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jeol-t330a/modules/ph00524
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README.md

Board PH00524-2

The board controlling the vacuum valves does not show up in the schematics delivered with the SEM. To us, it seems like the functionality was updated by merging a few of the boards from the schematics into a single board with even more smartness.

PH00524-2 contains connectors named FK*, FM*, and FL*, leading to the assumption that the boards FK, FM, and FL have been integrated into it. So far, the connectors seem to match up with the ones shown in the SEM schematics.

There is also a Z80 based system + an EEPROM on the board.

Image of PH00524-2