PVD: Sputtering #37

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opened 2025-05-22 23:40:22 +00:00 by rahix · 1 comment
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We need to be able to perform physical vapor deposition (PVD), more concretely sputtering, for a variety of purposes.

Schematic Overview of a Sputtering Chamber

We need to be able to perform [physical vapor deposition (PVD)](https://en.wikipedia.org/wiki/Physical_vapor_deposition), more concretely [sputtering](https://en.wikipedia.org/wiki/Sputtering), for a variety of purposes. ![Schematic Overview of a Sputtering Chamber](https://upload.wikimedia.org/wikipedia/commons/c/cc/Schema_einer_Sputterkammer.svg)
rahix added the
Type
Process
Needs Documentation
labels 2025-05-22 23:40:22 +00:00

Partial Techtree

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    1:::dependant
    1["<a href='https://git.fa-fo.de/fafo/techtree/issues/57' target='_blank'>#57</a> | MISSING\n<i>Process</i>\n<b>Metal thin film deposition</b>"]
    1 --> 0

Digest: e017423733f233a9e9e868cada6adb41ccb7780abf4449cdd460339df9292585; Last Updated: 2025-06-02 13:43:03

## Partial Techtree ```mermaid flowchart BT classDef eoi fill:#fff, stroke:#000, color:#000; classDef dependant fill:#fff, stroke:#888, color:#888; classDef dep_missing fill:#fcc, stroke:#800, color:#000; classDef dep_assigned fill:#ffa, stroke:#a50, color:#000; classDef dep_completed fill:#afa, stroke:#080, color:#000; 0:::eoi 0["<a href='https://git.fa-fo.de/fafo/techtree/issues/37' target='_blank'>#37</a> | MISSING\n<i>Process</i>\n<b>PVD: Sputtering</b>"] 1:::dependant 1["<a href='https://git.fa-fo.de/fafo/techtree/issues/57' target='_blank'>#57</a> | MISSING\n<i>Process</i>\n<b>Metal thin film deposition</b>"] 1 --> 0 ``` <small>Digest: e017423733f233a9e9e868cada6adb41ccb7780abf4449cdd460339df9292585; Last Updated: 2025-06-02 13:43:03</small>
rahix added a new dependency 2025-05-22 23:42:02 +00:00
q3k changed title from Sputtering to PVD: Sputtering 2025-05-24 10:28:50 +00:00
q3k added a new dependency 2025-05-24 10:29:22 +00:00
rahix removed a dependency 2025-05-25 01:04:52 +00:00
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