fafo/techtree
fafo/techtree
15
0
Fork 0
Code Issues 116 Pull requests Projects 2 Wiki Activity Actions

SEM Imaging@10nm #32

New issue
Open
opened 2025-05-22 20:43:11 +00:00 by rahix · 5 comments
rahix commented 2025-05-22 20:43:11 +00:00
Owner
Copy link

Reliably resolving features that are 10nm wide.

Reliably resolving features that are 10nm wide.
rahix added the
Type
Process
Needs Documentation
 labels 2025-05-22 20:43:11 +00:00
rahix added a new dependency 2025-05-22 20:43:18 +00:00
#31 SEM Imaging@100nm
forgejo-actions commented 2025-05-22 20:43:28 +00:00
Copy link

Partial Techtree

flowchart BT

    classDef eoi fill:#fff, stroke:#000, color:#000;
    classDef dependant fill:#fff, stroke:#888, color:#888;
    classDef ultimate fill:#fff, stroke:#000, color:#000;
    classDef dep_missing fill:#fcc, stroke:#800, color:#000;
    classDef dep_assigned fill:#ffa, stroke:#a50, color:#000;
    classDef dep_completed fill:#afa, stroke:#080, color:#000;
    0:::eoi
    0["<a href='https://git.fa-fo.de/fafo/techtree/issues/32' target='_blank'>#32</a> | MISSING<br/><i>Process</i><br/><b>SEM Imaging@10nm</b>"]
    1:::dep_completed
    1["<a href='https://git.fa-fo.de/fafo/techtree/issues/33' target='_blank'>#33</a> | COMPLETED<br/><i>Equipment</i><br/><b>SEM Vibration Isolation</b>"]
    2:::dep_completed
    2["<a href='https://git.fa-fo.de/fafo/techtree/issues/28' target='_blank'>#28</a> | COMPLETED<br/><i>Equipment</i><br/><b>Scanning Electron Microscope (SEM)</b>"]
    3:::dep_completed
    3["<a href='https://git.fa-fo.de/fafo/techtree/issues/26' target='_blank'>#26</a> | COMPLETED<br/><i>Equipment</i><br/><b>Water Cooling</b>"]
    4:::dep_completed
    4["<a href='https://git.fa-fo.de/fafo/techtree/issues/31' target='_blank'>#31</a> | COMPLETED<br/><i>Process</i><br/><b>SEM Imaging@100nm</b>"]
    5:::dep_completed
    5["<a href='https://git.fa-fo.de/fafo/techtree/issues/30' target='_blank'>#30</a> | COMPLETED<br/><i>Process</i><br/><b>SEM Imaging@1µm</b>"]
    6:::dep_completed
    6["<a href='https://git.fa-fo.de/fafo/techtree/issues/29' target='_blank'>#29</a> | COMPLETED<br/><i>Process</i><br/><b>SEM Imaging@10µm</b>"]
    7:::dependant
    7["<a href='https://git.fa-fo.de/fafo/techtree/issues/112' target='_blank'>#112</a> | ULTIMATE GOAL<br/><i>Process</i><br/><b>Nanoscale Imaging</b>"]
    1 --> 2
    0 --> 4
    0 --> 1
    4 --> 5
    5 --> 6
    6 --> 2
    2 --> 3
    7 --> 0

Digest: 448db4a873930c2fdc5cf5ff1cb79d3f1999b01f8c4a9590b8d7f060e7c374e7; Last Updated: 2026-01-23 14:00:47

## Partial Techtree ```mermaid flowchart BT classDef eoi fill:#fff, stroke:#000, color:#000; classDef dependant fill:#fff, stroke:#888, color:#888; classDef ultimate fill:#fff, stroke:#000, color:#000; classDef dep_missing fill:#fcc, stroke:#800, color:#000; classDef dep_assigned fill:#ffa, stroke:#a50, color:#000; classDef dep_completed fill:#afa, stroke:#080, color:#000; 0:::eoi 0["<a href='https://git.fa-fo.de/fafo/techtree/issues/32' target='_blank'>#32</a> | MISSING<br/><i>Process</i><br/><b>SEM Imaging@10nm</b>"] 1:::dep_completed 1["<a href='https://git.fa-fo.de/fafo/techtree/issues/33' target='_blank'>#33</a> | COMPLETED<br/><i>Equipment</i><br/><b>SEM Vibration Isolation</b>"] 2:::dep_completed 2["<a href='https://git.fa-fo.de/fafo/techtree/issues/28' target='_blank'>#28</a> | COMPLETED<br/><i>Equipment</i><br/><b>Scanning Electron Microscope (SEM)</b>"] 3:::dep_completed 3["<a href='https://git.fa-fo.de/fafo/techtree/issues/26' target='_blank'>#26</a> | COMPLETED<br/><i>Equipment</i><br/><b>Water Cooling</b>"] 4:::dep_completed 4["<a href='https://git.fa-fo.de/fafo/techtree/issues/31' target='_blank'>#31</a> | COMPLETED<br/><i>Process</i><br/><b>SEM Imaging@100nm</b>"] 5:::dep_completed 5["<a href='https://git.fa-fo.de/fafo/techtree/issues/30' target='_blank'>#30</a> | COMPLETED<br/><i>Process</i><br/><b>SEM Imaging@1µm</b>"] 6:::dep_completed 6["<a href='https://git.fa-fo.de/fafo/techtree/issues/29' target='_blank'>#29</a> | COMPLETED<br/><i>Process</i><br/><b>SEM Imaging@10µm</b>"] 7:::dependant 7["<a href='https://git.fa-fo.de/fafo/techtree/issues/112' target='_blank'>#112</a> | ULTIMATE GOAL<br/><i>Process</i><br/><b>Nanoscale Imaging</b>"] 1 --> 2 0 --> 4 0 --> 1 4 --> 5 5 --> 6 6 --> 2 2 --> 3 7 --> 0 ``` <small>Digest: 448db4a873930c2fdc5cf5ff1cb79d3f1999b01f8c4a9590b8d7f060e7c374e7; Last Updated: 2026-01-23 14:00:47</small>
rahix commented 2025-06-01 20:58:01 +00:00
Author
Owner
Copy link

Is there any particlarly interesting thing we can do at this resolution?

Is there any particlarly interesting thing we can do at this resolution?
q3k added a new dependency 2025-06-15 00:28:55 +00:00
#33 SEM Vibration Isolation
q3k removed the
Needs Documentation
 label 2025-06-15 00:29:00 +00:00
rahix added a new dependency 2025-11-09 00:59:37 +00:00
#112 Nanoscale Imaging
hugo commented 2025-11-12 11:29:38 +00:00
Owner
Copy link

@rahix is this completed with the new vibration isolation?

@rahix is this completed with the new vibration isolation?
rahix commented 2025-11-13 00:41:31 +00:00
Author
Owner
Copy link

To my knowledge we have not achieved this resolution of imaging yet.

To my knowledge we have not achieved this resolution of imaging yet.
q3k commented 2025-11-13 01:44:29 +00:00
Owner
Copy link

We need proper test/reference samples for this - so far we've been testing with our own samples where 10nm-scale features are hard to come by conclusively.

We need proper test/reference samples for this - so far we've been testing with our own samples where 10nm-scale features are hard to come by conclusively.
Sign in to join this conversation.
No Branch/Tag specified
Branches Tags
main
render
No results found.
Labels
Clear labels   
Completed

This element has been completed but we do not want to close the issue yet!

  
Needs Documentation

Please add more documentation to this tech tree element!

  
Stale

This issue is stale and needs reintegration into the tech tree.

  
Type
Development
A device, software, or other thing we need to develop.

  
Type
Equipment
A piece of machinery that we need to acquire or get running.

  
Type
Process
A process we need to achieve.

  
Type
Research
A topic that we can or must research to unlock future capabilities.

  
Ultimate Goal

This is an ultimate goal of FAFO e.V.

No labels
Completed
Needs Documentation
Stale
Type
Development
Type
Equipment
Type
Process
Type
Research
Ultimate Goal
Milestone
Clear milestone
No items
No milestone
Projects
Clear projects
No items
No project
Assignees
Clear assignees
No assignees
4 participants
Notifications
Due date
The due date is invalid or out of range. Please use the format "yyyy-mm-dd".

No due date set.

Blocks
#112 Nanoscale Imaging
fafo/techtree
Depends on
#31 SEM Imaging@100nm
fafo/techtree
#33 SEM Vibration Isolation
fafo/techtree
Reference: fafo/techtree#32
No description provided.
Delete branch "%!s()"

Deleting a branch is permanent. Although the deleted branch may continue to exist for a short time before it actually gets removed, it CANNOT be undone in most cases. Continue?