri Ellsworth NMOS Transistor #127

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opened 2026-10-25 19:02:43 +00:00 by anuejn · 1 comment

anuejn commented

2026-10-25 19:02:43 +00:00

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Reproduce the Jeri Ellsworth NMOS Transistor
Briefly:

Start with a P-oped substrate
Grow an oxide layer
Etch pattern with HF (Jeri does it with a vinyl sticker and not litho and rust-remover for the HF)
Spin-on dope (Jeri uses off-the-shelf phosphosilicate spin-on-dopant, we will probably use some DIY spin-on-dopant -> #128)
Put into furnance for predeposition
etch away the spin-on dopant
grow oxide on source and drain regions
drive dopant into wafer (thermal diffusion?)
Etch away gate oxide
grow a very thin gate oxide again
Etch access to source and drain
make contacts (maybe al patterning for us?)
(this involves connecting the bulk of the wafer to the source of the wafer)

Reproduce the [Jeri Ellsworth NMOS Transistor](https://www.youtube.com/watch?v=w_znRopGtbE) Briefly: 1. Start with a P-oped substrate 2. Grow an oxide layer 3. Etch pattern with HF (Jeri does it with a vinyl sticker and not litho and rust-remover for the HF) 4. Spin-on dope (Jeri uses off-the-shelf phosphosilicate spin-on-dopant, we will probably use some DIY spin-on-dopant -> #128) 5. Put into furnance for predeposition 6. etch away the spin-on dopant 7. grow oxide on source and drain regions 8. drive dopant into wafer (thermal diffusion?) 9. Etch away gate oxide 10. grow a very thin gate oxide again 11. Etch access to source and drain 11. make contacts (maybe al patterning for us?) (this involves connecting the bulk of the wafer to the source of the wafer)

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2026-10-25 19:02:43 +00:00

anuejn added a new dependency

2026-10-25 19:02:54 +00:00

#125 Reproducible Diode

anuejn added a new dependency

2026-10-25 19:05:11 +00:00

#62 Lithography

anuejn added a new dependency

2026-10-25 19:07:26 +00:00

#61 Zeloof Z1 process

anuejn changed title from ~~First Transistor~~ to Jeri Ellsworth NMOS Transistor

2026-10-25 19:13:03 +00:00

anuejn removed a dependency

2026-10-25 19:16:04 +00:00

#62 Lithography

anuejn added a new dependency

2026-10-25 19:16:11 +00:00

#53 Pattern SiO₂

anuejn added a new dependency

2026-10-25 20:10:00 +00:00

#60 Thermal diffusion doping

anuejn removed a dependency

2026-10-25 20:10:16 +00:00

#53 Pattern SiO₂

anuejn removed a dependency

2026-10-25 20:10:44 +00:00

#125 Reproducible Diode

anuejn added a new dependency

2026-10-25 20:11:22 +00:00

#54 Si Thermal Oxidation

forgejo-actions commented

2026-10-25 22:36:16 +00:00

Partial Techtree

flowchart BT

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    0:::eoi
    0["<a href='https://git.fa-fo.de/fafo/techtree/issues/127' target='_blank'>#127</a> | MISSING<br/><i>Process</i><br/><b>Jeri Ellsworth NMOS Transistor</b>"]
    1:::dep_missing
    1["<a href='https://git.fa-fo.de/fafo/techtree/issues/60' target='_blank'>#60</a> | MISSING<br/><i>Process</i><br/><b>Thermal diffusion doping</b>"]
    2:::dep_missing
    2["<a href='https://git.fa-fo.de/fafo/techtree/issues/128' target='_blank'>#128</a> | MISSING<br/><i>Process</i><br/><b>Spin-On Dopant</b>"]
    3:::dep_assigned
    3["<a href='https://git.fa-fo.de/fafo/techtree/issues/4' target='_blank'>#4</a> | ASSIGNED<br/><i>Equipment</i><br/><b>Wet Lab (Chemistry)</b>"]
    4:::dep_assigned
    4["<a href='https://git.fa-fo.de/fafo/techtree/issues/118' target='_blank'>#118</a> | ASSIGNED<br/><i>Development</i><br/><b>Hazard Assessment</b>"]
    5:::dep_completed
    5["<a href='https://git.fa-fo.de/fafo/techtree/issues/68' target='_blank'>#68</a> | COMPLETED<br/><i>Equipment</i><br/><b>Heating Stirrer</b>"]
    6:::dep_assigned
    6["<a href='https://git.fa-fo.de/fafo/techtree/issues/67' target='_blank'>#67</a> | ASSIGNED<br/><i>Equipment</i><br/><b>Chemical Storage/Containment</b>"]
    7:::dep_assigned
    7["<a href='https://git.fa-fo.de/fafo/techtree/issues/27' target='_blank'>#27</a> | ASSIGNED<br/><i>Equipment</i><br/><b>Technical Ventilation</b>"]
    8:::dep_assigned
    8["<a href='https://git.fa-fo.de/fafo/techtree/issues/23' target='_blank'>#23</a> | ASSIGNED<br/><i>Equipment</i><br/><b>Fume Hood</b>"]
    9:::dep_assigned
    9["<a href='https://git.fa-fo.de/fafo/techtree/issues/55' target='_blank'>#55</a> | ASSIGNED<br/><i>Equipment</i><br/><b>Tube Furnace</b>"]
    10:::dep_assigned
    10["<a href='https://git.fa-fo.de/fafo/techtree/issues/49' target='_blank'>#49</a> | ASSIGNED<br/><i>Development</i><br/><b>Spin Coater</b>"]
    11:::dep_missing
    11["<a href='https://git.fa-fo.de/fafo/techtree/issues/54' target='_blank'>#54</a> | MISSING<br/><i>Process</i><br/><b>Si Thermal Oxidation</b>"]
    12:::dependant
    12["<a href='https://git.fa-fo.de/fafo/techtree/issues/61' target='_blank'>#61</a> | MISSING<br/><i>Process</i><br/><b>Zeloof Z1 process</b>"]
    2 --> 3
    0 --> 11
    0 --> 1
    6 --> 7
    6 --> 4
    1 --> 10
    1 --> 9
    1 --> 2
    11 --> 9
    7 --> 4
    8 --> 7
    3 --> 8
    3 --> 7
    3 --> 6
    3 --> 5
    3 --> 4
    12 --> 0

Digest: 1e66d9c8ef8fdcb1ed8162f767af51dbcb5c316537a43fc10852aa22e2a9d844; Last Updated: 2026-10-25 22:34:54

## Partial Techtree ```mermaid flowchart BT classDef eoi fill:#fff, stroke:#000, color:#000; classDef dependant fill:#fff, stroke:#888, color:#888; classDef ultimate fill:#fff, stroke:#000, color:#000; classDef dep_missing fill:#fcc, stroke:#800, color:#000; classDef dep_assigned fill:#ffa, stroke:#a50, color:#000; classDef dep_completed fill:#afa, stroke:#080, color:#000; 0:::eoi 0["<a href='https://git.fa-fo.de/fafo/techtree/issues/127' target='_blank'>#127</a> | MISSING Process Jeri Ellsworth NMOS Transistor"] 1:::dep_missing 1["<a href='https://git.fa-fo.de/fafo/techtree/issues/60' target='_blank'>#60</a> | MISSING Process Thermal diffusion doping"] 2:::dep_missing 2["<a href='https://git.fa-fo.de/fafo/techtree/issues/128' target='_blank'>#128</a> | MISSING Process Spin-On Dopant"] 3:::dep_assigned 3["<a href='https://git.fa-fo.de/fafo/techtree/issues/4' target='_blank'>#4</a> | ASSIGNED Equipment Wet Lab (Chemistry)"] 4:::dep_assigned 4["<a href='https://git.fa-fo.de/fafo/techtree/issues/118' target='_blank'>#118</a> | ASSIGNED Development Hazard Assessment"] 5:::dep_completed 5["<a href='https://git.fa-fo.de/fafo/techtree/issues/68' target='_blank'>#68</a> | COMPLETED Equipment Heating Stirrer"] 6:::dep_assigned 6["<a href='https://git.fa-fo.de/fafo/techtree/issues/67' target='_blank'>#67</a> | ASSIGNED Equipment Chemical Storage/Containment"] 7:::dep_assigned 7["<a href='https://git.fa-fo.de/fafo/techtree/issues/27' target='_blank'>#27</a> | ASSIGNED Equipment Technical Ventilation"] 8:::dep_assigned 8["<a href='https://git.fa-fo.de/fafo/techtree/issues/23' target='_blank'>#23</a> | ASSIGNED Equipment Fume Hood"] 9:::dep_assigned 9["<a href='https://git.fa-fo.de/fafo/techtree/issues/55' target='_blank'>#55</a> | ASSIGNED Equipment Tube Furnace"] 10:::dep_assigned 10["<a href='https://git.fa-fo.de/fafo/techtree/issues/49' target='_blank'>#49</a> | ASSIGNED Development Spin Coater"] 11:::dep_missing 11["<a href='https://git.fa-fo.de/fafo/techtree/issues/54' target='_blank'>#54</a> | MISSING Process Si Thermal Oxidation"] 12:::dependant 12["<a href='https://git.fa-fo.de/fafo/techtree/issues/61' target='_blank'>#61</a> | MISSING Process Zeloof Z1 process"] 2 --> 3 0 --> 11 0 --> 1 6 --> 7 6 --> 4 1 --> 10 1 --> 9 1 --> 2 11 --> 9 7 --> 4 8 --> 7 3 --> 8 3 --> 7 3 --> 6 3 --> 5 3 --> 4 12 --> 0 ``` Digest: 1e66d9c8ef8fdcb1ed8162f767af51dbcb5c316537a43fc10852aa22e2a9d844; Last Updated: 2026-10-25 22:34:54