E-Beam PVD #122

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opened 2026-05-17 14:46:10 +00:00 by rahix · 1 comment

rahix commented

2026-05-17 14:46:10 +00:00

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Electron-beam physical vapor deposition, or EBPVD, is a form of physical vapor deposition in which a target anode is bombarded with an electron beam given off by a charged tungsten filament under high vacuum. The electron beam causes atoms from the target to transform into the gaseous phase. These atoms then precipitate into solid form, coating everything in the vacuum chamber (within line of sight) with a thin layer of the anode material.

— Wikipedia

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Advantages over thermal evap (#56)?
Specific uses?

> Electron-beam physical vapor deposition, or EBPVD, is a form of physical vapor deposition in which a target anode is bombarded with an electron beam given off by a charged tungsten filament under high vacuum. The electron beam causes atoms from the target to transform into the gaseous phase. These atoms then precipitate into solid form, coating everything in the vacuum chamber (within line of sight) with a thin layer of the anode material. > — <a href="https://en.wikipedia.org/wiki/Electron-beam_physical_vapor_deposition">Wikipedia</a> ### TODO - Advantages over thermal evap (#56)? - Specific uses?

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2026-05-17 14:46:10 +00:00

forgejo-actions commented

2026-05-17 14:46:15 +00:00

Partial Techtree

flowchart BT

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    0:::eoi
    0["<a href='https://git.fa-fo.de/fafo/techtree/issues/122' target='_blank'>#122</a> | ASSIGNED<br/><i>Process</i><br/><b>E-Beam PVD</b>"]
    1:::dep_completed
    1["<a href='https://git.fa-fo.de/fafo/techtree/issues/123' target='_blank'>#123</a> | COMPLETED<br/><i>Equipment</i><br/><b>E-Beam PVD Coater</b>"]
    2:::dependant
    2["<a href='https://git.fa-fo.de/fafo/techtree/issues/57' target='_blank'>#57</a> | COMPLETED<br/><i>Process</i><br/><b>Metal thin film deposition</b>"]
    0 --> 1
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Digest: 359feb1cbc77ff9b6ec229460902bccd93bceeca22c56cf9289005364328457c; Last Updated: 2026-06-05 20:54:50

## Partial Techtree ```mermaid flowchart BT classDef eoi fill:#fff, stroke:#000, color:#000; classDef dependant fill:#fff, stroke:#888, color:#888; classDef ultimate fill:#fff, stroke:#000, color:#000; classDef dep_missing fill:#fcc, stroke:#800, color:#000; classDef dep_assigned fill:#ffa, stroke:#a50, color:#000; classDef dep_completed fill:#afa, stroke:#080, color:#000; 0:::eoi 0["<a href='https://git.fa-fo.de/fafo/techtree/issues/122' target='_blank'>#122</a> | ASSIGNED Process E-Beam PVD"] 1:::dep_completed 1["<a href='https://git.fa-fo.de/fafo/techtree/issues/123' target='_blank'>#123</a> | COMPLETED Equipment E-Beam PVD Coater"] 2:::dependant 2["<a href='https://git.fa-fo.de/fafo/techtree/issues/57' target='_blank'>#57</a> | COMPLETED Process Metal thin film deposition"] 0 --> 1 2 --> 0 ``` Digest: 359feb1cbc77ff9b6ec229460902bccd93bceeca22c56cf9289005364328457c; Last Updated: 2026-06-05 20:54:50

rahix added a new dependency

2026-05-17 14:46:36 +00:00

#57 Metal thin film deposition