SEM Vibration Isolation #33

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opened 2025-05-22 22:52:38 +00:00 by rahix · 4 comments
Owner

Our SEM "Kevin" is currently missing its active vibration isolation.

Our SEM "Kevin" is currently missing its active vibration isolation.
rahix added the
Type
Equipment
label 2025-05-22 22:52:38 +00:00

Partial Techtree

flowchart BT

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    classDef dependant fill:#fff, stroke:#888, color:#888;
    classDef dep_missing fill:#fcc, stroke:#800, color:#000;
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    classDef dep_completed fill:#afa, stroke:#080, color:#000;
    0:::eoi
    0["<a href='https://git.fa-fo.de/fafo/techtree/issues/33' target='_blank'>#33</a> | ASSIGNED\n<i>Equipment</i>\n<b>SEM Vibration Isolation</b>"]
    1:::dep_assigned
    1["<a href='https://git.fa-fo.de/fafo/techtree/issues/40' target='_blank'>#40</a> | ASSIGNED\n<i>Equipment</i>\n<b>Air Compressor</b>"]
    2:::dep_completed
    2["<a href='https://git.fa-fo.de/fafo/techtree/issues/28' target='_blank'>#28</a> | COMPLETED\n<i>Equipment</i>\n<b>Scanning Electron Microscope (SEM)</b>"]
    3:::dep_completed
    3["<a href='https://git.fa-fo.de/fafo/techtree/issues/26' target='_blank'>#26</a> | COMPLETED\n<i>Equipment</i>\n<b>Water Cooling</b>"]
    4:::dependant
    4["<a href='https://git.fa-fo.de/fafo/techtree/issues/32' target='_blank'>#32</a> | MISSING\n<i>Process</i>\n<b>SEM Imaging@10nm</b>"]
    0 --> 2
    0 --> 1
    2 --> 3
    4 --> 0

Digest: 4edd31396a34eb1d8bffef41580cf29c1bae08ee3912a3a11841a961822d423b; Last Updated: 2025-06-15 00:29:07

## Partial Techtree ```mermaid flowchart BT classDef eoi fill:#fff, stroke:#000, color:#000; classDef dependant fill:#fff, stroke:#888, color:#888; classDef dep_missing fill:#fcc, stroke:#800, color:#000; classDef dep_assigned fill:#ffa, stroke:#a50, color:#000; classDef dep_completed fill:#afa, stroke:#080, color:#000; 0:::eoi 0["<a href='https://git.fa-fo.de/fafo/techtree/issues/33' target='_blank'>#33</a> | ASSIGNED\n<i>Equipment</i>\n<b>SEM Vibration Isolation</b>"] 1:::dep_assigned 1["<a href='https://git.fa-fo.de/fafo/techtree/issues/40' target='_blank'>#40</a> | ASSIGNED\n<i>Equipment</i>\n<b>Air Compressor</b>"] 2:::dep_completed 2["<a href='https://git.fa-fo.de/fafo/techtree/issues/28' target='_blank'>#28</a> | COMPLETED\n<i>Equipment</i>\n<b>Scanning Electron Microscope (SEM)</b>"] 3:::dep_completed 3["<a href='https://git.fa-fo.de/fafo/techtree/issues/26' target='_blank'>#26</a> | COMPLETED\n<i>Equipment</i>\n<b>Water Cooling</b>"] 4:::dependant 4["<a href='https://git.fa-fo.de/fafo/techtree/issues/32' target='_blank'>#32</a> | MISSING\n<i>Process</i>\n<b>SEM Imaging@10nm</b>"] 0 --> 2 0 --> 1 2 --> 3 4 --> 0 ``` <small>Digest: 4edd31396a34eb1d8bffef41580cf29c1bae08ee3912a3a11841a961822d423b; Last Updated: 2025-06-15 00:29:07</small>
rahix added a new dependency 2025-05-22 22:52:53 +00:00
rahix self-assigned this 2025-05-22 23:34:02 +00:00
Author
Owner

@q3k, @0ff: At what imaging scale do we currently hit the vibration limit? Can you add an appropriate dependency from the respective issue to this one here?

@q3k, @0ff: At what imaging scale do we currently hit the vibration limit? Can you add an appropriate dependency from the respective issue to this one here? - #29 — 10µm - #30 — 1µm - #31 — 100nm - #32 — 10nm
rahix added a new dependency 2025-05-23 12:47:49 +00:00
rahix added a new dependency 2025-05-25 01:28:57 +00:00
q3k removed a dependency 2025-06-15 00:28:43 +00:00
q3k added a new dependency 2025-06-15 00:28:55 +00:00
Author
Owner

For reference, here is an image where vibration artefacts are very visible:

image

For reference, here is an image where vibration artefacts are very visible: ![image](/attachments/05bc371d-c73a-4663-8d4b-4a4e195eabad)
283 KiB
Author
Owner

Bought some components so we can at least fill up the pneumatic springs so the SEM column is no longer directly coupled to the building. It is unclear what kind of active vibration isolation system was installed previously, but the springs look like a passive use might be possible.

Will report back once this has been tested.

Bought some components so we can at least fill up the pneumatic springs so the SEM column is no longer directly coupled to the building. It is unclear what kind of active vibration isolation system was installed previously, but the springs look like a passive use might be possible. Will report back once this has been tested.
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