Tube Furnace #55

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opened 2025-05-24 10:26:08 +00:00 by q3k · 3 comments

q3k commented

2025-05-24 10:26:08 +00:00

Owner

Draft specs:

800°C - 1200°C for thermal oxidation of silicon
Precise temperature ramp for process control
A large enough diameter to hold at least a die at a time (but ideally something that can hold at least 100mm wafers).

Draft specs: 1. 800°C - 1200°C for thermal oxidation of silicon 2. Precise temperature ramp for process control 3. A large enough diameter to hold at least a die at a time (but ideally something that can hold at least 100mm wafers).

q3k added the

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Equipment

label 2025-05-24 10:26:08 +00:00

forgejo-actions commented

2025-05-24 10:26:14 +00:00

Partial Techtree

flowchart BT

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    1["<a href='https://git.fa-fo.de/fafo/techtree/issues/54' target='_blank'>#54</a> | MISSING<br/><i>Process</i><br/><b>Si Thermal Oxidation</b>"]
    2:::dependant
    2["<a href='https://git.fa-fo.de/fafo/techtree/issues/60' target='_blank'>#60</a> | MISSING<br/><i>Process</i><br/><b>Thermal diffusion doping</b>"]
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Digest: aa631a4c084c26a6d452c4d2046cab6f5b354879b9b48b31794c88d7cce50b44; Last Updated: 2025-10-05 17:01:59

## Partial Techtree ```mermaid flowchart BT classDef eoi fill:#fff, stroke:#000, color:#000; classDef dependant fill:#fff, stroke:#888, color:#888; classDef dep_missing fill:#fcc, stroke:#800, color:#000; classDef dep_assigned fill:#ffa, stroke:#a50, color:#000; classDef dep_completed fill:#afa, stroke:#080, color:#000; 0:::eoi 0["<a href='https://git.fa-fo.de/fafo/techtree/issues/55' target='_blank'>#55</a> | ASSIGNED Equipment Tube Furnace"] 1:::dependant 1["<a href='https://git.fa-fo.de/fafo/techtree/issues/54' target='_blank'>#54</a> | MISSING Process Si Thermal Oxidation"] 2:::dependant 2["<a href='https://git.fa-fo.de/fafo/techtree/issues/60' target='_blank'>#60</a> | MISSING Process Thermal diffusion doping"] 1 --> 0 2 --> 0 ``` Digest: aa631a4c084c26a6d452c4d2046cab6f5b354879b9b48b31794c88d7cce50b44; Last Updated: 2025-10-05 17:01:59

q3k added a new dependency 2025-05-24 10:26:17 +00:00

#54 Si Thermal Oxidation

q3k added a new dependency 2025-05-24 10:44:52 +00:00

#60 Thermal diffusion doping

rahix commented

2025-06-16 11:45:20 +00:00

Owner

Here is a DIY tube furnace: https://www.projectsinflight.com/2023/06/14/high-temp/

I would prefer to get a properly built device but if that isn't happening, it seems we could build our own?

Here is a DIY tube furnace: https://www.projectsinflight.com/2023/06/14/high-temp/ I would prefer to get a properly built device but if that isn't happening, it seems we could build our own?