Sputter Coater #79

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opened 2025-07-28 13:14:51 +00:00 by rahix · 1 comment

rahix commented

2025-07-28 13:14:51 +00:00

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A sputter coater is a machine which deposits a thin material film onto a surface using sputtering, a form of physical vapor deposition (PVD).

This issue marks the actual sputter coater machine, which we will use to perform sputtering (#37).

Requirements:

Magnetron sputtering so it can be used for non-conductive materials
Large enough working volume for sputtering wafers

Mario Geiger, CC BY-SA 3.0 https://creativecommons.org/licenses/by-sa/3.0, via Wikimedia Commons

A sputter coater is a machine which deposits a thin material film onto a surface using [sputtering](https://en.wikipedia.org/wiki/Sputtering), a form of [physical vapor deposition (PVD)](https://en.wikipedia.org/wiki/Physical_vapor_deposition). This issue marks the actual sputter coater machine, which we will use to perform sputtering (#37). Requirements: - Magnetron sputtering so it can be used for non-conductive materials - Large enough working volume for sputtering wafers <img alt="Sputtering Plasma" src="https://upload.wikimedia.org/wikipedia/commons/8/82/Sputtering_plasma.jpg" width=400 /> Mario Geiger, CC BY-SA 3.0 <https://creativecommons.org/licenses/by-sa/3.0>, via Wikimedia Commons

rahix added the

Type

Equipment

label 2025-07-28 13:14:51 +00:00

forgejo-actions commented

2025-07-28 13:15:00 +00:00

Partial Techtree

flowchart BT

    classDef eoi fill:#fff, stroke:#000, color:#000;
    classDef dependant fill:#fff, stroke:#888, color:#888;
    classDef dep_missing fill:#fcc, stroke:#800, color:#000;
    classDef dep_assigned fill:#ffa, stroke:#a50, color:#000;
    classDef dep_completed fill:#afa, stroke:#080, color:#000;
    0:::eoi
    0["<a href='https://git.fa-fo.de/fafo/techtree/issues/79' target='_blank'>#79</a> | MISSING<br/><i>Equipment</i><br/><b>Sputter Coater</b>"]
    1:::dependant
    1["<a href='https://git.fa-fo.de/fafo/techtree/issues/37' target='_blank'>#37</a> | MISSING<br/><i>Process</i><br/><b>PVD: Sputtering</b>"]
    2:::dependant
    2["<a href='https://git.fa-fo.de/fafo/techtree/issues/101' target='_blank'>#101</a> | MISSING<br/><i>Process</i><br/><b>Chemical Vapor Deposition</b>"]
    1 --> 0
    2 --> 0

Digest: 597192610e3cd1c236d080f36e53867c8c9e6aa1a57855f4732526ef668e0851; Last Updated: 2025-10-05 17:01:59

## Partial Techtree ```mermaid flowchart BT classDef eoi fill:#fff, stroke:#000, color:#000; classDef dependant fill:#fff, stroke:#888, color:#888; classDef dep_missing fill:#fcc, stroke:#800, color:#000; classDef dep_assigned fill:#ffa, stroke:#a50, color:#000; classDef dep_completed fill:#afa, stroke:#080, color:#000; 0:::eoi 0["<a href='https://git.fa-fo.de/fafo/techtree/issues/79' target='_blank'>#79</a> | MISSING Equipment Sputter Coater"] 1:::dependant 1["<a href='https://git.fa-fo.de/fafo/techtree/issues/37' target='_blank'>#37</a> | MISSING Process PVD: Sputtering"] 2:::dependant 2["<a href='https://git.fa-fo.de/fafo/techtree/issues/101' target='_blank'>#101</a> | MISSING Process Chemical Vapor Deposition"] 1 --> 0 2 --> 0 ``` Digest: 597192610e3cd1c236d080f36e53867c8c9e6aa1a57855f4732526ef668e0851; Last Updated: 2025-10-05 17:01:59

rahix added a new dependency 2025-07-28 13:15:08 +00:00

#37 PVD: Sputtering