Thermal diffusion doping #60

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opened 2025-05-24 10:44:29 +00:00 by q3k · 1 comment
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Doping (Wikipedia) is the process of introducing impurities into the pure silicon to alter the electrical characteristics of the semiconductor. Doped silicon is the base material for creating semiconductor junctions.


In particular, we are looking to perform doping with the ability to dope Si with eg. B, P via thermal diffusion.

We probably want to dope with some kind of spin-on dopant that forms a glass layer out of which the dopant diffuses into the Si.
(see #128)

Doping ([Wikipedia](https://en.wikipedia.org/wiki/Doping_(semiconductor))) is the process of introducing impurities into the pure silicon to alter the electrical characteristics of the semiconductor. Doped silicon is the base material for creating semiconductor junctions. --- In particular, we are looking to perform doping with the ability to dope Si with eg. B, P via thermal diffusion. We probably want to dope with some kind of spin-on dopant that forms a glass layer out of which the dopant diffuses into the Si. (see #128)

Partial Techtree

flowchart BT

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    0:::eoi
    0["<a href='https://git.fa-fo.de/fafo/techtree/issues/60' target='_blank'>#60</a> | MISSING<br/><i>Process</i><br/><b>Thermal diffusion doping</b>"]
    1:::dep_missing
    1["<a href='https://git.fa-fo.de/fafo/techtree/issues/128' target='_blank'>#128</a> | MISSING<br/><i>Process</i><br/><b>Spin-On Dopant</b>"]
    2:::dep_assigned
    2["<a href='https://git.fa-fo.de/fafo/techtree/issues/4' target='_blank'>#4</a> | ASSIGNED<br/><i>Equipment</i><br/><b>Wet Lab (Chemistry)</b>"]
    3:::dep_assigned
    3["<a href='https://git.fa-fo.de/fafo/techtree/issues/118' target='_blank'>#118</a> | ASSIGNED<br/><i>Development</i><br/><b>Hazard Assessment</b>"]
    4:::dep_completed
    4["<a href='https://git.fa-fo.de/fafo/techtree/issues/68' target='_blank'>#68</a> | COMPLETED<br/><i>Equipment</i><br/><b>Heating Stirrer</b>"]
    5:::dep_assigned
    5["<a href='https://git.fa-fo.de/fafo/techtree/issues/67' target='_blank'>#67</a> | ASSIGNED<br/><i>Equipment</i><br/><b>Chemical Storage/Containment</b>"]
    6:::dep_assigned
    6["<a href='https://git.fa-fo.de/fafo/techtree/issues/27' target='_blank'>#27</a> | ASSIGNED<br/><i>Equipment</i><br/><b>Technical Ventilation</b>"]
    7:::dep_assigned
    7["<a href='https://git.fa-fo.de/fafo/techtree/issues/23' target='_blank'>#23</a> | ASSIGNED<br/><i>Equipment</i><br/><b>Fume Hood</b>"]
    8:::dep_assigned
    8["<a href='https://git.fa-fo.de/fafo/techtree/issues/55' target='_blank'>#55</a> | ASSIGNED<br/><i>Equipment</i><br/><b>Tube Furnace</b>"]
    9:::dep_assigned
    9["<a href='https://git.fa-fo.de/fafo/techtree/issues/49' target='_blank'>#49</a> | ASSIGNED<br/><i>Development</i><br/><b>Spin Coater</b>"]
    10:::dependant
    10["<a href='https://git.fa-fo.de/fafo/techtree/issues/61' target='_blank'>#61</a> | MISSING<br/><i>Process</i><br/><b>Zeloof Z1 process</b>"]
    11:::dependant
    11["<a href='https://git.fa-fo.de/fafo/techtree/issues/127' target='_blank'>#127</a> | MISSING<br/><i>Process</i><br/><b>Jeri Ellsworth NMOS Transistor</b>"]
    1 --> 2
    5 --> 6
    5 --> 3
    0 --> 9
    0 --> 8
    0 --> 1
    6 --> 3
    7 --> 6
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    2 --> 5
    2 --> 4
    2 --> 3
    10 --> 0
    11 --> 0

Digest: 3ac622e88b6759b330eaffd5caf57f9a03372fc2f5b91008bacd05d099819fec; Last Updated: 2026-10-25 22:34:54

## Partial Techtree ```mermaid flowchart BT classDef eoi fill:#fff, stroke:#000, color:#000; classDef dependant fill:#fff, stroke:#888, color:#888; classDef ultimate fill:#fff, stroke:#000, color:#000; classDef dep_missing fill:#fcc, stroke:#800, color:#000; classDef dep_assigned fill:#ffa, stroke:#a50, color:#000; classDef dep_completed fill:#afa, stroke:#080, color:#000; 0:::eoi 0["<a href='https://git.fa-fo.de/fafo/techtree/issues/60' target='_blank'>#60</a> | MISSING<br/><i>Process</i><br/><b>Thermal diffusion doping</b>"] 1:::dep_missing 1["<a href='https://git.fa-fo.de/fafo/techtree/issues/128' target='_blank'>#128</a> | MISSING<br/><i>Process</i><br/><b>Spin-On Dopant</b>"] 2:::dep_assigned 2["<a href='https://git.fa-fo.de/fafo/techtree/issues/4' target='_blank'>#4</a> | ASSIGNED<br/><i>Equipment</i><br/><b>Wet Lab (Chemistry)</b>"] 3:::dep_assigned 3["<a href='https://git.fa-fo.de/fafo/techtree/issues/118' target='_blank'>#118</a> | ASSIGNED<br/><i>Development</i><br/><b>Hazard Assessment</b>"] 4:::dep_completed 4["<a href='https://git.fa-fo.de/fafo/techtree/issues/68' target='_blank'>#68</a> | COMPLETED<br/><i>Equipment</i><br/><b>Heating Stirrer</b>"] 5:::dep_assigned 5["<a href='https://git.fa-fo.de/fafo/techtree/issues/67' target='_blank'>#67</a> | ASSIGNED<br/><i>Equipment</i><br/><b>Chemical Storage/Containment</b>"] 6:::dep_assigned 6["<a href='https://git.fa-fo.de/fafo/techtree/issues/27' target='_blank'>#27</a> | ASSIGNED<br/><i>Equipment</i><br/><b>Technical Ventilation</b>"] 7:::dep_assigned 7["<a href='https://git.fa-fo.de/fafo/techtree/issues/23' target='_blank'>#23</a> | ASSIGNED<br/><i>Equipment</i><br/><b>Fume Hood</b>"] 8:::dep_assigned 8["<a href='https://git.fa-fo.de/fafo/techtree/issues/55' target='_blank'>#55</a> | ASSIGNED<br/><i>Equipment</i><br/><b>Tube Furnace</b>"] 9:::dep_assigned 9["<a href='https://git.fa-fo.de/fafo/techtree/issues/49' target='_blank'>#49</a> | ASSIGNED<br/><i>Development</i><br/><b>Spin Coater</b>"] 10:::dependant 10["<a href='https://git.fa-fo.de/fafo/techtree/issues/61' target='_blank'>#61</a> | MISSING<br/><i>Process</i><br/><b>Zeloof Z1 process</b>"] 11:::dependant 11["<a href='https://git.fa-fo.de/fafo/techtree/issues/127' target='_blank'>#127</a> | MISSING<br/><i>Process</i><br/><b>Jeri Ellsworth NMOS Transistor</b>"] 1 --> 2 5 --> 6 5 --> 3 0 --> 9 0 --> 8 0 --> 1 6 --> 3 7 --> 6 2 --> 7 2 --> 6 2 --> 5 2 --> 4 2 --> 3 10 --> 0 11 --> 0 ``` <small>Digest: 3ac622e88b6759b330eaffd5caf57f9a03372fc2f5b91008bacd05d099819fec; Last Updated: 2026-10-25 22:34:54</small>
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