Plasma Etcher #25

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opened 2025-05-22 20:28:12 +00:00 by rahix · 1 comment

rahix commented

2025-05-22 20:28:12 +00:00

Owner

We already have a plasma etcher, but it is far from working...

We already have a plasma etcher, but it is far from working... ![image](/attachments/35dc491d-25db-40c7-8b5e-e992fd0e96a0)

image.png

1.1 MiB

rahix added the

Type

Equipment

Needs Documentation

labels 2025-05-22 20:28:12 +00:00

rahix added a new dependency 2025-05-22 20:28:18 +00:00

#24 ~3ph Power (below 10kW)

forgejo-actions commented

2025-05-22 20:28:32 +00:00

Partial Techtree

flowchart BT

    classDef eoi fill:#fff, stroke:#000, color:#000;
    classDef dependant fill:#fff, stroke:#888, color:#888;
    classDef dep_missing fill:#fcc, stroke:#800, color:#000;
    classDef dep_assigned fill:#ffa, stroke:#a50, color:#000;
    classDef dep_completed fill:#afa, stroke:#080, color:#000;
    0:::eoi
    0["<a href='https://git.fa-fo.de/fafo/techtree/issues/25' target='_blank'>#25</a> | MISSING<br/><i>Equipment</i><br/><b>Plasma Etcher</b>"]
    1:::dep_assigned
    1["<a href='https://git.fa-fo.de/fafo/techtree/issues/27' target='_blank'>#27</a> | ASSIGNED<br/><i>Equipment</i><br/><b>Technical Ventilation</b>"]
    2:::dep_completed
    2["<a href='https://git.fa-fo.de/fafo/techtree/issues/24' target='_blank'>#24</a> | COMPLETED<br/><i>Equipment</i><br/><b>~3ph Power (below 10kW)</b>"]
    3:::dependant
    3["<a href='https://git.fa-fo.de/fafo/techtree/issues/8' target='_blank'>#8</a> | MISSING<br/><i>Process</i><br/><b>Plasma Etching</b>"]
    4:::dependant
    4["<a href='https://git.fa-fo.de/fafo/techtree/issues/21' target='_blank'>#21</a> | MISSING<br/><i>Process</i><br/><b>Reactive Ion Etching</b>"]
    5:::dependant
    5["<a href='https://git.fa-fo.de/fafo/techtree/issues/80' target='_blank'>#80</a> | MISSING<br/><i>Process</i><br/><b>Plasma Cleaning</b>"]
    0 --> 2
    0 --> 1
    3 --> 0
    4 --> 0
    5 --> 0

Digest: 2c68bb554a2dbfc9a5bab148007097d7bf10e83a7bad5b6854e3784689aa7f29; Last Updated: 2025-10-05 17:01:59

## Partial Techtree ```mermaid flowchart BT classDef eoi fill:#fff, stroke:#000, color:#000; classDef dependant fill:#fff, stroke:#888, color:#888; classDef dep_missing fill:#fcc, stroke:#800, color:#000; classDef dep_assigned fill:#ffa, stroke:#a50, color:#000; classDef dep_completed fill:#afa, stroke:#080, color:#000; 0:::eoi 0["<a href='https://git.fa-fo.de/fafo/techtree/issues/25' target='_blank'>#25</a> | MISSING Equipment Plasma Etcher"] 1:::dep_assigned 1["<a href='https://git.fa-fo.de/fafo/techtree/issues/27' target='_blank'>#27</a> | ASSIGNED Equipment Technical Ventilation"] 2:::dep_completed 2["<a href='https://git.fa-fo.de/fafo/techtree/issues/24' target='_blank'>#24</a> | COMPLETED Equipment ~3ph Power (below 10kW)"] 3:::dependant 3["<a href='https://git.fa-fo.de/fafo/techtree/issues/8' target='_blank'>#8</a> | MISSING Process Plasma Etching"] 4:::dependant 4["<a href='https://git.fa-fo.de/fafo/techtree/issues/21' target='_blank'>#21</a> | MISSING Process Reactive Ion Etching"] 5:::dependant 5["<a href='https://git.fa-fo.de/fafo/techtree/issues/80' target='_blank'>#80</a> | MISSING Process Plasma Cleaning"] 0 --> 2 0 --> 1 3 --> 0 4 --> 0 5 --> 0 ``` Digest: 2c68bb554a2dbfc9a5bab148007097d7bf10e83a7bad5b6854e3784689aa7f29; Last Updated: 2025-10-05 17:01:59

rahix added a new dependency 2025-05-22 20:28:34 +00:00

#8 Plasma Etching

rahix added a new dependency 2025-05-22 23:47:53 +00:00

#21 Reactive Ion Etching

rahix added a new dependency 2025-05-29 09:28:05 +00:00

#27 Technical Ventilation

rahix added a new dependency 2025-08-10 12:50:31 +00:00

#80 Plasma Cleaning