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SEM Imaging@10nm #32

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opened 2025-05-22 20:43:11 +00:00 by rahix · 5 comments
rahix commented 2025-05-22 20:43:11 +00:00
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Reliably resolving features that are 10nm wide.

Reliably resolving features that are 10nm wide.
forgejo-actions commented 2025-05-22 20:43:28 +00:00
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Partial Techtree

flowchart BT

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    0:::eoi
    0["<a href='https://git.fa-fo.de/fafo/techtree/issues/32' target='_blank'>#32</a> | MISSING<br/><i>Process</i><br/><b>SEM Imaging@10nm</b>"]
    1:::dep_completed
    1["<a href='https://git.fa-fo.de/fafo/techtree/issues/33' target='_blank'>#33</a> | COMPLETED<br/><i>Equipment</i><br/><b>SEM Vibration Isolation</b>"]
    2:::dep_completed
    2["<a href='https://git.fa-fo.de/fafo/techtree/issues/28' target='_blank'>#28</a> | COMPLETED<br/><i>Equipment</i><br/><b>Scanning Electron Microscope (SEM)</b>"]
    3:::dep_completed
    3["<a href='https://git.fa-fo.de/fafo/techtree/issues/26' target='_blank'>#26</a> | COMPLETED<br/><i>Equipment</i><br/><b>Water Cooling</b>"]
    4:::dep_completed
    4["<a href='https://git.fa-fo.de/fafo/techtree/issues/31' target='_blank'>#31</a> | COMPLETED<br/><i>Process</i><br/><b>SEM Imaging@100nm</b>"]
    5:::dep_completed
    5["<a href='https://git.fa-fo.de/fafo/techtree/issues/30' target='_blank'>#30</a> | COMPLETED<br/><i>Process</i><br/><b>SEM Imaging@1µm</b>"]
    6:::dep_completed
    6["<a href='https://git.fa-fo.de/fafo/techtree/issues/29' target='_blank'>#29</a> | COMPLETED<br/><i>Process</i><br/><b>SEM Imaging@10µm</b>"]
    7:::dependant
    7["<a href='https://git.fa-fo.de/fafo/techtree/issues/112' target='_blank'>#112</a> | ULTIMATE GOAL<br/><i>Process</i><br/><b>Nanoscale Imaging</b>"]
    1 --> 2
    0 --> 4
    0 --> 1
    4 --> 5
    5 --> 6
    6 --> 2
    2 --> 3
    7 --> 0

Digest: 448db4a873930c2fdc5cf5ff1cb79d3f1999b01f8c4a9590b8d7f060e7c374e7; Last Updated: 2026-01-23 14:00:47

## Partial Techtree ```mermaid flowchart BT classDef eoi fill:#fff, stroke:#000, color:#000; classDef dependant fill:#fff, stroke:#888, color:#888; classDef ultimate fill:#fff, stroke:#000, color:#000; classDef dep_missing fill:#fcc, stroke:#800, color:#000; classDef dep_assigned fill:#ffa, stroke:#a50, color:#000; classDef dep_completed fill:#afa, stroke:#080, color:#000; 0:::eoi 0["<a href='https://git.fa-fo.de/fafo/techtree/issues/32' target='_blank'>#32</a> | MISSING<br/><i>Process</i><br/><b>SEM Imaging@10nm</b>"] 1:::dep_completed 1["<a href='https://git.fa-fo.de/fafo/techtree/issues/33' target='_blank'>#33</a> | COMPLETED<br/><i>Equipment</i><br/><b>SEM Vibration Isolation</b>"] 2:::dep_completed 2["<a href='https://git.fa-fo.de/fafo/techtree/issues/28' target='_blank'>#28</a> | COMPLETED<br/><i>Equipment</i><br/><b>Scanning Electron Microscope (SEM)</b>"] 3:::dep_completed 3["<a href='https://git.fa-fo.de/fafo/techtree/issues/26' target='_blank'>#26</a> | COMPLETED<br/><i>Equipment</i><br/><b>Water Cooling</b>"] 4:::dep_completed 4["<a href='https://git.fa-fo.de/fafo/techtree/issues/31' target='_blank'>#31</a> | COMPLETED<br/><i>Process</i><br/><b>SEM Imaging@100nm</b>"] 5:::dep_completed 5["<a href='https://git.fa-fo.de/fafo/techtree/issues/30' target='_blank'>#30</a> | COMPLETED<br/><i>Process</i><br/><b>SEM Imaging@1µm</b>"] 6:::dep_completed 6["<a href='https://git.fa-fo.de/fafo/techtree/issues/29' target='_blank'>#29</a> | COMPLETED<br/><i>Process</i><br/><b>SEM Imaging@10µm</b>"] 7:::dependant 7["<a href='https://git.fa-fo.de/fafo/techtree/issues/112' target='_blank'>#112</a> | ULTIMATE GOAL<br/><i>Process</i><br/><b>Nanoscale Imaging</b>"] 1 --> 2 0 --> 4 0 --> 1 4 --> 5 5 --> 6 6 --> 2 2 --> 3 7 --> 0 ``` <small>Digest: 448db4a873930c2fdc5cf5ff1cb79d3f1999b01f8c4a9590b8d7f060e7c374e7; Last Updated: 2026-01-23 14:00:47</small>
rahix commented 2025-06-01 20:58:01 +00:00
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Is there any particlarly interesting thing we can do at this resolution?

Is there any particlarly interesting thing we can do at this resolution?
hugo commented 2025-11-12 11:29:38 +00:00
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@rahix is this completed with the new vibration isolation?

@rahix is this completed with the new vibration isolation?
rahix commented 2025-11-13 00:41:31 +00:00
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To my knowledge we have not achieved this resolution of imaging yet.

To my knowledge we have not achieved this resolution of imaging yet.
q3k commented 2025-11-13 01:44:29 +00:00
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We need proper test/reference samples for this - so far we've been testing with our own samples where 10nm-scale features are hard to come by conclusively.

We need proper test/reference samples for this - so far we've been testing with our own samples where 10nm-scale features are hard to come by conclusively.
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#112 Nanoscale Imaging
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#31 SEM Imaging@100nm
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#33 SEM Vibration Isolation
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