SEM Imaging@10nm #32

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opened 2025-05-22 20:43:11 +00:00 by rahix · 5 comments
Owner

Reliably resolving features that are 10nm wide.

Reliably resolving features that are 10nm wide.
rahix added the
Type
Process
Needs Documentation
labels 2025-05-22 20:43:11 +00:00
rahix added a new dependency 2025-05-22 20:43:18 +00:00

Partial Techtree

flowchart BT

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    0:::eoi
    0["<a href='https://git.fa-fo.de/fafo/techtree/issues/32' target='_blank'>#32</a> | MISSING<br/><i>Process</i><br/><b>SEM Imaging@10nm</b>"]
    1:::dep_completed
    1["<a href='https://git.fa-fo.de/fafo/techtree/issues/33' target='_blank'>#33</a> | COMPLETED<br/><i>Equipment</i><br/><b>SEM Vibration Isolation</b>"]
    2:::dep_completed
    2["<a href='https://git.fa-fo.de/fafo/techtree/issues/28' target='_blank'>#28</a> | COMPLETED<br/><i>Equipment</i><br/><b>Scanning Electron Microscope (SEM)</b>"]
    3:::dep_completed
    3["<a href='https://git.fa-fo.de/fafo/techtree/issues/26' target='_blank'>#26</a> | COMPLETED<br/><i>Equipment</i><br/><b>Water Cooling</b>"]
    4:::dep_completed
    4["<a href='https://git.fa-fo.de/fafo/techtree/issues/31' target='_blank'>#31</a> | COMPLETED<br/><i>Process</i><br/><b>SEM Imaging@100nm</b>"]
    5:::dep_completed
    5["<a href='https://git.fa-fo.de/fafo/techtree/issues/30' target='_blank'>#30</a> | COMPLETED<br/><i>Process</i><br/><b>SEM Imaging@1µm</b>"]
    6:::dep_completed
    6["<a href='https://git.fa-fo.de/fafo/techtree/issues/29' target='_blank'>#29</a> | COMPLETED<br/><i>Process</i><br/><b>SEM Imaging@10µm</b>"]
    7:::dependant
    7["<a href='https://git.fa-fo.de/fafo/techtree/issues/112' target='_blank'>#112</a> | MISSING<br/><i>Process</i><br/><b>Nanoscale Imaging</b>"]
    1 --> 2
    0 --> 4
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    4 --> 5
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    6 --> 2
    2 --> 3
    7 --> 0

Digest: b874f2f8385b8d6df166f19c92ff0f3e5295436740aa89ab1f53df8c478ecf71; Last Updated: 2025-11-09 00:59:13

## Partial Techtree ```mermaid flowchart BT classDef eoi fill:#fff, stroke:#000, color:#000; classDef dependant fill:#fff, stroke:#888, color:#888; classDef dep_missing fill:#fcc, stroke:#800, color:#000; classDef dep_assigned fill:#ffa, stroke:#a50, color:#000; classDef dep_completed fill:#afa, stroke:#080, color:#000; 0:::eoi 0["<a href='https://git.fa-fo.de/fafo/techtree/issues/32' target='_blank'>#32</a> | MISSING<br/><i>Process</i><br/><b>SEM Imaging@10nm</b>"] 1:::dep_completed 1["<a href='https://git.fa-fo.de/fafo/techtree/issues/33' target='_blank'>#33</a> | COMPLETED<br/><i>Equipment</i><br/><b>SEM Vibration Isolation</b>"] 2:::dep_completed 2["<a href='https://git.fa-fo.de/fafo/techtree/issues/28' target='_blank'>#28</a> | COMPLETED<br/><i>Equipment</i><br/><b>Scanning Electron Microscope (SEM)</b>"] 3:::dep_completed 3["<a href='https://git.fa-fo.de/fafo/techtree/issues/26' target='_blank'>#26</a> | COMPLETED<br/><i>Equipment</i><br/><b>Water Cooling</b>"] 4:::dep_completed 4["<a href='https://git.fa-fo.de/fafo/techtree/issues/31' target='_blank'>#31</a> | COMPLETED<br/><i>Process</i><br/><b>SEM Imaging@100nm</b>"] 5:::dep_completed 5["<a href='https://git.fa-fo.de/fafo/techtree/issues/30' target='_blank'>#30</a> | COMPLETED<br/><i>Process</i><br/><b>SEM Imaging@1µm</b>"] 6:::dep_completed 6["<a href='https://git.fa-fo.de/fafo/techtree/issues/29' target='_blank'>#29</a> | COMPLETED<br/><i>Process</i><br/><b>SEM Imaging@10µm</b>"] 7:::dependant 7["<a href='https://git.fa-fo.de/fafo/techtree/issues/112' target='_blank'>#112</a> | MISSING<br/><i>Process</i><br/><b>Nanoscale Imaging</b>"] 1 --> 2 0 --> 4 0 --> 1 4 --> 5 5 --> 6 6 --> 2 2 --> 3 7 --> 0 ``` <small>Digest: b874f2f8385b8d6df166f19c92ff0f3e5295436740aa89ab1f53df8c478ecf71; Last Updated: 2025-11-09 00:59:13</small>
Author
Owner

Is there any particlarly interesting thing we can do at this resolution?

Is there any particlarly interesting thing we can do at this resolution?
q3k added a new dependency 2025-06-15 00:28:55 +00:00
q3k removed the
Needs Documentation
label 2025-06-15 00:29:00 +00:00
rahix added a new dependency 2025-11-09 00:59:37 +00:00
Owner

@rahix is this completed with the new vibration isolation?

@rahix is this completed with the new vibration isolation?
Author
Owner

To my knowledge we have not achieved this resolution of imaging yet.

To my knowledge we have not achieved this resolution of imaging yet.
Owner

We need proper test/reference samples for this - so far we've been testing with our own samples where 10nm-scale features are hard to come by conclusively.

We need proper test/reference samples for this - so far we've been testing with our own samples where 10nm-scale features are hard to come by conclusively.
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