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Sputter Coater #79

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opened 2025-07-28 13:14:51 +00:00 by rahix · 2 comments
rahix commented 2025-07-28 13:14:51 +00:00
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A sputter coater is a machine which deposits a thin material film onto a surface using sputtering, a form of physical vapor deposition (PVD).

This issue marks the actual sputter coater machine, which we will use to perform sputtering (#37).

Requirements:

  • Magnetron sputtering so it can be used for non-conductive materials
  • Large enough working volume for sputtering wafers
Sputtering Plasma

Mario Geiger, CC BY-SA 3.0 https://creativecommons.org/licenses/by-sa/3.0, via Wikimedia Commons

A sputter coater is a machine which deposits a thin material film onto a surface using [sputtering](https://en.wikipedia.org/wiki/Sputtering), a form of [physical vapor deposition (PVD)](https://en.wikipedia.org/wiki/Physical_vapor_deposition). This issue marks the actual sputter coater machine, which we will use to perform sputtering (#37). Requirements: - Magnetron sputtering so it can be used for non-conductive materials - Large enough working volume for sputtering wafers <img alt="Sputtering Plasma" src="https://upload.wikimedia.org/wikipedia/commons/8/82/Sputtering_plasma.jpg" width=400 /> <small>Mario Geiger, CC BY-SA 3.0 <https://creativecommons.org/licenses/by-sa/3.0>, via Wikimedia Commons</small>
rahix added the
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Equipment
 label 2025-07-28 13:14:51 +00:00
forgejo-actions commented 2025-07-28 13:15:00 +00:00
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Partial Techtree

flowchart BT

    classDef eoi fill:#fff, stroke:#000, color:#000;
    classDef dependant fill:#fff, stroke:#888, color:#888;
    classDef ultimate fill:#fff, stroke:#000, color:#000;
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    classDef dep_completed fill:#afa, stroke:#080, color:#000;
    0:::eoi
    0["<a href='https://git.fa-fo.de/fafo/techtree/issues/79' target='_blank'>#79</a> | COMPLETED<br/><i>Equipment</i><br/><b>Sputter Coater</b>"]
    1:::dependant
    1["<a href='https://git.fa-fo.de/fafo/techtree/issues/37' target='_blank'>#37</a> | ASSIGNED<br/><i>Process</i><br/><b>PVD: Sputtering</b>"]
    2:::dependant
    2["<a href='https://git.fa-fo.de/fafo/techtree/issues/101' target='_blank'>#101</a> | MISSING<br/><i>Process</i><br/><b>Chemical Vapor Deposition</b>"]
    1 --> 0
    2 --> 0

Digest: 5471943a1676aca9fc5e2ad54cabfb915f28e41766b9a8c488a16b20f2558fd7; Last Updated: 2026-06-05 21:06:53

## Partial Techtree ```mermaid flowchart BT classDef eoi fill:#fff, stroke:#000, color:#000; classDef dependant fill:#fff, stroke:#888, color:#888; classDef ultimate fill:#fff, stroke:#000, color:#000; classDef dep_missing fill:#fcc, stroke:#800, color:#000; classDef dep_assigned fill:#ffa, stroke:#a50, color:#000; classDef dep_completed fill:#afa, stroke:#080, color:#000; 0:::eoi 0["<a href='https://git.fa-fo.de/fafo/techtree/issues/79' target='_blank'>#79</a> | COMPLETED<br/><i>Equipment</i><br/><b>Sputter Coater</b>"] 1:::dependant 1["<a href='https://git.fa-fo.de/fafo/techtree/issues/37' target='_blank'>#37</a> | ASSIGNED<br/><i>Process</i><br/><b>PVD: Sputtering</b>"] 2:::dependant 2["<a href='https://git.fa-fo.de/fafo/techtree/issues/101' target='_blank'>#101</a> | MISSING<br/><i>Process</i><br/><b>Chemical Vapor Deposition</b>"] 1 --> 0 2 --> 0 ``` <small>Digest: 5471943a1676aca9fc5e2ad54cabfb915f28e41766b9a8c488a16b20f2558fd7; Last Updated: 2026-06-05 21:06:53</small>
rahix added a new dependency 2025-07-28 13:15:08 +00:00
#37 PVD: Sputtering
jana added a new dependency 2025-10-03 17:03:12 +00:00
#99 Basic LCD Device
jana removed a dependency 2025-10-03 18:00:15 +00:00
#99 Basic LCD Device
jana added a new dependency 2025-10-03 18:01:25 +00:00
#101 Chemical Vapor Deposition
rahix commented 2026-05-14 15:04:02 +00:00
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We have a sputter coater as part of our Edwards AUTO 306 Coating System now!

Picture of Edwards AUTO 306 systems

Still needs to be brought up and demonstrate to be working.

We have a sputter coater as part of our [Edwards AUTO 306 Coating System](https://wiki.fa-fo.de/equipment:edwards-306:start) now! ![Picture of Edwards AUTO 306 systems](https://wiki.fa-fo.de/_media/equipment:edwards-306:20260401_coating-systems-overview-with-labels.jpg) Still needs to be brought up and demonstrate to be working.
q3k was assigned by rahix 2026-05-17 14:39:10 +00:00
rahix added the
Completed
 label 2026-06-05 21:06:48 +00:00
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#37 PVD: Sputtering
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#101 Chemical Vapor Deposition
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Reference: fafo/techtree#79
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