SEM Imaging@10nm #32
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#112 Nanoscale Imaging
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#31 SEM Imaging@100nm
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#33 SEM Vibration Isolation
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Reference: fafo/techtree#32
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Reliably resolving features that are 10nm wide.
Partial Techtree
Digest: b874f2f8385b8d6df166f19c92ff0f3e5295436740aa89ab1f53df8c478ecf71; Last Updated: 2025-11-09 00:59:13
Is there any particlarly interesting thing we can do at this resolution?
@rahix is this completed with the new vibration isolation?
To my knowledge we have not achieved this resolution of imaging yet.
We need proper test/reference samples for this - so far we've been testing with our own samples where 10nm-scale features are hard to come by conclusively.