Maskless photolithography stepper #52
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#51 Maskless Photolithography
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This machine exposes the photoresist on a die to define patterns. A maskless process is one where an arbitrary image can be displayed instead of a fixed mask. Essentially, this is a reverse projector: Instead of making the image larger, it is made smaller, focused down onto the die. Usually, it is also necessary to use UV light.
Here are a few links to existing setups from other people:
Partial Techtree
Digest: 7413caea430d31490f939f9a9d5c5f2819c3c15944d5abe4ecdf8dc2063ec0a0; Last Updated: 2025-05-25 15:31:08