Metal thin film deposition #57

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opened 2025-05-24 10:29:12 +00:00 by q3k · 1 comment

q3k commented

2025-05-24 10:29:12 +00:00

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A metal deposition process adds a thin layer of metal on a surface.

There are a wide range of metal deposition processes, but we are mainly looking at physical vapor deposition (PVD, Wikipedia) processes. Of those, two are of particular interest:

#37 — Sputtering (Wikipedia)
#56 — Thermal evaporation of metals (Wikipedia)

There is apparently also an interesting avenue of using an STM (#43) for depositing metals (#71), but immediately adding the pattern rather than requiring a lithography process ontop.

A metal deposition process adds a thin layer of metal on a surface. There are a wide range of metal deposition processes, but we are mainly looking at _physical vapor deposition_ (PVD, [Wikipedia](https://en.wikipedia.org/wiki/Physical_vapor_deposition)) processes. Of those, two are of particular interest: - #37 — Sputtering ([Wikipedia](https://en.wikipedia.org/wiki/Sputter_deposition)) - #56 — Thermal evaporation of metals ([Wikipedia](https://en.wikipedia.org/wiki/Evaporation_(deposition))) There is apparently also an interesting avenue of using an STM (#43) for depositing metals (#71), but immediately adding the pattern rather than requiring a lithography process ontop.

q3k added the

Type

Process

label 2025-05-24 10:29:12 +00:00

q3k added a new dependency 2025-05-24 10:29:18 +00:00

#56 PVD: Thermal Evaporation

q3k added a new dependency 2025-05-24 10:29:22 +00:00

#37 PVD: Sputtering

q3k changed title from ~~PVD: Metal deposition~~ to Metal deposition

2025-05-24 10:29:47 +00:00

forgejo-actions commented

2025-05-24 10:30:03 +00:00

Partial Techtree

flowchart BT

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    0:::eoi
    0["<a href='https://git.fa-fo.de/fafo/techtree/issues/57' target='_blank'>#57</a> | COMPLETED<br/><i>Process</i><br/><b>Metal thin film deposition</b>"]
    1:::dep_assigned
    1["<a href='https://git.fa-fo.de/fafo/techtree/issues/122' target='_blank'>#122</a> | ASSIGNED<br/><i>Process</i><br/><b>E-Beam PVD</b>"]
    2:::dep_completed
    2["<a href='https://git.fa-fo.de/fafo/techtree/issues/123' target='_blank'>#123</a> | COMPLETED<br/><i>Equipment</i><br/><b>E-Beam PVD Coater</b>"]
    3:::dep_completed
    3["<a href='https://git.fa-fo.de/fafo/techtree/issues/56' target='_blank'>#56</a> | COMPLETED<br/><i>Process</i><br/><b>PVD: Thermal Evaporation</b>"]
    4:::dep_completed
    4["<a href='https://git.fa-fo.de/fafo/techtree/issues/121' target='_blank'>#121</a> | COMPLETED<br/><i>Equipment</i><br/><b>Thermal Evaporation Coater</b>"]
    5:::dep_assigned
    5["<a href='https://git.fa-fo.de/fafo/techtree/issues/37' target='_blank'>#37</a> | ASSIGNED<br/><i>Process</i><br/><b>PVD: Sputtering</b>"]
    6:::dep_completed
    6["<a href='https://git.fa-fo.de/fafo/techtree/issues/79' target='_blank'>#79</a> | COMPLETED<br/><i>Equipment</i><br/><b>Sputter Coater</b>"]
    7:::dependant
    7["<a href='https://git.fa-fo.de/fafo/techtree/issues/38' target='_blank'>#38</a> | ASSIGNED<br/><i>Process</i><br/><b>SEM Non-Metallic Imaging</b>"]
    8:::dependant
    8["<a href='https://git.fa-fo.de/fafo/techtree/issues/58' target='_blank'>#58</a> | MISSING<br/><i>Process</i><br/><b>Pattern Al</b>"]
    9:::dependant
    9["<a href='https://git.fa-fo.de/fafo/techtree/issues/72' target='_blank'>#72</a> | MISSING<br/><i>Process</i><br/><b>STM Non-metallic imaging</b>"]
    1 --> 2
    0 --> 5
    0 --> 3
    0 --> 1
    3 --> 4
    5 --> 6
    7 --> 0
    8 --> 0
    9 --> 0

Digest: 4c2449692879c9cd9290edc9409c357fa36d383ad0e85d02cc5c8b23e9f8ca33; Last Updated: 2026-06-05 21:06:53

## Partial Techtree ```mermaid flowchart BT classDef eoi fill:#fff, stroke:#000, color:#000; classDef dependant fill:#fff, stroke:#888, color:#888; classDef ultimate fill:#fff, stroke:#000, color:#000; classDef dep_missing fill:#fcc, stroke:#800, color:#000; classDef dep_assigned fill:#ffa, stroke:#a50, color:#000; classDef dep_completed fill:#afa, stroke:#080, color:#000; 0:::eoi 0["<a href='https://git.fa-fo.de/fafo/techtree/issues/57' target='_blank'>#57</a> | COMPLETED Process Metal thin film deposition"] 1:::dep_assigned 1["<a href='https://git.fa-fo.de/fafo/techtree/issues/122' target='_blank'>#122</a> | ASSIGNED Process E-Beam PVD"] 2:::dep_completed 2["<a href='https://git.fa-fo.de/fafo/techtree/issues/123' target='_blank'>#123</a> | COMPLETED Equipment E-Beam PVD Coater"] 3:::dep_completed 3["<a href='https://git.fa-fo.de/fafo/techtree/issues/56' target='_blank'>#56</a> | COMPLETED Process PVD: Thermal Evaporation"] 4:::dep_completed 4["<a href='https://git.fa-fo.de/fafo/techtree/issues/121' target='_blank'>#121</a> | COMPLETED Equipment Thermal Evaporation Coater"] 5:::dep_assigned 5["<a href='https://git.fa-fo.de/fafo/techtree/issues/37' target='_blank'>#37</a> | ASSIGNED Process PVD: Sputtering"] 6:::dep_completed 6["<a href='https://git.fa-fo.de/fafo/techtree/issues/79' target='_blank'>#79</a> | COMPLETED Equipment Sputter Coater"] 7:::dependant 7["<a href='https://git.fa-fo.de/fafo/techtree/issues/38' target='_blank'>#38</a> | ASSIGNED Process SEM Non-Metallic Imaging"] 8:::dependant 8["<a href='https://git.fa-fo.de/fafo/techtree/issues/58' target='_blank'>#58</a> | MISSING Process Pattern Al"] 9:::dependant 9["<a href='https://git.fa-fo.de/fafo/techtree/issues/72' target='_blank'>#72</a> | MISSING Process STM Non-metallic imaging"] 1 --> 2 0 --> 5 0 --> 3 0 --> 1 3 --> 4 5 --> 6 7 --> 0 8 --> 0 9 --> 0 ``` Digest: 4c2449692879c9cd9290edc9409c357fa36d383ad0e85d02cc5c8b23e9f8ca33; Last Updated: 2026-06-05 21:06:53

q3k added a new dependency 2025-05-24 10:36:10 +00:00

#58 Pattern Al