jeol-t330a/succbone

succbone

succbone is our "automation" system for the vacuum system of the SEM.

Features

• Read a TPR280 pirani gauge (0-10V analog input)
• 8x relay outputs for
  • Roughing pump interlock
  • Diffusion pump interlock
  • Emulate Pump-Down push button
  • Emulate Vent push button
  • Signal two different vacuum levels to the original evacuation controller
    • Rough vacuum reached
    • High vacuum reached
• Diffusion pump temperature monitoring via three PT100 sensors
• Environmental temperature & humidity monitoring (external sensor)

Device Overview

These are the main devices powering the succbone control system. For details, please check the wiring diagrams in panel.pdf.

• -KEB1: BeagleBone as main control system with addonboard for PSU & analog 0-10V readout
• -KED1: MikroTik RB450G router as gateway to the outside and network switch
• -KED2: MODBUS-TCP to MODBUS-RTU bridge
• -KEC1: MODBUS-RTU 8x relay output and 8x digital input board
• -KEC2: MODBUS-RTU 8x PT100 500°C transmitter
• -BTA1: MODBUS-RTU environmental temperature & humidity sensor
• -QAA1: Contactor for the roughing pump interlock
• -QAA2: Contactor for the diffusion pump interlock

3D-Printed Components

• DIN-rail mount for the BeagleBone
• [DIN-rail mount for the MikroTik RB450G]
• (legacy: DIN-rail mount for relay board)
• Cable Strain Relief Plates