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Plasma Etcher #25

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opened 2025-05-22 20:28:12 +00:00 by rahix · 1 comment
rahix commented 2025-05-22 20:28:12 +00:00
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We already have a plasma etcher, but it is far from working...

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We already have a plasma etcher, but it is far from working... ![image](/attachments/35dc491d-25db-40c7-8b5e-e992fd0e96a0)
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rahix added the
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Equipment
Needs Documentation
 labels 2025-05-22 20:28:12 +00:00
rahix added a new dependency 2025-05-22 20:28:18 +00:00
#24 ~3ph Power (below 10kW)
forgejo-actions commented 2025-05-22 20:28:32 +00:00
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Partial Techtree

flowchart BT

    classDef eoi fill:#fff, stroke:#000, color:#000;
    classDef dependant fill:#fff, stroke:#888, color:#888;
    classDef ultimate fill:#fff, stroke:#000, color:#000;
    classDef dep_missing fill:#fcc, stroke:#800, color:#000;
    classDef dep_assigned fill:#ffa, stroke:#a50, color:#000;
    classDef dep_completed fill:#afa, stroke:#080, color:#000;
    0:::eoi
    0["<a href='https://git.fa-fo.de/fafo/techtree/issues/25' target='_blank'>#25</a> | MISSING<br/><i>Equipment</i><br/><b>Plasma Etcher</b>"]
    1:::dep_assigned
    1["<a href='https://git.fa-fo.de/fafo/techtree/issues/27' target='_blank'>#27</a> | ASSIGNED<br/><i>Equipment</i><br/><b>Technical Ventilation</b>"]
    2:::dep_assigned
    2["<a href='https://git.fa-fo.de/fafo/techtree/issues/118' target='_blank'>#118</a> | ASSIGNED<br/><i>Development</i><br/><b>Hazard Assessment</b>"]
    3:::dep_completed
    3["<a href='https://git.fa-fo.de/fafo/techtree/issues/24' target='_blank'>#24</a> | COMPLETED<br/><i>Equipment</i><br/><b>~3ph Power (below 10kW)</b>"]
    4:::dependant
    4["<a href='https://git.fa-fo.de/fafo/techtree/issues/8' target='_blank'>#8</a> | MISSING<br/><i>Process</i><br/><b>Plasma Etching</b>"]
    5:::dependant
    5["<a href='https://git.fa-fo.de/fafo/techtree/issues/21' target='_blank'>#21</a> | MISSING<br/><i>Process</i><br/><b>Reactive Ion Etching</b>"]
    6:::dependant
    6["<a href='https://git.fa-fo.de/fafo/techtree/issues/80' target='_blank'>#80</a> | MISSING<br/><i>Process</i><br/><b>Plasma Cleaning</b>"]
    1 --> 2
    0 --> 3
    0 --> 1
    4 --> 0
    5 --> 0
    6 --> 0

Digest: b4090d4b3fc5f15a6658a3d4d0ecb0ba8978cf75392888cf5a36e7f4bf723d10; Last Updated: 2026-01-25 23:22:54

## Partial Techtree ```mermaid flowchart BT classDef eoi fill:#fff, stroke:#000, color:#000; classDef dependant fill:#fff, stroke:#888, color:#888; classDef ultimate fill:#fff, stroke:#000, color:#000; classDef dep_missing fill:#fcc, stroke:#800, color:#000; classDef dep_assigned fill:#ffa, stroke:#a50, color:#000; classDef dep_completed fill:#afa, stroke:#080, color:#000; 0:::eoi 0["<a href='https://git.fa-fo.de/fafo/techtree/issues/25' target='_blank'>#25</a> | MISSING<br/><i>Equipment</i><br/><b>Plasma Etcher</b>"] 1:::dep_assigned 1["<a href='https://git.fa-fo.de/fafo/techtree/issues/27' target='_blank'>#27</a> | ASSIGNED<br/><i>Equipment</i><br/><b>Technical Ventilation</b>"] 2:::dep_assigned 2["<a href='https://git.fa-fo.de/fafo/techtree/issues/118' target='_blank'>#118</a> | ASSIGNED<br/><i>Development</i><br/><b>Hazard Assessment</b>"] 3:::dep_completed 3["<a href='https://git.fa-fo.de/fafo/techtree/issues/24' target='_blank'>#24</a> | COMPLETED<br/><i>Equipment</i><br/><b>~3ph Power (below 10kW)</b>"] 4:::dependant 4["<a href='https://git.fa-fo.de/fafo/techtree/issues/8' target='_blank'>#8</a> | MISSING<br/><i>Process</i><br/><b>Plasma Etching</b>"] 5:::dependant 5["<a href='https://git.fa-fo.de/fafo/techtree/issues/21' target='_blank'>#21</a> | MISSING<br/><i>Process</i><br/><b>Reactive Ion Etching</b>"] 6:::dependant 6["<a href='https://git.fa-fo.de/fafo/techtree/issues/80' target='_blank'>#80</a> | MISSING<br/><i>Process</i><br/><b>Plasma Cleaning</b>"] 1 --> 2 0 --> 3 0 --> 1 4 --> 0 5 --> 0 6 --> 0 ``` <small>Digest: b4090d4b3fc5f15a6658a3d4d0ecb0ba8978cf75392888cf5a36e7f4bf723d10; Last Updated: 2026-01-25 23:22:54</small>
rahix added a new dependency 2025-05-22 20:28:34 +00:00
#8 Plasma Etching
rahix added a new dependency 2025-05-22 23:47:53 +00:00
#21 Reactive Ion Etching
rahix added a new dependency 2025-05-29 09:28:05 +00:00
#27 Technical Ventilation
rahix added a new dependency 2025-08-10 12:50:31 +00:00
#80 Plasma Cleaning
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#8 Plasma Etching
fafo/techtree
#21 Reactive Ion Etching
fafo/techtree
#80 Plasma Cleaning
fafo/techtree
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#24 ~3ph Power (below 10kW)
fafo/techtree
#27 Technical Ventilation
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Reference: fafo/techtree#25
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