First iteration design: Vacuum Chamber #1

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opened 2026-02-09 04:39:18 +00:00 by rahix · 0 comments
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This first iteration of the vacuum chamber is meant to target the following topics that we want to learn/demonstrate:

  • Can we actually build a vacuum chamber from this tube + plates construction that works?
    • Can we make the sealing surfaces flat enough with accessible tools?
  • What will be the cost of such a system?
  • What will the full BOM for such a system look like?
  • How difficult is it to pump down the chamber?
  • Does the strategy for the feedthroughts work?

To get there, here is a collection of topics we should answer before committing to a design:

  • What tube stock is most commonly available? We should design the chamber around this
    • Alu? Stainless? Wall thickness?
    • Roughly targeting ø300 mm
  • What will be the vacuum system to connect to this chamber?
    • Turbo?
    • Isolation valves for turbo for quick pump-down? Maybe not now, but should make provisions to do this later?
    • Necessary flanges on the chamber
This first iteration of the vacuum chamber is meant to target the following topics that we want to learn/demonstrate: - Can we actually build a vacuum chamber from this tube + plates construction that works? * Can we make the sealing surfaces flat enough with accessible tools? - What will be the cost of such a system? - What will the full BOM for such a system look like? - How difficult is it to pump down the chamber? - Does the strategy for the feedthroughts work? To get there, here is a collection of topics we should answer before committing to a design: - [ ] What tube stock is most commonly available? We should design the chamber around this - Alu? Stainless? Wall thickness? - Roughly targeting ø300 mm - [ ] What will be the vacuum system to connect to this chamber? - Turbo? - Isolation valves for turbo for quick pump-down? Maybe not now, but should make provisions to do this later? - Necessary flanges on the chamber
jana was assigned by rahix 2026-02-09 04:39:26 +00:00
rahix self-assigned this 2026-02-09 04:39:26 +00:00
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Reference: fafo/sputter-coater#1
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