196 lines
16 KiB
Plaintext
196 lines
16 KiB
Plaintext
digraph {
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|
ranksep=1.2
|
|
{ rank=same; 0; 2; 3; 4; 8; 11; 14; 15; 19; 32; 41; 48; 61; 67; }
|
|
rankdir="BT"
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|
0 [ label = <{{#80 | MISSING}|<I>Process</I>|<B>Plasma Cleaning</B>}>, shape = "record", color = "#800", fontcolor = "#800", fillcolor = "#fcc", style = "filled"]
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|
1 [ label = <{{#79 | MISSING}|<I>Equipment</I>|<B>Sputter Coater</B>}>, shape = "record", color = "#800", fontcolor = "#800", fillcolor = "#ffddc1", style = "filled"]
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|
2 [ label = <{{#78 | ASSIGNED}|<I>Process</I>|<B>Optical Die Imaging</B>}>, shape = "record", color = "#a50", fontcolor = "#a50", fillcolor = "#ffa", style = "filled"]
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3 [ label = <{{#77 | MISSING}|<I>Process</I>|<B>Imaging of Human Blood Cells</B>}>, shape = "record", color = "#800", fontcolor = "#800", fillcolor = "#fcc", style = "filled"]
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4 [ label = <{{#76 | ASSIGNED}|<I>Process</I>|<B>Video Streaming</B>}>, shape = "record", color = "#a50", fontcolor = "#a50", fillcolor = "#ffa", style = "filled"]
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5 [ label = <{{#75 | ASSIGNED}|<I>Equipment</I>|<B>Microphone(s)</B>}>, shape = "record", color = "#a50", fontcolor = "#a50", fillcolor = "#ffa", style = "filled"]
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6 [ label = <{{#74 | COMPLETED}|<I>Equipment</I>|<B>Camcorder</B>}>, shape = "record", color = "#080", fontcolor = "#080", fillcolor = "#afa", style = "filled"]
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7 [ label = <{{#73 | ASSIGNED}|<I>Development</I>|<B>Main Camera Rig</B>}>, shape = "record", color = "#a50", fontcolor = "#a50", fillcolor = "#ffa", style = "filled"]
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8 [ label = <{{#72 | MISSING}|<I>Process</I>|<B>STM Non-metallic imaging</B>}>, shape = "record", color = "#800", fontcolor = "#800", fillcolor = "#fcc", style = "filled"]
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9 [ label = <{{#71 | MISSING}|<I>Research</I>|<B>STM Metal Pattern Deposition</B>}>, shape = "record", color = "#800", fontcolor = "#800", fillcolor = "#fcc", style = "filled"]
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10 [ label = <{{#70 | MISSING}|<I>Research</I>|<B>STM Lithography</B>}>, shape = "record", color = "#800", fontcolor = "#800", fillcolor = "#fcc", style = "filled"]
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11 [ label = <{{#69 | MISSING}|<I>Research</I>|<B>STM Surface Topography Manipulation</B>}>, shape = "record", color = "#800", fontcolor = "#800", fillcolor = "#fcc", style = "filled"]
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12 [ label = <{{#68 | ASSIGNED}|<I>Equipment</I>|<B>Heating Stirrer</B>}>, shape = "record", color = "#a50", fontcolor = "#a50", fillcolor = "#ffa", style = "filled"]
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13 [ label = <{{#67 | MISSING}|<I>Equipment</I>|<B>Chemical Storage/Containment</B>}>, shape = "record", color = "#800", fontcolor = "#800", fillcolor = "#fcc", style = "filled"]
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14 [ label = <{{#66 | ASSIGNED}|<I>Process</I>|<B>Video Recording</B>}>, shape = "record", color = "#a50", fontcolor = "#a50", fillcolor = "#ffa", style = "filled"]
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15 [ label = <{{#65 | MISSING}|<I>Process</I>|<B>Gas chromatography</B>}>, shape = "record", color = "#800", fontcolor = "#800", fillcolor = "#fcc", style = "filled"]
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16 [ label = <{{#64 | COMPLETED}|<I>Equipment</I>|<B>FFF 3D-Printer</B>}>, shape = "record", color = "#080", fontcolor = "#080", fillcolor = "#afa", style = "filled"]
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17 [ label = <{{#63 | ASSIGNED}|<I>Equipment</I>|<B>OpenFlexure Delta Stage</B>}>, shape = "record", color = "#a50", fontcolor = "#a50", fillcolor = "#ffa", style = "filled"]
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18 [ label = <{{#62 | MISSING}|<I>Process</I>|<B>Lithography</B>}>, shape = "record", color = "#800", fontcolor = "#800", fillcolor = "#fcc", style = "filled"]
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19 [ label = <{{#61 | MISSING}|<I>Process</I>|<B>Zeloof Z1 process</B>}>, shape = "record", color = "#800", fontcolor = "#800", fillcolor = "#fcc", style = "filled"]
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20 [ label = <{{#60 | MISSING}|<I>Process</I>|<B>Thermal diffusion doping</B>}>, shape = "record", color = "#800", fontcolor = "#800", fillcolor = "#fcc", style = "filled"]
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21 [ label = <{{#59 | MISSING}|<I>Process</I>|<B>H₃PO₄/HNO₃/AcOH Etching</B>}>, shape = "record", color = "#800", fontcolor = "#800", fillcolor = "#fcc", style = "filled"]
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22 [ label = <{{#58 | MISSING}|<I>Process</I>|<B>Pattern Al</B>}>, shape = "record", color = "#800", fontcolor = "#800", fillcolor = "#fcc", style = "filled"]
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23 [ label = <{{#57 | MISSING}|<I>Process</I>|<B>Metal thin film deposition</B>}>, shape = "record", color = "#800", fontcolor = "#800", fillcolor = "#fcc", style = "filled"]
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24 [ label = <{{#56 | MISSING}|<I>Process</I>|<B>PVD: Thermal Evaporation</B>}>, shape = "record", color = "#800", fontcolor = "#800", fillcolor = "#ffddc1", style = "filled"]
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25 [ label = <{{#55 | MISSING}|<I>Equipment</I>|<B>Tube Furnace</B>}>, shape = "record", color = "#800", fontcolor = "#800", fillcolor = "#ffddc1", style = "filled"]
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26 [ label = <{{#54 | MISSING}|<I>Process</I>|<B>Si Thermal Oxidation</B>}>, shape = "record", color = "#800", fontcolor = "#800", fillcolor = "#fcc", style = "filled"]
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27 [ label = <{{#53 | MISSING}|<I>Process</I>|<B>Pattern SiO₂</B>}>, shape = "record", color = "#800", fontcolor = "#800", fillcolor = "#fcc", style = "filled"]
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28 [ label = <{{#52 | MISSING}|<I>Development</I>|<B>Maskless photolithography stepper</B>}>, shape = "record", color = "#800", fontcolor = "#800", fillcolor = "#ffddc1", style = "filled"]
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29 [ label = <{{#51 | MISSING}|<I>Process</I>|<B>Maskless Photolithography</B>}>, shape = "record", color = "#800", fontcolor = "#800", fillcolor = "#fcc", style = "filled"]
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30 [ label = <{{#50 | MISSING}|<I>Process</I>|<B>E-beam Lithography</B>}>, shape = "record", color = "#800", fontcolor = "#800", fillcolor = "#fcc", style = "filled"]
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31 [ label = <{{#49 | ASSIGNED}|<I>Development</I>|<B>Spin Coater</B>}>, shape = "record", color = "#a50", fontcolor = "#a50", fillcolor = "#ffa", style = "filled"]
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32 [ label = <{{#48 | MISSING}|<I>Process</I>|<B>STM Imaging Individual Atoms</B>}>, shape = "record", color = "#800", fontcolor = "#800", fillcolor = "#fcc", style = "filled"]
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33 [ label = <{{#47 | MISSING}|<I>Process</I>|<B>STM Imaging@1nm</B>}>, shape = "record", color = "#800", fontcolor = "#800", fillcolor = "#fcc", style = "filled"]
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34 [ label = <{{#46 | MISSING}|<I>Process</I>|<B>STM Imaging@10nm</B>}>, shape = "record", color = "#800", fontcolor = "#800", fillcolor = "#fcc", style = "filled"]
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35 [ label = <{{#45 | ASSIGNED}|<I>Process</I>|<B>STM Imaging@100nm</B>}>, shape = "record", color = "#a50", fontcolor = "#a50", fillcolor = "#ffa", style = "filled"]
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36 [ label = <{{#44 | ASSIGNED}|<I>Process</I>|<B>STM Imaging@1µm</B>}>, shape = "record", color = "#a50", fontcolor = "#a50", fillcolor = "#ffa", style = "filled"]
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37 [ label = <{{#43 | ASSIGNED}|<I>Development</I>|<B>Scanning Tunneling Microscope (STM)</B>}>, shape = "record", color = "#a50", fontcolor = "#a50", fillcolor = "#ffa", style = "filled"]
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38 [ label = <{{#42 | COMPLETED}|<I>Development</I>|<B>STM Vibration Isolation</B>}>, shape = "record", color = "#080", fontcolor = "#080", fillcolor = "#afa", style = "filled"]
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39 [ label = <{{#41 | COMPLETED}|<I>Process</I>|<B>Primitive Die Imaging</B>}>, shape = "record", color = "#080", fontcolor = "#080", fillcolor = "#afa", style = "filled"]
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40 [ label = <{{#40 | ASSIGNED}|<I>Equipment</I>|<B>Air Compressor</B>}>, shape = "record", color = "#a50", fontcolor = "#a50", fillcolor = "#ffa", style = "filled"]
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41 [ label = <{{#39 | MISSING}|<I>Development</I>|<B>OBI Lite</B>}>, shape = "record", color = "#800", fontcolor = "#800", fillcolor = "#fcc", style = "filled"]
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42 [ label = <{{#38 | MISSING}|<I>Process</I>|<B>SEM Non-Metallic Imaging</B>}>, shape = "record", color = "#800", fontcolor = "#800", fillcolor = "#fcc", style = "filled"]
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43 [ label = <{{#37 | MISSING}|<I>Process</I>|<B>PVD: Sputtering</B>}>, shape = "record", color = "#800", fontcolor = "#800", fillcolor = "#fcc", style = "filled"]
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44 [ label = <{{#36 | MISSING}|<I>Process</I>|<B>Primitive Chip Imaging</B>}>, shape = "record", color = "#800", fontcolor = "#800", fillcolor = "#fcc", style = "filled"]
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45 [ label = <{{#35 | MISSING}|<I>Equipment</I>|<B>SEM Beam Blanker</B>}>, shape = "record", color = "#800", fontcolor = "#800", fillcolor = "#fcc", style = "filled"]
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46 [ label = <{{#34 | COMPLETED}|<I>Equipment</I>|<B>Open Beam Interface</B>}>, shape = "record", color = "#080", fontcolor = "#080", fillcolor = "#afa", style = "filled"]
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47 [ label = <{{#33 | ASSIGNED}|<I>Equipment</I>|<B>SEM Vibration Isolation</B>}>, shape = "record", color = "#a50", fontcolor = "#a50", fillcolor = "#ffa", style = "filled"]
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48 [ label = <{{#32 | MISSING}|<I>Process</I>|<B>SEM Imaging@10nm</B>}>, shape = "record", color = "#800", fontcolor = "#800", fillcolor = "#fcc", style = "filled"]
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49 [ label = <{{#31 | COMPLETED}|<I>Process</I>|<B>SEM Imaging@100nm</B>}>, shape = "record", color = "#080", fontcolor = "#080", fillcolor = "#afa", style = "filled"]
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50 [ label = <{{#30 | COMPLETED}|<I>Process</I>|<B>SEM Imaging@1µm</B>}>, shape = "record", color = "#080", fontcolor = "#080", fillcolor = "#afa", style = "filled"]
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51 [ label = <{{#29 | COMPLETED}|<I>Process</I>|<B>SEM Imaging@10µm</B>}>, shape = "record", color = "#080", fontcolor = "#080", fillcolor = "#afa", style = "filled"]
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52 [ label = <{{#28 | COMPLETED}|<I>Equipment</I>|<B>Scanning Electron Microscope (SEM)</B>}>, shape = "record", color = "#080", fontcolor = "#080", fillcolor = "#afa", style = "filled"]
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53 [ label = <{{#27 | ASSIGNED}|<I>Equipment</I>|<B>Technical Ventilation</B>}>, shape = "record", color = "#a50", fontcolor = "#a50", fillcolor = "#ffa", style = "filled"]
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54 [ label = <{{#26 | COMPLETED}|<I>Equipment</I>|<B>Water Cooling</B>}>, shape = "record", color = "#080", fontcolor = "#080", fillcolor = "#afa", style = "filled"]
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55 [ label = <{{#25 | MISSING}|<I>Equipment</I>|<B>Plasma Etcher</B>}>, shape = "record", color = "#800", fontcolor = "#800", fillcolor = "#fcc", style = "filled"]
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56 [ label = <{{#24 | ASSIGNED}|<I>Equipment</I>|<B>~3ph Power (below 10kW)</B>}>, shape = "record", color = "#a50", fontcolor = "#a50", fillcolor = "#ffa", style = "filled"]
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57 [ label = <{{#23 | MISSING}|<I>Equipment</I>|<B>Fume Hood</B>}>, shape = "record", color = "#800", fontcolor = "#800", fillcolor = "#fcc", style = "filled"]
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58 [ label = <{{#22 | MISSING}|<I>Equipment</I>|<B>Running Water and Sink</B>}>, shape = "record", color = "#800", fontcolor = "#800", fillcolor = "#ffddc1", style = "filled"]
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59 [ label = <{{#21 | MISSING}|<I>Process</I>|<B>Reactive Ion Etching</B>}>, shape = "record", color = "#800", fontcolor = "#800", fillcolor = "#fcc", style = "filled"]
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60 [ label = <{{#20 | MISSING}|<I>Process</I>|<B>Body Bias Injection</B>}>, shape = "record", color = "#800", fontcolor = "#800", fillcolor = "#fcc", style = "filled"]
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61 [ label = <{{#19 | MISSING}|<I>Process</I>|<B>IC Fault Injection</B>}>, shape = "record", color = "#800", fontcolor = "#800", fillcolor = "#fcc", style = "filled"]
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62 [ label = <{{#18 | MISSING}|<I>Research</I>|<B>SEM Fault Injection</B>}>, shape = "record", color = "#800", fontcolor = "#800", fillcolor = "#fcc", style = "filled"]
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63 [ label = <{{#17 | MISSING}|<I>Process</I>|<B>SEM Nanoprobing/Live Analysis</B>}>, shape = "record", color = "#800", fontcolor = "#800", fillcolor = "#fcc", style = "filled"]
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64 [ label = <{{#16 | MISSING}|<I>Process</I>|<B>Laser Fault Injection</B>}>, shape = "record", color = "#800", fontcolor = "#800", fillcolor = "#fcc", style = "filled"]
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65 [ label = <{{#15 | MISSING}|<I>Process</I>|<B>Microprobing</B>}>, shape = "record", color = "#800", fontcolor = "#800", fillcolor = "#fcc", style = "filled"]
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66 [ label = <{{#14 | ASSIGNED}|<I>Equipment</I>|<B>Optical Microscope</B>}>, shape = "record", color = "#a50", fontcolor = "#a50", fillcolor = "#ffa", style = "filled"]
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67 [ label = <{{#13 | MISSING}|<I>Process</I>|<B>Full Chip Reverse Engineering</B>}>, shape = "record", color = "#800", fontcolor = "#800", fillcolor = "#fcc", style = "filled"]
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68 [ label = <{{#12 | MISSING}|<I>Process</I>|<B>DASH Stain</B>}>, shape = "record", color = "#800", fontcolor = "#800", fillcolor = "#fcc", style = "filled"]
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69 [ label = <{{#11 | MISSING}|<I>Process</I>|<B>Simple Chip Imaging</B>}>, shape = "record", color = "#800", fontcolor = "#800", fillcolor = "#fcc", style = "filled"]
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70 [ label = <{{#10 | ASSIGNED}|<I>Equipment</I>|<B>SEM: Motorized Stage</B>}>, shape = "record", color = "#a50", fontcolor = "#a50", fillcolor = "#ffa", style = "filled"]
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71 [ label = <{{#9 | ASSIGNED}|<I>Development</I>|<B>Optical Microscope: Motorized Stage</B>}>, shape = "record", color = "#a50", fontcolor = "#a50", fillcolor = "#ffa", style = "filled"]
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72 [ label = <{{#8 | MISSING}|<I>Process</I>|<B>Plasma Etching</B>}>, shape = "record", color = "#800", fontcolor = "#800", fillcolor = "#fcc", style = "filled"]
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73 [ label = <{{#7 | MISSING}|<I>Equipment</I>|<B>Fiber Laser</B>}>, shape = "record", color = "#800", fontcolor = "#800", fillcolor = "#ffddc1", style = "filled"]
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74 [ label = <{{#6 | MISSING}|<I>Process</I>|<B>HNO₃/H₂SO₄ Etching</B>}>, shape = "record", color = "#800", fontcolor = "#800", fillcolor = "#fcc", style = "filled"]
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75 [ label = <{{#5 | MISSING}|<I>Process</I>|<B>BOE Etching</B>}>, shape = "record", color = "#800", fontcolor = "#800", fillcolor = "#fcc", style = "filled"]
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76 [ label = <{{#4 | ASSIGNED}|<I>Equipment</I>|<B>Wet Lab (Chemistry)</B>}>, shape = "record", color = "#a50", fontcolor = "#a50", fillcolor = "#ffa", style = "filled"]
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77 [ label = <{{#3 | MISSING}|<I>Equipment</I>|<B>Lapping Machine</B>}>, shape = "record", color = "#800", fontcolor = "#800", fillcolor = "#ffddc1", style = "filled"]
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78 [ label = <{{#2 | MISSING}|<I>Process</I>|<B>Chip Delayering</B>}>, shape = "record", color = "#800", fontcolor = "#800", fillcolor = "#fcc", style = "filled"]
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79 [ label = <{{#1 | MISSING}|<I>Process</I>|<B>Chip Decapping</B>}>, shape = "record", color = "#800", fontcolor = "#800", fillcolor = "#fcc", style = "filled"]
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