SEM Vibration Isolation

rahix commented

2025-05-22 22:52:38 +00:00

Owner

Our SEM "Kevin" is currently missing its active vibration isolation.

rahix added the

Type

Equipment

label 2025-05-22 22:52:38 +00:00

forgejo-actions commented

2025-05-22 22:52:45 +00:00

Partial Techtree

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    0["<a href='https://git.fa-fo.de/fafo/techtree/issues/33' target='_blank'>#33</a> | COMPLETED<br/><i>Equipment</i><br/><b>SEM Vibration Isolation</b>"]
    1:::dep_completed
    1["<a href='https://git.fa-fo.de/fafo/techtree/issues/28' target='_blank'>#28</a> | COMPLETED<br/><i>Equipment</i><br/><b>Scanning Electron Microscope (SEM)</b>"]
    2:::dep_completed
    2["<a href='https://git.fa-fo.de/fafo/techtree/issues/26' target='_blank'>#26</a> | COMPLETED<br/><i>Equipment</i><br/><b>Water Cooling</b>"]
    3:::dependant
    3["<a href='https://git.fa-fo.de/fafo/techtree/issues/32' target='_blank'>#32</a> | MISSING<br/><i>Process</i><br/><b>SEM Imaging@10nm</b>"]
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Digest: 54a4f21a265a30b803ebab042fb8ac0c269e7e5c8a7673afeedc9590867421de; Last Updated: 2025-10-05 17:01:59

## Partial Techtree ```mermaid flowchart BT classDef eoi fill:#fff, stroke:#000, color:#000; classDef dependant fill:#fff, stroke:#888, color:#888; classDef dep_missing fill:#fcc, stroke:#800, color:#000; classDef dep_assigned fill:#ffa, stroke:#a50, color:#000; classDef dep_completed fill:#afa, stroke:#080, color:#000; 0:::eoi 0["<a href='https://git.fa-fo.de/fafo/techtree/issues/33' target='_blank'>#33</a> | COMPLETED Equipment SEM Vibration Isolation"] 1:::dep_completed 1["<a href='https://git.fa-fo.de/fafo/techtree/issues/28' target='_blank'>#28</a> | COMPLETED Equipment Scanning Electron Microscope (SEM)"] 2:::dep_completed 2["<a href='https://git.fa-fo.de/fafo/techtree/issues/26' target='_blank'>#26</a> | COMPLETED Equipment Water Cooling"] 3:::dependant 3["<a href='https://git.fa-fo.de/fafo/techtree/issues/32' target='_blank'>#32</a> | MISSING Process SEM Imaging@10nm"] 0 --> 1 1 --> 2 3 --> 0 ``` Digest: 54a4f21a265a30b803ebab042fb8ac0c269e7e5c8a7673afeedc9590867421de; Last Updated: 2025-10-05 17:01:59

rahix added a new dependency 2025-05-22 22:52:53 +00:00

#28 Scanning Electron Microscope (SEM)

rahix self-assigned this 2025-05-22 23:34:02 +00:00

rahix commented

2025-05-23 12:41:10 +00:00

Author

Owner

@q3k, @0ff: At what imaging scale do we currently hit the vibration limit? Can you add an appropriate dependency from the respective issue to this one here?

#29 — 10µm
#30 — 1µm
#31 — 100nm
#32 — 10nm

@q3k, @0ff: At what imaging scale do we currently hit the vibration limit? Can you add an appropriate dependency from the respective issue to this one here? - #29 — 10µm - #30 — 1µm - #31 — 100nm - #32 — 10nm

rahix added a new dependency 2025-05-23 12:47:49 +00:00

#40 Air Compressor

rahix added a new dependency 2025-05-25 01:28:57 +00:00

#31 SEM Imaging@100nm

q3k removed a dependency 2025-06-15 00:28:43 +00:00

#31 SEM Imaging@100nm

q3k added a new dependency 2025-06-15 00:28:55 +00:00

#32 SEM Imaging@10nm

rahix commented

2025-08-03 17:49:20 +00:00

Author

Owner

For reference, here is an image where vibration artefacts are very visible:

For reference, here is an image where vibration artefacts are very visible: ![image](/attachments/05bc371d-c73a-4663-8d4b-4a4e195eabad)

image.png

283 KiB

rahix commented

2025-08-03 17:50:54 +00:00

Author

Owner

Bought some components so we can at least fill up the pneumatic springs so the SEM column is no longer directly coupled to the building. It is unclear what kind of active vibration isolation system was installed previously, but the springs look like a passive use might be possible.

Will report back once this has been tested.

Bought some components so we can at least fill up the pneumatic springs so the SEM column is no longer directly coupled to the building. It is unclear what kind of active vibration isolation system was installed previously, but the springs look like a passive use might be possible. Will report back once this has been tested.

rahix commented

2025-09-25 23:13:15 +00:00

Author

Owner

We have managed to set up the low-tech passive implementation of the vibration isolation as detailed here: https://wiki.fa-fo.de/equipment:zeiss-dsm-962:log#day_2025-08-23_q3k_rahix_ln_rob_2x_guest

rahix added the

Completed

label 2025-10-05 14:31:45 +00:00

rahix removed a dependency 2025-10-05 14:31:50 +00:00

#40 Air Compressor